Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
185 words
A semiconductor array having enhanced capacitance comprising: a body of semiconductor material of a first conductivity type having a surface, a plurality of isolated mesas of a second conductivity type material on said surface, each of said mesas having substantially vertical side walls extending from said surface, each of said mesas forming a rectifying junction with said body, a circumferential coating of insulating material having a thickness of less than 500 angstroms on each of the side walls of each of said mesas, and a plurality of orthognal, substantially vertical ridges of conductive material extending from and in good electrical contact with said surface, between and surrounding said mesas and contacting said insulating material, each of said mesas including a transistor formed therein, and each of said mesas forming the first plate of a capacitor coupled to the transistor therein, said body and said conductive ridges surrounding said mesas forming the second plate of said capacitor and the rectifying junction between the mesas and the body and said circumferential coating of said insulating material isolating said first plate from said second plate of said capacitor.
Claim 2
Dependent Claim
185 words
A semiconductor array having enhanced capacitance comprising: a body of semiconductor material of a first conductivity type having a surface, a plurality of isolated mesas of a second conductivity type material on said surface, each of said mesas having substantially vertical side walls extending from said surface, each of said mesas forming a rectifying junction with said body, a circumferential coating of insulating material having a thickness of less than 500 angstroms on each of the side walls of each of said mesas, and a plurality of orthognal, substantially vertical ridges of conductive material extending from and in good electrical contact with said surface, between and surrounding said mesas and contacting said insulating material, each of said mesas including a transistor formed therein, and each of said mesas forming the first plate of a capacitor coupled to the transistor therein, said body and said conductive ridges surrounding said mesas forming the second plate of said capacitor and the rectifying junction between the mesas and the body and said circumferential coating of said insulating material isolating said first plate from said second plate of said capacitor.
Claim 3
Dependent Claim
18 words
The array of claim 1 wherein said semiconductor material comprises silicon and said insulating material comprises silicon dioxide.
Claim 4
Dependent Claim
111 words
The array of claim 1 wherein each of said mesas comprises first, second, third and fourth regions, said first and third regions being of said first conductivity type and separated by said second region, said second and fourth regions being of said second conductivity type, said fourth region being isolated from said first and second regions by said third region, said first, second and third regions forming the emitter, base, and collector of a first transistor, said second, third, and fourth regions forming the collector, base and emitter of a second transistor, said first and second transistors being complementary transistors, and said insulating material is in contact with said second region.