Abstract The present invention relates to a method for the preparation of highly heat-resistant relief structures by applying radiation-sensitive soluble polymer precursor stages in the form of a film or a foil to a substrate; irradiating the film or the foil through negative patterns with actinic light or by deflecting a light, electron or ion beam; removing the non-irradiated film or foil portions; and optionally, by subsequent annealing; as well as to the use of the relief structures made in this manner. It is provided for this purpose to use precursor stages of polyimidazoles and polyimidazopyrrolones in the form of addition products of olefinically unsaturated monoepoxides on amino group-containing polycondensation products of aromatic and/or heterocyclic tetraamino compounds with dicarboxylic-acid chlorides or esters, or on amino group-containing polyaddition products of the tetraamino compounds and tetracarboxylic-acid dianhydrides. The relief structures prepared by the method according to the invention are suited particularly for use as resists, surface coating material and insulating material.
In a method for the preparation of highly heat-resistant relief structures wherein radiation-sensitive soluble polymer precursor stages are applied in the form of a film or a foil on a substrate; the film or the foil is irradiated through negative patterns with actinic light or by deflecting a light, electron or ion beam; and the non-irradiated film or foil portions removed, the improvement comprising utilizing a precursor stage comprising a member selected from a polyimidazole and a polyimidazopyrrolone precursor in the form of an addition product of an olefinically unsaturated monoepoxide and a product selected from (a) an amino group-containing polycondensation product of an aromatic and/or heterocyclic tetraamino compound with a member selected from the group consisting of a dicarboxylic-acid chloride and a dicarboxylic acid ester and (b) an amino group-containing polyaddition product of said tetraamino compound and a tetracarboxylic-acid dianhydride.
Claim 2
Dependent Claim
141 words
In a method for the preparation of highly heat-resistant relief structures wherein radiation-sensitive soluble polymer precursor stages are applied in the form of a film or a foil on a substrate; the film or the foil is irradiated through negative patterns with actinic light or by deflecting a light, electron or ion beam; and the non-irradiated film or foil portions removed, the improvement comprising utilizing a precursor stage comprising a member selected from a polyimidazole and a polyimidazopyrrolone precursor in the form of an addition product of an olefinically unsaturated monoepoxide and a product selected from (a) an amino group-containing polycondensation product of an aromatic and/or heterocyclic tetraamino compound with a member selected from the group consisting of a dicarboxylic-acid chloride and a dicarboxylic acid ester and (b) an amino group-containing polyaddition product of said tetraamino compound and a tetracarboxylic-acid dianhydride.
Claim 3
Dependent Claim
21 words
The method according to claim 1 wherein said polymer precursor stage is utilized together with a light- or radiation-sensitive copolymerizable compound.
Claim 4
Dependent Claim
13 words
The method according to claim 2 wherein said copolymerizable compound comprises N-substituted maleinimide.
Claim 5
Dependent Claim
28 words
The method according to claim 1 wherein said precursor stage comprises an addition product of glycidyl acrylate or -methacrylate on the polycondensation product of diaminobenzidine and isophthalic-acid dimethylester.
Claim 6
Dependent Claim
28 words
The method according to claim 1 wherein said precursor stage comprises an addition product of glycidyl acrylate or -methacrylate on the polyaddition product of diaminobenzidine and pyromellithic-acid dianhydride.
Claim 7
Dependent Claim
19 words
The method according to claim 1 wherein said foil or film having non-irradiated portions removed therefrom is subsequently annealed.
Claim 8
Dependent Claim
13 words
A highly heat-resistant relief structure prepared according to the method of claim 1.