US4317700A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabrication of planar bubble domain device structures
Assignee: Boeing North American Inc
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Filing: 1980-08-20
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Granted: 1982-03-02
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Expires: 2000-08-20
Abstract
Abstract A method of fabricating a bubble domain device composite structure on a substrate of depositing a barrier layer of a suitable polymeric dielectric material on the substrate; subsequently depositing a layer of electrically conductive material thereover; subsequently depositing a spacer layer of a liquid polymeric dielectric material over the conductive layer; processing the spacer layer so that the surface of the spacer layer is substantially planar; and subsequently depositing a layer of a magnetically operative material over the spacer layer.
Inventors
- 👤 Kunihide Tanaka
- 👤 Michael T. Elliott
- 👤 Sam Chung
- 👤 James Pau
- 👤 Linda Gray
- 👤 Liping D. Hou
- 👤 Mary F'Mayer
- 👤 David Warren
- 👤 Karen Finch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 07:48
CPC Classifications
H; H01; H01F; H01F41/00; H01F41/32; H01F41/34; H01F10/00; H01F10/06
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
105 words
A method of fabricating a bubble domain device composite structure on a substrate comprising the steps of: providing a layer capable of supporting magnetic bubble domains on said substrate; depositing a barrier layer of a suitable polymeric dielectric material on said layer; subsequently depositing a layer of electrically conductive material over said barrier layer; subsequently depositing a spacer layer of a polymeric dielectric material in a liquid state over said conductive layer; processing said spacer layer to a solid state so that the surface of the spacer layer is substantially planar; and subsequently depositing a layer of a magnetically operative material over the spacer layer.
Claim 2
Independent Claim
105 words
A method of fabricating a bubble domain device composite structure on a substrate comprising the steps of: providing a layer capable of supporting magnetic bubble domains on said substrate; depositing a barrier layer of a suitable polymeric dielectric material on said layer; subsequently depositing a layer of electrically conductive material over said barrier layer; subsequently depositing a spacer layer of a polymeric dielectric material in a liquid state over said conductive layer; processing said spacer layer to a solid state so that the surface of the spacer layer is substantially planar; and subsequently depositing a layer of a magnetically operative material over the spacer layer.
Claim 3
Dependent Claim
24 words
A method as defined in claim 1, wherein said step of depositing a barrier layer comprises spinning on said dielectric material on said substrate.
Claim 4
Dependent Claim
25 words
A method as defined in claim 1, wherein said step of processing said spacer layer comprises spinning on said dielectric material, and subsequently baking it.
Claim 5
Dependent Claim
17 words
A method as defined in claim 1, wherein said layer of a magnetically operative material comprises nickel-iron.
Claim 6
Dependent Claim
25 words
A method as defined in claim 1, further comprising the step of depositing a titanium tungsten layer over said layer of a magnetically operative material.
Claim 7
Dependent Claim
23 words
A method as defined in claim 5, further comprising the step of depositing a layer of gold over said layer of titanium tungsten.
Claim 8
Dependent Claim
23 words
A method as defined in claim 6, further comprising the step of further depositing a first layer of photoresist over said gold layer.
Claim 9
Dependent Claim
32 words
A method as defined in claim 7, further comprising the step of masking and etching said photoresist layer to form a pattern of contact pads on said bubble domain device composite structure.
Claim 10
Dependent Claim
27 words
A method as defined in claim 8, further comprising the step of subsequently selectively etching portions of said gold layer and corresponding portions of said titanium-tungsten layer.
Claim 11
Dependent Claim
23 words
A method as defined in claim 9, further comprising the step of subsequently stripping the remaining portions of said first layer of photoresist.
Claim 12
Dependent Claim
34 words
A method as defined in claim 10, further comprising the step of subsequently applying a second layer of photoresist over said gold layer and the exposed portion of said layer of magnetically operative material.
Claim 13
Dependent Claim
40 words
A method as defined in claim 11, further comprising the step of masking and etching said second photoresist layer, and subsequently selectively etching portions of said layer of a magnetically operative material to form isolated elements of magnetically operative material.
Claim 14
Dependent Claim
27 words
A method as defined in claim 1, wherein said step of depositing a layer of electrically conductive material comprises forming discrete spaced-apart islands of electrically conductive material.
Claim 15
Dependent Claim
43 words
A method as defined in claim 13, wherein said step of depositing a layer of a magnetically operative material comprises depositing said layer so as to make physical and electrical contact with selected ones of said discrete spaced-apart islands of electrically conductive material.
References Cited (Backward Citations)
US4172758A
Cited
US4170471A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-03-01 | 1985-08-31 | 1986-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-03-01 | 1989-08-31 | 1990-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-03-01 | 1993-08-31 | 1994-03-02 | $7700.00 | Window Closed / Lapsed |