Light activated switching by the avalanche effect in semiconductors

Claim 3

The method as set forth in claim 1 wherein said optical energy is of level at least equal to the band gap of said material so as to photoproduce carriers in said body by transfer thereof between the valence and conduction bands thereof.

Claim 4

The method as set forth in claim 1 wherein said body contains an impurity having an energy level between the valence and conduction bands of the material of said body and wherein said optical energy level is at least equal to the gap between said impurity energy level and the conduction band level in said material so as to produce photocarriers in said body.

Claim 5

The method as set forth in claim 1 wherein said optical energy is of such level that a multiplicity of photons thereof have sufficient energy to transfer carriers between the valence and conduction bands thereof by multi-photon absorption of energy between the valence and conduction bands thereof to photoproduce carriers in said body.

Claim 6

The method as set forth in claim 1 wherein said optical energy is of such level as to photoproduce carriers in said body by ionization therein.

Claim 7

The method as set forth in claim 1 further comprising the steps of increasing the resistivity of said body to suppress thermal carrier excitation in said body.

Claim 8

The method as set forth in claim 6 further comprising the step of increasing the dielectric breakdown field strength of said material.

Claim 9

The method as set forth in claim 6 wherein said resistivity increasing step is carried out by cooling body to a cryogenic temperature.

Claim 10

The method as set forth in claim 7 wherein said resistivity increasing step is carried out by cooling said body to a cryogenic temperature and said dielectric breakdown increasing step is carried out by doping said material with a certain concentration of impurities which provide deep lying charge carrier trapping centers therein.

Claim 11

The method as set forth in claim 1 wherein said predetermined electrical field magnitude is obtained by increasing said field magnitude without application of said optical energy to said body until avalanche conduction occurs therein at a certain threshold field, and then decreasing said field magnitude below said threshold such that avalanche conduction occurs only after said optical energy is applied thereto.

Claim 12

Apparatus for switching high voltage from a source thereof to a load which comprises a body of semiconductor material, means for connecting said body between said source and said load to obtain an electric field across said body below the threshold for avalanche conduction therethrough, and means for activating avalanche conduction through said body with optical energy incident on said body of level less than for photoconduction needed to produce substantially full transmission therethrough.

Claim 13

Apparatus for switching high voltage from a source thereof to a load which comprises a body of semiconductor material, means for connecting said body between said source and said load to obtain an electric field across said body below the threshold for avalanche conduction therethrough, and means for activating avalanche conduction through said body with optical energy incident on said body of level less than for photoconduction needed to produce substantially full transmission therethrough.

Claim 14

The invention as set forth in claim 11 which comprises means for varying the relative levels of the intensity of said optical energy and the voltage from said source to control the time for substantially full transmission through said body after said optical energy is incident thereon.

Claim 15

The invention as set forth in claim 11 wherein said activating means comprises means for applying laser light of energy level less than one micro-joule to said body.

Claim 16

The invention as set forth in claim 11 wherein said activating means comprises means for applying laser light to said body having a frequency such that the energy of a photon thereof is at least equal to the band gap energy of said semiconductor material to result in the production of carries which multiply in the presence of said electric field to produce said avalanche conduction.

Claim 17

The invention as set forth in claim 11 wherein said semiconductor material has an impurity therein to provide an energy gap between the energy level of said impurity and said conduction band in said material which is less than the band gap energy of said material, and wherein said activating means comprises means for applying to said body laser light having a frequency such that the energy of a photon thereof is at least equal to said energy gap between said impurity level and said conduction band level to result in the production of carriers which multiply in the presence of said electric field to produce said avalanche conduction.

Claim 18

The invention as set forth in claim 11 wherein said activating means comprises means for applying laser light to said body of such frequency that the energy of a plurality of photons thereof equals the band gap energy of said material whereby carriers are produced by multi-photon absorption in said material which multiply in the presence of said electric field to produce said avalanche conduction.

Claim 19

The invention as set forth in claim 11 wherein said activating means comprises means for applying laser light to said body so as to produce ionization in part of said material which produces free carriers which multiply in the presence of said electric field to produce said avalanche conduction therein.

Claim 20

The invention as set forth in claim 11 wherein means are provided for increasing the resistivity of said body above the inherent resistivity of said semiconductor material thereof at room temperature.

Claim 21

The invention as set forth in claim 18 wherein said resistivity increasing means comprises means for cooling said body to a cryogenic temperature.

Claim 22

The invention as set forth in claim 19 wherein said body has a predetermined concentration of charge carrier trapping centers for increasing the magnitude of the field which produce dielectric breakdown therein.

Claim 23

The invention as set forth in claim 20 wherein said material is GaAs doped with an impurity which provides said charge carrier trapping centers.

Claim 24

The invention as set forth in claim 21 wherein said impurity is Cr.

Claim 25

The invention as set forth in claim 20 wherein said material is Si doped with an impurity which provides said charge carrier trapping centers.

Claim 26

The invention as set forth in claim 23 wherein said impurity is Au.

Claim 27

The invention as set forth in claim 20 wherein said material is selected from the group consisting of Ge, Si, GaAs and InP, and said charge carrier trapping centers are provided by an impurity having a concentration of at least about 10 15 atoms of said impurity/cubic centimeter.

Claim 28

The invention as set forth in claim 11 wherein said body is a slab of said material having opposite faces separated by the thickness of said slab, said connecting means comprising electrodes opposed to each other in contact with said opposite faces, and said activating means comprises means for applying laser light onto at least one of said opposite faces.

Claim 29

The invention as set forth in claim 26 further comprising means surrounding said electrodes and body for defining a transmission line for pulses with submicronanosecond rise times through said electrode and body.

Claim 30

The invention as set forth in claim 26 wherein said source provides such high voltage that said electric field across the thickness of said body in the absence of conduction is about 100 Kv/cm.

Claim 31

The invention as set forth in claim 26 wherein means are conductively coupled to said slab for cooling said slab to a cryogenic temperature to increase the resistivity thereof.

Claim 32

The invention as set forth in claim 29 wherein said material is doped with an impurity providing an concentration of deep lying trapping centers of at least 10 15 /cubic centimeter to increase the dielectric strength of said cryogenic temperature and decrease the carrier recovery time.

Claim 33

Apparatus for amplitude discrimination of laser light pulses having different amplitude in a train of such pulses which propogates along a path, said apparatus comprising control means in said path responsive to the presence of high voltage for transmitting laser light to an output, a body of semiconductor material, a source of high voltage connected to said control means through said body, for applying an electric field across said body for avalanche multiplication of charge carriers therein produced when said body is illuminated by laser light of at least a certain threshold intensity, and means for illuminating said body with said laser light whereby to apply said high voltage to said control means coincidentally with the transmission of a laser light pulse in said train which is greater than said threshold intensity.

Claim 34

Apparatus for amplitude discrimination of laser light pulses having different amplitude in a train of such pulses which propogates along a path, said apparatus comprising control means in said path responsive to the presence of high voltage for transmitting laser light to an output, a body of semiconductor material, a source of high voltage connected to said control means through said body, for applying an electric field across said body for avalanche multiplication of charge carriers therein produced when said body is illuminated by laser light of at least a certain threshold intensity, and means for illuminating said body with said laser light whereby to apply said high voltage to said control means coincidentally with the transmission of a laser light pulse in said train which is greater than said threshold intensity.

Claim 35

The invention as set forth in claim 31 further comprising means in said path for relatively delaying the time for transmission of said laser light to said control means with respect to the time for transmission of said laser light to said body.

Claim 36

The invention as set forth in claim 32 wherein said control means is a Pockels cell.

Claim 37

Apparatus for switching high voltages and generating a high voltage pulse with fast rise time at a load, said apparatus comprising a first solid state avalanche switch, a second solid state avalanche switch, said switches each including bodies of semiconductor material, a source of high voltage, a charge line, said source being connected to said first switch through said charged line, a transmission line connecting said first and second switches, said second switch being connected to said load, and means for applying optical energy to trigger avalanche conduction sequentially in said first and second switches with the time delay between said avalanche conduction in said first switch being at least equal to the electrical propagation time between said switches along said transmission line interconnecting them such that the voltage across the body of semiconductor material in said second switch at the time of avalanche conduction therein is greater than the voltage across the body of semiconductor material in said first switch.

Claim 38

Apparatus for switching high voltages and generating a high voltage pulse with fast rise time at a load, said apparatus comprising a first solid state avalanche switch, a second solid state avalanche switch, said switches each including bodies of semiconductor material, a source of high voltage, a charge line, said source being connected to said first switch through said charged line, a transmission line connecting said first and second switches, said second switch being connected to said load, and means for applying optical energy to trigger avalanche conduction sequentially in said first and second switches with the time delay between said avalanche conduction in said first switch being at least equal to the electrical propagation time between said switches along said transmission line interconnecting them such that the voltage across the body of semiconductor material in said second switch at the time of avalanche conduction therein is greater than the voltage across the body of semiconductor material in said first switch.

Claim 39

The invention as set forth in claim 34 wherein said optical energy applying means comprises a laser for generating optical energy of intensity sufficient to trigger avalanche conduction in said switches, means for optically delaying the transmission of said light from said laser, and means for directing light from said laser and from said delay means to said first and second switches respectively.

Claim 40

The invention as set forth in claim 11 wherein said semiconductor material is selected from Ge, having an impurity level lying near the valence or conduction band, InSb, Pb, Sb and HgCd chalcogenides.