Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
102 words
Gas monitoring apparatus comprising: a support which includes an electrically insulating surface; a pair of electrodes spaced apart on said surface; a sensor disposed on said surface in a position bridging said electrodes, said sensor being composed of a material which exhibits a change in electrical conductivity in response to exposure of said material to a gas to be sensed; and a molecular sieve integrally overlying said sensor on the side thereof opposite said surface, said sieve being composed of a porous solid material and having a discrete pore size no larger than the molecular size of said gas to be screened.
Claim 2
Dependent Claim
102 words
Gas monitoring apparatus comprising: a support which includes an electrically insulating surface; a pair of electrodes spaced apart on said surface; a sensor disposed on said surface in a position bridging said electrodes, said sensor being composed of a material which exhibits a change in electrical conductivity in response to exposure of said material to a gas to be sensed; and a molecular sieve integrally overlying said sensor on the side thereof opposite said surface, said sieve being composed of a porous solid material and having a discrete pore size no larger than the molecular size of said gas to be screened.
Claim 3
Dependent Claim
20 words
Apparatus as defined in claim 1 in which said molecular sieve consists essentially of palladium, platinum, zeolite or beryllium oxide.
Claim 4
Dependent Claim
22 words
Apparatus as defined in claim 1 in which said sensor consists essentially of zinc oxide doped with gallium oxide as an impurity.
Claim 5
Dependent Claim
22 words
Apparatus as defined in claim 1 in which the material of said molecular sieve is deposited by spray pyrolysis over said sensor.
Claim 6
Dependent Claim
31 words
Apparatus as defined in claim 4 in which the source material for spray pyrolysis deposition is the material of said sieve mixed with a binder consisting essentially of a soluable salt.
Claim 7
Dependent Claim
28 words
Apparatus as defined in claim 1 in which the material of said sieve passivates said sensor except for gases having a molecular size smaller than said pore size.
Claim 8
Dependent Claim
26 words
Apparatus as defined in claim 1 in which said support includes a substrate of silicon and said surface is an oxide layer formed on said silicon.
Claim 9
Dependent Claim
202 words
Gas monitoring apparatus comprising: an array of a plurality of devices each including: a support which includes an electrically insulating surface; a pair of electrodes spaced apart on said surface; a sensor disposed on said surface in a position bridging said electrodes, said sensor being composed of a material which exhibits a change in electrical conductivity in response to exposure of said material to a gas to be sensed; a molecular sieve integrally overlying said sensor on the side thereof opposite said surface, said sieve being composed of a porous solid material and having a discrete pore size no larger than the molecular size of said gas to be screened; said sensors in all of said devices being identically composed of inorganic material and said molecular sieves in said plurality of devices individually having different discrete pore sizes respectively no larger than the molecular sizes of corresponding different gas constituents to be screened; and means coupled to the different ones of said electrodes for responding to changes in electrical parameters respectively presented between said different pairs of electrodes to enable determination and analysis of different gas constituents correspondingly passed to different ones of said sensors by respective different ones of said sieves.
Claim 10
Dependent Claim
202 words
Gas monitoring apparatus comprising: an array of a plurality of devices each including: a support which includes an electrically insulating surface; a pair of electrodes spaced apart on said surface; a sensor disposed on said surface in a position bridging said electrodes, said sensor being composed of a material which exhibits a change in electrical conductivity in response to exposure of said material to a gas to be sensed; a molecular sieve integrally overlying said sensor on the side thereof opposite said surface, said sieve being composed of a porous solid material and having a discrete pore size no larger than the molecular size of said gas to be screened; said sensors in all of said devices being identically composed of inorganic material and said molecular sieves in said plurality of devices individually having different discrete pore sizes respectively no larger than the molecular sizes of corresponding different gas constituents to be screened; and means coupled to the different ones of said electrodes for responding to changes in electrical parameters respectively presented between said different pairs of electrodes to enable determination and analysis of different gas constituents correspondingly passed to different ones of said sensors by respective different ones of said sieves.