US4338145A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chrome-tantalum alloy thin film resistor and method of producing the same
Assignee: Taisei Kohki Co Ltd
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Filing: 1980-12-15
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Granted: 1982-07-06
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Expires: 2000-12-15
Abstract
Abstract A chrome-tantalum thin film resistor having a chrome-tantalum alloy thin film containing 10 to 95 atomic % of chrome. By subjecting this chrome-tantalum alloy thin film to heat treatment at temperatures not higher than 900° C., a stable resistor can be obtained. Alternatively, by forming the chrome-tantalum alloy thin film on a substrate which is preheated at temperatures not higher than 900° C., the temperature coefficient of resistance of the resistor can be improved so that a stable resistor can be obtained.
Inventors
- 👤 Nobuo Yasujima
- 👤 Natsuo Itokawa
- 👤 Seiichiro Kobayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 04:29
CPC Classifications
H; H01; H01C; H01C17/00; H01C17/30; H01C7/00; H01C7/006
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
45 words
A chrome-tantalum thin film resistor comprising a substrate and a chrome-tantalum alloy thin film on said substrate, said alloy consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum, said thin film having a temperature coefficient of resistance near zero.
Claim 2
Dependent Claim
45 words
A chrome-tantalum thin film resistor comprising a substrate and a chrome-tantalum alloy thin film on said substrate, said alloy consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum, said thin film having a temperature coefficient of resistance near zero.
Claim 3
Dependent Claim
58 words
A chrome-tantalum thin film resistor comprising a substrate and a chrome-tantalum alloy thin film consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum formed on said substrate preheated heated to a temperature selected to provide a temperature coefficient of resistance of the thin film near zero, but not higher than 900° C.
Claim 4
Dependent Claim
58 words
A chrome-tantalum thin film resistor comprising a substrate and a chrome-tantalum alloy thin film consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum formed on said substrate preheated heated to a temperature selected to provide a temperature coefficient of resistance of the thin film near zero, but not higher than 900° C.
Claim 5
Dependent Claim
64 words
A chrome-tantalum thin film resistor comprising a substrate and a chrome-tantalum alloy thin film on said substrate, said alloy consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum, said chrome-tantalum alloy thin film having been subjected to heat treatment at a temperature selected to provide a temperature coefficient of resistance near zero, but not higher than 900° C.
Claim 6
Dependent Claim
64 words
A chrome-tantalum thin film resistor comprising a substrate and a chrome-tantalum alloy thin film on said substrate, said alloy consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum, said chrome-tantalum alloy thin film having been subjected to heat treatment at a temperature selected to provide a temperature coefficient of resistance near zero, but not higher than 900° C.
Claim 7
Independent Claim
66 words
A method of producing a chrome-tantalum thin film resistor comprising the steps of forming a chrome-tantalum alloy thin film consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum on a substrate and heating said chrome-tantalum alloy thin film on said substrate to a temperature selected to provide a temperature coefficient of resistance near zero, but not higher than 900° C.
Claim 8
Independent Claim
66 words
A method of producing a chrome-tantalum thin film resistor comprising the steps of forming a chrome-tantalum alloy thin film consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum on a substrate and heating said chrome-tantalum alloy thin film on said substrate to a temperature selected to provide a temperature coefficient of resistance near zero, but not higher than 900° C.
Claim 9
Independent Claim
67 words
A method of producing a chrome-tantalum thin film resistor comprising the steps of heating a substrate to a temperature not higher than 900° C. and forming a chrome-tantalum alloy thin film consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum on said heated substrate, said temperature being selected to provide a temperature coefficient of resistance of said thin film near zero.
Claim 10
Independent Claim
67 words
A method of producing a chrome-tantalum thin film resistor comprising the steps of heating a substrate to a temperature not higher than 900° C. and forming a chrome-tantalum alloy thin film consisting essentially of 10 to 95 atomic % of chrome and the balance being tantalum on said heated substrate, said temperature being selected to provide a temperature coefficient of resistance of said thin film near zero.
Claim 11
Dependent Claim
12 words
The method of claim 5 wherein said forming is by cathode sputtering.
Claim 12
Dependent Claim
15 words
The method of claim 4 or 5 wherein said temperature is at least 200° C.
Claim 13
Dependent Claim
26 words
The resistor of claims 2, 1 or 3 wherein said substrate is selected from the group consisting of forsterite porcelain, alumina porcelain and glazed alumina porcelain.
Claim 14
Independent Claim
26 words
The method of claims 4, 5 or 6 wherein said substrate is selected from the group consisting of forsterite porcelain, alumina porcelain and glazed alumina porcelain.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-07-05 | 1986-01-04 | 1986-07-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-07-05 | 1990-01-04 | 1990-07-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-07-05 | 1994-01-04 | 1994-07-06 | $7700.00 | Window Closed / Lapsed |