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US4323909A Expired / Lapsed US ⏱️ 0.0 years remaining

Planar avalanche diode with a breakdown voltage between 4 and 8 volts

Assignee: Thales SA
•
Filing: 1980-04-15
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Granted: 1982-04-06
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Expires: 2000-04-15
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Abstract

Abstract A diode comprising a N-type substrate in which is formed a P-type guard ring and a central diffusion of the same type but of reduced depth. Part of the central diffusion layer is interrupted by a masking island. Diffusion is for example obtained from an epitaxial layer.

Inventors

  • 👤 Henri Valdmann

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 06:30
CPC Classifications
H; H10; H10D; H10D8/00; H10D8/50; Y; Y10; Y10S; Y10S438/00; Y10S438/983

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 91 words
A planar avalanche diode with a breakdown voltage between 4 and 8 volts incorporating a silicon substrate of a first conductivity type coated with a silica mask through which there is a diffusion to supply a layer of a second conductivity type opposite to the first, the perimeter of the diffused zone being surrounded by a deeper diffusion zone, wherein the said mask blocks the diffusion in a region within the said perimeter and at least that part of the mask within the said perimeter is covered with a protective layer.
Claim 2
Dependent Claim 91 words
A planar avalanche diode with a breakdown voltage between 4 and 8 volts incorporating a silicon substrate of a first conductivity type coated with a silica mask through which there is a diffusion to supply a layer of a second conductivity type opposite to the first, the perimeter of the diffused zone being surrounded by a deeper diffusion zone, wherein the said mask blocks the diffusion in a region within the said perimeter and at least that part of the mask within the said perimeter is covered with a protective layer.
Claim 3
Dependent Claim 19 words
A diode according to claim 1, wherein the protective layer comprises an epitaxial layer of the second conductivity type.
Claim 4
Dependent Claim 14 words
A diode according to claim 1, wherein the protective layer comprises a metallization layer.
Claim 5
Dependent Claim 15 words
A diode according to claim 1, wherein the said region is shaped like a ring.
Claim 6
Dependent Claim 16 words
A diode according to claim 1, wherein the said region is shaped like a central island.
Claim 7
Dependent Claim 14 words
A diode according to claim 1, wherein the said region has a finger shape.
Claim 8
Independent Claim 95 words
A method for the manufacture of a planar avalanche diode with a voltage between 4 and 8 volts from a silicon substrate with a first type of conductivity consisting of forming within the said substrate a deep diffusion peripheral ring, also comprising the diffusion into the perimeter defined by the deep diffusion of a layer of the same type of conductivity but less deep whilst reserving by means of an oxide mask a region inside of said perimeter below which no diffusion takes place and covering at least the said region with a supplementary layer.
Claim 9
Independent Claim 95 words
A method for the manufacture of a planar avalanche diode with a voltage between 4 and 8 volts from a silicon substrate with a first type of conductivity consisting of forming within the said substrate a deep diffusion peripheral ring, also comprising the diffusion into the perimeter defined by the deep diffusion of a layer of the same type of conductivity but less deep whilst reserving by means of an oxide mask a region inside of said perimeter below which no diffusion takes place and covering at least the said region with a supplementary layer.
Claim 10
Dependent Claim 31 words
A method according to claim 7, wherein the diffusion of the less deep layer is formed from an epitaxial layer deposited on the surface of the substrate above the said mask.

References Cited (Backward Citations)

US3391287A Cited
US4030117A Cited
DE2649935A1 Cited
US4129878A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-04-05 1985-10-05 1986-04-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-04-05 1989-10-05 1990-04-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-04-05 1993-10-05 1994-04-06 $7700.00 Window Closed / Lapsed

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