Abstract The onset of electric discharge instability in rare-gas monofluoride lasers pumped by electron beam sustained electric discharges (e.g., KrF*) is delayed by employing a laser gas mixture (such as 0.95 Ar, 0.05 Kr, and 0.005 F 2 ) which includes a small amount of a halogen compound (NF 3 ) having a rate coefficient for electron dissociative attachment which is much larger than that for fluorine (such as 0.0005 NF 3 ). The addition of nitrogen trifluoride to the gas mixture modifies the halogen kinetics in a manner to reduce the effect that consumption of the fluorine fuel has on the growth of secondary electrons, and therefore the occurrence of instability in the discharge. The rare-gas metastable quenching coefficient for the nitrogen trifluoride is sufficiently small (on the order of six times smaller than that of the fluorine) so that the small amount of nitrogen trifluoride utilized to stabilize the discharge exerts little or no influence on the other laser processes.
An improved rare-gas monofluoride pulse laser, pumped by an electron beam sustained electric discharge, including: a laser chamber containing a mixture of a rare-gas buffer gas, a rare-gas energy transfer gas, and a fluorine fuel gas, and providing a laser gain region; electron beam sustained electric discharge means including a high voltage source connected between an anode and a cathode disposed to provide an electric field in said laser gain region and a pulsed electron gun for injecting high energy primary electrons into said laser gain region; wherein the improvement for delaying the onset of instability of the electric discharge comprises a fractional concentration, on the order of one-tenth of the fractional concentration of fluorine fuel gas, of nitrogen trifluoride in said mixture, whereby said laser chamber contains both said fluorine fuel gas and said nitrogen trifluoride.
Claim 2
Dependent Claim
137 words
An improved rare-gas monofluoride pulse laser, pumped by an electron beam sustained electric discharge, including: a laser chamber containing a mixture of a rare-gas buffer gas, a rare-gas energy transfer gas, and a fluorine fuel gas, and providing a laser gain region; electron beam sustained electric discharge means including a high voltage source connected between an anode and a cathode disposed to provide an electric field in said laser gain region and a pulsed electron gun for injecting high energy primary electrons into said laser gain region; wherein the improvement for delaying the onset of instability of the electric discharge comprises a fractional concentration, on the order of one-tenth of the fractional concentration of fluorine fuel gas, of nitrogen trifluoride in said mixture, whereby said laser chamber contains both said fluorine fuel gas and said nitrogen trifluoride.