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US4329210A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of regenerating etchant and recovering etched metal

Assignee: Individual
•
Filing: 1980-03-28
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Granted: 1982-05-11
•
Expires: 2000-03-28
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Abstract

Abstract A method of regenerating etchant and recovering etched metals. Etching solution, which is overladen with metal cations is passed through a cation exchange unit. Subsequently, the etching solution, which is diminished in metal cation concentration, is returned to the etcher sump. The cation exchange unit is then rinsed with deionized water to remove residual etching solution, with the effluent being conveyed to a metal recovery unit. The cation exchange unit is then rinsed with an aqueous solution of an acid to remove cations and to regenerate the cation exchange unit. The effluent from this rinsing is also conveyed to the metal recovery unit. The cation exchange unit is then rinsed with deionized water to remove residual acid, with this effluent likewise being conveyed to the metal recovery unit. Subsequently, a selectolyte solution is passed through the cation exchange unit to enhance the cation retention property thereof. The effluent is conveyed to a storage container. At this point, etched metal can be recovered from the metal recovery unit.

Inventors

  • 👤 Vijay Merchant
  • 👤 Stephen R. Henriksen
  • 👤 R. Wayne Boucher
  • 👤 Jerrold J. Dodd

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 10:25
CPC Classifications
C; C23; C23F; C23F1/00; C23F1/46; C22; C22B; C22B3/00; C22B3/20; C22B3/42; Y; Y02; Y02P; Y02P10/00; Y02P10/20

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 225 words
A method of regenerating an ammoniacal etchant, said method comprising the steps of: withdrawing, from an etcher sump, etching solution containing copper ions at a concentration above an efficiency parameter; conveying said etching solution to a cation exchange resin bed for selective removal and retention of said copper ions by said cation exchange resin bed; returning regenerated effluent etchant from said cation exchange resin bed to said etcher sump at a copper ion concentration at said efficiency parameter; rinsing said cation exchange resin bed with deionized water to remove residual etching solution therefrom; conveying effluent deionized water and residual etching solution from said cation exchange resin bed to a metal recovery unit; rinsing said cation exchange resin bed with an aqueous solution of an acid to remove said copper ions and to regenerate said cation exchange resin bed; conveying effluent aqueous solution of acid and copper ions to said metal recovery unit; rinsing said cation exchange resin bed with deionized water to remove residual acid therefrom; conveying effluent deionized water and residual acid to said metal recovery unit; passing a selectolyte solution through said cation exchange resin bed to enhance the cation retention property thereof and to provide a pH balance during said step of conveying said etching solution to said cation exchange resin bed; and conveying spent effluent selectolyte solution to a storage container.
Claim 2
Independent Claim 225 words
A method of regenerating an ammoniacal etchant, said method comprising the steps of: withdrawing, from an etcher sump, etching solution containing copper ions at a concentration above an efficiency parameter; conveying said etching solution to a cation exchange resin bed for selective removal and retention of said copper ions by said cation exchange resin bed; returning regenerated effluent etchant from said cation exchange resin bed to said etcher sump at a copper ion concentration at said efficiency parameter; rinsing said cation exchange resin bed with deionized water to remove residual etching solution therefrom; conveying effluent deionized water and residual etching solution from said cation exchange resin bed to a metal recovery unit; rinsing said cation exchange resin bed with an aqueous solution of an acid to remove said copper ions and to regenerate said cation exchange resin bed; conveying effluent aqueous solution of acid and copper ions to said metal recovery unit; rinsing said cation exchange resin bed with deionized water to remove residual acid therefrom; conveying effluent deionized water and residual acid to said metal recovery unit; passing a selectolyte solution through said cation exchange resin bed to enhance the cation retention property thereof and to provide a pH balance during said step of conveying said etching solution to said cation exchange resin bed; and conveying spent effluent selectolyte solution to a storage container.
Claim 3
Dependent Claim 44 words
A method according to claim 1, which includes the step of preparing said cation exchange resin bed, prior to said step of conveying etching solution thereto, by consecutively passing through said bed an aqueous solution of an acid, deionized water, and a selectolyte solution.
Claim 4
Dependent Claim 18 words
A method according to claim 1, in which said selectolyte solution comprises ammonium hydroxide and a chelating agent.
Claim 5
Dependent Claim 24 words
A method according to claim 3, in which said chelating agent is selected from the group consisting of an ethylenediaminetetraacetic acid, diethylenetriamine, and triethylenetetraamine.
Claim 6
Dependent Claim 22 words
A method according to claim 1, in which said acid is selected from the group consisting of sulfuric acid and hydrochloric acid.
Claim 7
Dependent Claim 43 words
A method according to claim 1, which includes the step of monitoring the Baume of said etching solution in said etcher sump for initiating and halting said step of withdrawing etching solution therefrom when said etching solution has reached a predetermined Baume level.
Claim 8
Dependent Claim 36 words
A method according to claim 1, which includes the steps of monitoring the pH of said etching solution in said etcher sump, and adding replenisher solution to said etching solution to achieve the appropriate etching parameters.
Claim 9
Dependent Claim 19 words
A method according to claim 1, which includes the step of recovering etched copper from said metal recovery unit.
Claim 10
Dependent Claim 18 words
A method according to claim 8, which includes the step of recovering etched copper by an electrowinning process.
Claim 11
Dependent Claim 20 words
A method according to claim 8, which includes the step of recovering etched copper by a metal ion replacement process.

References Cited (Backward Citations)

US3116240A Cited
US3725259A Cited
US3905827A Cited
US4083758A Cited
US4190481A Cited
US4252621A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-05-10 1985-11-09 1986-05-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-05-10 1989-11-09 1990-05-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-05-10 1993-11-09 1994-05-11 $7700.00 Window Closed / Lapsed

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