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US4339471A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of coating substrates with an abrasive layer

Assignee: RCA Corp
•
Filing: 1981-04-20
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Granted: 1982-07-13
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Expires: 2001-04-20
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Abstract

Abstract A method for preparing an abrasive SiO x coating, wherein 1≦×≦2, on a substrate by glow discharge deposition wherein the deposition on the substrate in a vacuum chamber is interrupted before the desired final SiO x coating thickness is obtained. SiH 4 and N 2 O are subjected to a glow discharge and SiO x is deposited onto the substrate. The deposition is interrupted, SiH 4 is removed from the vacuum chamber and the SiO x coating is exposed to oxygen. These steps are repeated until the desired final SiO x coating thickness is obtained.

Inventors

  • 👤 Grzegorz Kaganowicz
  • 👤 John W. Robinson

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 15:13
CPC Classifications
B; B24; B24D; B24D18/00; B24D18/0018; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 85 words
A method for preparing an abrasive silicon oxide coating on a substrate comprising: (a) placing said substrate in a vacuum chamber between two electrodes; (b) forming a glow discharge in said chamber in the presence of silane and N 2 O, thereby depositing a SiO x coating, wherein x is a number from 1-2, on said substrate; (c) removing silane from said chamber; (d) exposing said coating to oxygen; and (e) repeating step (b) to deposit an additional layer of silicon oxide on said substrate.
Claim 2
Independent Claim 85 words
A method for preparing an abrasive silicon oxide coating on a substrate comprising: (a) placing said substrate in a vacuum chamber between two electrodes; (b) forming a glow discharge in said chamber in the presence of silane and N 2 O, thereby depositing a SiO x coating, wherein x is a number from 1-2, on said substrate; (c) removing silane from said chamber; (d) exposing said coating to oxygen; and (e) repeating step (b) to deposit an additional layer of silicon oxide on said substrate.
Claim 3
Dependent Claim 21 words
A method according to claim 1 wherein the final thickness of said silicon oxide coating is at least about 600 angstroms.
Claim 4
Dependent Claim 23 words
A method in accordance with claim 1 wherein the refractive index of the final SiO x coating is between about 1.1 and 1.45.
Claim 5
Dependent Claim 20 words
A method in accordance with claim 1 wherein the initial silicon oxide coating is exposed to air at atmospheric pressure.
Claim 6
Dependent Claim 18 words
A method in accordance with claim 4 wherein the exposure is at least about 15 minutes in duration.
Claim 7
Dependent Claim 18 words
A method in accordance with claim 1 wherein the substrate is a copolymer or homopolymer of vinyl chloride.

References Cited (Backward Citations)

US4104832A Cited
US4243395A Cited
US4260647A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-07-12 1986-01-11 1986-07-13 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-07-12 1990-01-11 1990-07-13 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-07-12 1994-01-11 1994-07-13 $7700.00 Window Closed / Lapsed

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