Method and apparatus for producing a multilayer semiconductor device utilizing liquid growth

Claim 3

In a method for producing semiconductor devices each having a multi-layer structure including a plurality of epitaxial layers by successively depositing said layers epitaxially on each of a plurality of substrates accommodated in one surface of a movable plate by causing the substrate to contact a solution of a semiconductive solute material in a molten metal solvent contained in a plurality of wells provided in a boat, the improvement which eliminates boat cooling and reheating steps, comprising: maintaining said upper portion of each said well at a predetermined constant temperature higher than that of said lower portion to effect communication of said solution between said upper and lower portion to establish a constant temperature difference between said upper portion and said lower portion during and continuously between the deposition of said epitaxial layers; soaking semiconductive solute material in said solution contained in each of said wells to maintain the solution at a saturated concentration in said upper portion of the well and at a supersaturated concentration in said lower portion thereof; and between each of said successive epitaxial layer depositions again moving said movable plate only in the same direction each time while maintaining said temperature difference and substantially coplanar with a lower open end of the lower portion of each said well as the substrates arrive at the open ends for the deposition of contents of the wells onto the respective substrates to form an epitaxial layer thereon.

Claim 4

In a method for producing semiconductor devices each having a multi-layer structure including a plurality of epitaxial layers by successively depositing said layers epitaxially on each of a plurality of substrates accommodated in one surface of a movable plate by causing the substrate to contact a solution of a semiconductive solute material in a molten metal solvent contained in a plurality of wells provided in a boat, the improvement which eliminates boat cooling and reheating steps, comprising: maintaining said upper portion of each said well at a predetermined constant temperature higher than that of said lower portion to effect communication of said solution between said upper and lower portion to establish a constant temperature difference between said upper portion and said lower portion during and continuously between the deposition of said epitaxial layers; soaking semiconductive solute material in said solution contained in each of said wells to maintain the solution at a saturated concentration in said upper portion of the well and at a supersaturated concentration in said lower portion thereof; and between each of said successive epitaxial layer depositions again moving said movable plate only in the same direction each time while maintaining said temperature difference and substantially coplanar with a lower open end of the lower portion of each said well as the substrates arrive at the open ends for the deposition of contents of the wells onto the respective substrates to form an epitaxial layer thereon.

Claim 5

A method according to claim 2 in which said solution is made with a substance selected from the group consisting of gallium-aluminum arsenide and gallium arsenide in a solvent gallium.

Claim 6

A method according to claim 2 in which said constant temperature difference between said upper portion and said lower portion is up to 50° C.

Claim 7

A method according to claim 2 in which said upper portion is maintained at a temperature of 900° C. to 850° C. and said lower portion is maintained at a temperature of 850° C. to 800° C., and said constant temperature difference between said upper portion and said lower portion is up to 50° C.

Claim 8

In a method for producing multi-layer semiconductor devices by depositing successively a plurality of epitaxial layers on each of a plurality of substrates utilizing liquid growth, the improvement which eliminates boat cooling and reheating steps, comprising the steps of: filling respectively with solutes including corresponding solvents in a plurality of first holes which are arranged in sequence on a boat; filling respectively with solutes including corresponding solvents in a plurality of second holes which are provided in the boat at lower positions than those of the first holes and interconnected by said solute respectively to the first holes; holding the solutes in the first holes at respective temperatures higher than those of the solutes in the second holes during and continuously between the deposition of epitaxial layers; and successively shifting in a given direction a substrate held in a sliding plate on and close to a plurality of said second holes while maintaining said respective temperatures.

Claim 9

In a method for producing multi-layer semiconductor devices by depositing successively a plurality of epitaxial layers on each of a plurality of substrates utilizing liquid growth, the improvement which eliminates boat cooling and reheating steps, comprising the steps of: filling respectively with solutes including corresponding solvents in a plurality of first holes which are arranged in sequence on a boat; filling respectively with solutes including corresponding solvents in a plurality of second holes which are provided in the boat at lower positions than those of the first holes and interconnected by said solute respectively to the first holes; holding the solutes in the first holes at respective temperatures higher than those of the solutes in the second holes during and continuously between the deposition of epitaxial layers; and successively shifting in a given direction a substrate held in a sliding plate on and close to a plurality of said second holes while maintaining said respective temperatures.

Claim 10

In an apparatus for successively producing semiconductor devices each having a multilayer structure including a plurality of epitaxial layers successively deposited on a substrate, the improvement comprising: boat means having a plurality of vertically disposed wells corresponding to the desired number of epitaxial layers to be deposited, each said well having an open lower end and an upper end in solution communication with said lower end during the deposition of epitaxial layers; movable means having a plurality of recesses formed on one surface for accommodating a plurality of substrates therein, said movable means being disposed so that said one surface is brought into substantially coplanar relation successively with the lower open ends of said wells and being movable in one predetermined direction only to successively dispose each of said substrates adjacent each of said lower open ends, with said substrates being kept in contact with said lower open ends respectively for a predetermined time; and means for maintaining the upper portion of each said well at a respective constant predetermined temperature higher than that of the respective lower portion of the well so as to establish a temperature difference between said upper portion and said lower portion of each said well during and continuously between the deposition of epitaxial layers.

Claim 11

In an apparatus for successively producing semiconductor devices each having a multilayer structure including a plurality of epitaxial layers successively deposited on a substrate, the improvement comprising: boat means having a plurality of vertically disposed wells corresponding to the desired number of epitaxial layers to be deposited, each said well having an open lower end and an upper end in solution communication with said lower end during the deposition of epitaxial layers; movable means having a plurality of recesses formed on one surface for accommodating a plurality of substrates therein, said movable means being disposed so that said one surface is brought into substantially coplanar relation successively with the lower open ends of said wells and being movable in one predetermined direction only to successively dispose each of said substrates adjacent each of said lower open ends, with said substrates being kept in contact with said lower open ends respectively for a predetermined time; and means for maintaining the upper portion of each said well at a respective constant predetermined temperature higher than that of the respective lower portion of the well so as to establish a temperature difference between said upper portion and said lower portion of each said well during and continuously between the deposition of epitaxial layers.

Claim 12

An apparatus according to claim 7 in which each of said wells includes means defining an upper hole having an open end through which semiconductive solute materials are supplied into said well, means defining a lower hole having an open end at which a deposition of an epitaxial layer takes place, and a passage interconnecting both holes.

Claim 13

An apparatus according to claim 7 including lid means for closing the upper ends of said wells and in which said means includes an electric furnace surrounding said enclosure and an auxiliary heater provided on top of each said lid means.

Claim 14

An apparatus as in claim 7 including guide means for guiding the movement of said movable means.

Claim 15

An apparatus as in claim 10 wherein said movable means includes slider means.

Claim 16

An apparatus as in claim 7 including means for preventing evaporation of solution from said wells.

Claim 17

An apparatus as in claim 12 wherein said upper end of each said well is open and said preventing means includes lid means for each said well for closing said upper end thereof.

Claim 18

An apparatus as in claim 13 wherein said movable means is a movable slider means, and the apparatus includes guide means for guiding the movement of said movable slider means and an enclosure for enclosing said boat means, lid means, slider means and guide means.

Claim 19

In a method for producing semiconductor devices each having a multi-layer structure including a plurality of epitaxial layers by successively depositing said layers epitaxially on each of a plurality of substrates accommodated in one surface of a movable plate at spaced positions in a given direction by causing the substrates to contact a solution of a semiconductive solute material in a molten metal solvent container in a plurality of successive wells provided in a boat at the same spacing as said substrates, each well having a lower portion with an open end and an upper portion, an improvement which eliminates boat cooling and reheating steps and comprises: moving said movable plate in said given direction substantially coplanar with the open ends of the lower portions of said wells to position first and second substrates respectively at the said open ends of second and first wells, holding said upper portions of each said well at respective desired first temperatures, concurrently holding said lower portions of each said well at respective desired second temperatures each of which is lower than the respective first temperature for establishing a respective difference in each said well between its said upper and lower portions to said lower portion thereof during the deposition of an epitaxial layer onto said substrate from that well, soaking semiconductive solute material in the solution contained in each said well to maintain the solution at a saturated concentration in said upper portion thereof and at a supersaturated concentration in said lower portion thereof, concurrently depositing first and second epitaxial layers respectively onto said second and first substrates respectively from said first and second wells by soaking said substrates in said supersaturated solution to grow said first and second layers to respective desired thicknesses before again moving said plate, and thereafter again moving said plate in said given direction substantially coplanar as aforesaid to position said second and first substrates respectively at the said open ends of said second well and a third said well to cause concurrent deposition therefrom of two further epitaxial layers of said multilayer structures in the same manner as aforesaid for said first and second epitaxial layers, said upper and lower portions of all said wells being held at their said first and second temperatures from the beginning of the first epitaxial growth on said first substrate through to the finish of the last epitaxial growth on the last of said substrates to receive a said deposition.

Claim 20

In a method for producing semiconductor devices each having a multi-layer structure including a plurality of epitaxial layers by successively depositing said layers epitaxially on each of a plurality of substrates accommodated in one surface of a movable plate at spaced positions in a given direction by causing the substrates to contact a solution of a semiconductive solute material in a molten metal solvent container in a plurality of successive wells provided in a boat at the same spacing as said substrates, each well having a lower portion with an open end and an upper portion, an improvement which eliminates boat cooling and reheating steps and comprises: moving said movable plate in said given direction substantially coplanar with the open ends of the lower portions of said wells to position first and second substrates respectively at the said open ends of second and first wells, holding said upper portions of each said well at respective desired first temperatures, concurrently holding said lower portions of each said well at respective desired second temperatures each of which is lower than the respective first temperature for establishing a respective difference in each said well between its said upper and lower portions to said lower portion thereof during the deposition of an epitaxial layer onto said substrate from that well, soaking semiconductive solute material in the solution contained in each said well to maintain the solution at a saturated concentration in said upper portion thereof and at a supersaturated concentration in said lower portion thereof, concurrently depositing first and second epitaxial layers respectively onto said second and first substrates respectively from said first and second wells by soaking said substrates in said supersaturated solution to grow said first and second layers to respective desired thicknesses before again moving said plate, and thereafter again moving said plate in said given direction substantially coplanar as aforesaid to position said second and first substrates respectively at the said open ends of said second well and a third said well to cause concurrent deposition therefrom of two further epitaxial layers of said multilayer structures in the same manner as aforesaid for said first and second epitaxial layers, said upper and lower portions of all said wells being held at their said first and second temperatures from the beginning of the first epitaxial growth on said first substrate through to the finish of the last epitaxial growth on the last of said substrates to receive a said deposition.

Claim 21

A method as in claim 15 including selecting the respective temperature differences established in the successive wells to cause all concurrently grown epitaxial layers to grow to the respective desired thicknesses therefor in the same length of time.

Claim 22

In a method for producing identical semiconductor devices each having a multilayer structure including a plurality of epitaxial layers deposited on one of successive substrates accommodated in one surface of a movable plate at spaced positions in a given direction by causing the substrates to contact a solution of a semiconductive solute material in a molten metal solvent contained in a plurality of successive wells provided in a boat at the same spacing as said substrates, each well having a lower portion with an open end and an upper portion, an improvement which eliminates boat cooling and reheating steps and comprises the steps of: (a) holding said upper portions of each said well at respective desired first temperatures, (b) concurrently holding said lower portions of each said well at respective desired second temperatures each of which is lower than the respective first temperature for establishing a respective difference in each said well between its said upper and lower portions, (c) soaking semiconductive solute material in the solution contained in each said well to maintain the solution at a saturated concentration in said upper portion thereof and at a supersaturated concentration in said lower portion thereof, (d) moving said movable plate in said given direction substantially coplanar with the open ends of the lower portions of said wells to position a set of said substrates at the said open ends of said wells, (e) concurrently depositing epitaxial layers respectively onto the so positioned substrates from the respective wells by soaking said substrates in said supersaturated solutions to grow said layers to respective desired thicknesses in the presence of the said temperature differences in the respective wells before again moving said plate, (f) repeatedly moving said plate in said given direction substantially coplanar as aforesaid to re-position said substrates so that a new set of substrates is at the open ends of said well, and (g) re-effecting step (e) in between said repositioning of said substrates caused by step (f), said upper and lower portions of all said wells being held at their said first and second temperatures from the beginning of the first epitaxial growth on the first of said substrates to receive a said deposition through to the finish of the last of said substrates to receive a said deposition.

Claim 23

In a method for producing identical semiconductor devices each having a multilayer structure including a plurality of epitaxial layers deposited on one of successive substrates accommodated in one surface of a movable plate at spaced positions in a given direction by causing the substrates to contact a solution of a semiconductive solute material in a molten metal solvent contained in a plurality of successive wells provided in a boat at the same spacing as said substrates, each well having a lower portion with an open end and an upper portion, an improvement which eliminates boat cooling and reheating steps and comprises the steps of: (a) holding said upper portions of each said well at respective desired first temperatures, (b) concurrently holding said lower portions of each said well at respective desired second temperatures each of which is lower than the respective first temperature for establishing a respective difference in each said well between its said upper and lower portions, (c) soaking semiconductive solute material in the solution contained in each said well to maintain the solution at a saturated concentration in said upper portion thereof and at a supersaturated concentration in said lower portion thereof, (d) moving said movable plate in said given direction substantially coplanar with the open ends of the lower portions of said wells to position a set of said substrates at the said open ends of said wells, (e) concurrently depositing epitaxial layers respectively onto the so positioned substrates from the respective wells by soaking said substrates in said supersaturated solutions to grow said layers to respective desired thicknesses in the presence of the said temperature differences in the respective wells before again moving said plate, (f) repeatedly moving said plate in said given direction substantially coplanar as aforesaid to re-position said substrates so that a new set of substrates is at the open ends of said well, and (g) re-effecting step (e) in between said repositioning of said substrates caused by step (f), said upper and lower portions of all said wells being held at their said first and second temperatures from the beginning of the first epitaxial growth on the first of said substrates to receive a said deposition through to the finish of the last of said substrates to receive a said deposition.

Claim 24

A method as in claim 17 wherein each of the said temperature differences is 50° C.

Claim 25

A method as in claim 17 wherein each of said first temperatures is in the range of 900° C. to 850° C.

Claim 26

A method as in claim 19 wherein each of said second temperatures is in the range of 850° C. to 800° C.

Claim 27

A method as in claim 17 including selecting at least a plurality of one of said first and second temperatures for respective wells to be substantially the same.

Claim 28

A method as in claim 17 including selecting at least two of one of said first and second temperatures for adjacent wells to be sufficiently different to give rise to at least potential thermal conduction between said adjacent wells in said boat.

Claim 29

A method as in claim 22 including substantially preventing said thermal conductivity in said boat between said adjacent wells.

Claim 30

A method as in claim 23 including spacing the upper portions of said wells in said boat sufficiently to substantially prevent said thermal conduction between those spaced upper portions.

Claim 31

A method as in claim 23 including partitioning the upper portions of said wells in said boat to substantially prevent said thermal conduction between those partitioned upper portions.

Claim 32

A method as in claim 17 wherein a plurality of the layers deposited from different wells are different in their said desired thicknesses and said temperature differences for all said wells are selected so that all concurrently grown layers are grown to their respective desired thicknesses in the same length of time.

Claim 33

A method as in claim 26 wherein the time between said repeated movements of said plate in step (f) is constant.