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US4313338A Expired / Lapsed US ⏱️ 0.0 years remaining

Gas sensing device

Assignee: Panasonic Holdings Corp
•
Filing: 1979-08-14
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Granted: 1982-02-02
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Expires: 1999-08-14
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Abstract

Abstract A gas sensing device comprises a gas sensing element comprising a gas-sensitie resistive film formed of an aggregate of ultrafine particles of a suitable material deposited on the surface of a substrate of an electrical insulator formed with electrodes.

Inventors

  • 👤 Atsushi Abe
  • 👤 Hisahito Ogawa
  • 👤 Masahiro Nishikawa
  • 👤 Satoshi Sekido
  • 👤 Shigeru Hayakawa

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 13:43
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/12

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 100 words
A gas sensing device comprising: a substrate of an electrically insulating material, a film deposited on one surface of said substrate, said film being comprised of an aggregate of ultrafine particles having a mean diameter of between about 10 and several hundred angstroms and a resistance of said film varying as a function of the pressure of a gas to be detected, a heating means for heating said film to a predetermined temperature in accordance with the gas to be detected, and a pair of electrodes disposed on said surface of the substrate for measuring the resistance of said film.
Claim 2
Dependent Claim 100 words
A gas sensing device comprising: a substrate of an electrically insulating material, a film deposited on one surface of said substrate, said film being comprised of an aggregate of ultrafine particles having a mean diameter of between about 10 and several hundred angstroms and a resistance of said film varying as a function of the pressure of a gas to be detected, a heating means for heating said film to a predetermined temperature in accordance with the gas to be detected, and a pair of electrodes disposed on said surface of the substrate for measuring the resistance of said film.
Claim 3
Dependent Claim 27 words
A gas sensing device according to claim 1 wherein said aggregate of ultrafine particles comprises a single-layer film being formed of ultrafine particles of a metal oxide.
Claim 4
Dependent Claim 32 words
A gas sensing device according to claim 1 wherein said aggregate of ultrafine particles comprises a single-layer film being formed of a mixture of ultrafine particles of different kinds of metal oxides.
Claim 5
Dependent Claim 33 words
A gas sensing device according to claim 1 wherein said aggregate of ultrafine particles comprises a single-layer film of a mixture of ultrafine particles being formed of a metal and a metal oxide.
Claim 6
Dependent Claim 46 words
A gas sensing device according to claim 1 wherein said aggregate of ultrafine particles comprises a multi-layer film including a combination of a single-layer film of ultrafine particles being formed of a metal oxide and a single-layer film of ultrafine particles being formed of a metal.
Claim 7
Dependent Claim 68 words
A gas sensing device according to claim 1 wherein said aggregate of ultrafine particles comprises a multi-layer film including a first single-layer film of ultrafine particles being formed of a metal oxide which is superposed on a second single-layer film of ultrafine particles being formed of the same metal oxide but having a larger mean particle diameter than that of the ultrafine particles of said first single-layer film.
Claim 8
Dependent Claim 72 words
A gas sensing device according to claim 1, wherein said aggregate of ultrafine particles comprises a multi-layer film of at least two single-layer films of ultrafine particles selected from a group consisting of a metal, a metal oxide, a mixture of metal oxides, a mixture of a metal and a metal oxide, a mixture of at least two metal oxides of the same kind but having different mean diameters to each other.
Claim 9
Dependent Claim 18 words
A gas sensing device according to claim 1 wherein said aggregate of ultrafine particles has a columnar structure.
Claim 10
Dependent Claim 21 words
A gas sensing device according to claim 2, 3, 4, 5 or 6 wherein said metal oxide is a tin oxide.
Claim 11
Dependent Claim 21 words
A gas sensing device according to claim 2, 3, 4, 5 or 6 wherein said metal oxide is a copper oxide.
Claim 12
Dependent Claim 16 words
A gas sensing device according to claim 4 or 5 wherein said metal is a palladium.
Claim 13
Dependent Claim 26 words
A gas detector according to claim 1 wherein said substrate is a silicon having a silicon oxide layer disposed on one of the major surfaces thereof.
Claim 14
Dependent Claim 23 words
A gas sensing device according to claim 12 wherein said substrate contains therein said heating means in the form of an integrated circuit.
Claim 15
Dependent Claim 39 words
A gas sensing device according to claim 12 wherein said substrate contains therein, in combination, said heater means and a temperature sensing means for sensing the temperature of said substrate, which are in the form of an integrated circuit.
Claim 16
Dependent Claim 41 words
A gas sensing device according to claim 12, wherein said substrate contains therein, in combination, said heater means and a temperature stabilizing means for stabilizing a temperature of said substrate at constant, which are in the form of an integrated circuit.
Claim 17
Dependent Claim 26 words
A gas sensing device according to claim 13, 14 or 15 wherein said heating means comprises either one of a resistive element and a pn-junction element.
Claim 18
Dependent Claim 24 words
A gas sensing device according to claim 14, wherein said temperature sensing means comprises either one of a resistive element and a pn-junction element.
Claim 19
Dependent Claim 107 words
A gas sensing device according to claim 1 wherein said substrate comprises a semiconductor element selected from a group consisting of a pn-junction element and a resistive element, in the form of an integrated circuit, which are capable of functioning as both said heating means and a temperature sensing means for sensing the temperature of said substrate, and said sensing device further comprises a switching means connected to said semiconductor element for selectively changing over an electrical circuit constructed for actuating said semiconductor element to serve as said heating means and an electrical circuit constructed for actuating said semiconductor element to serve as said temperature sensing means.

References Cited (Backward Citations)

US1888984A Cited
US3793605A Cited
US3719797A Cited
DE2540161A1 Cited
US4058368A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-02-01 1985-08-03 1986-02-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-02-01 1989-08-03 1990-02-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-02-01 1993-08-03 1994-02-02 $7700.00 Window Closed / Lapsed

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