US4308457A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for the detection of back-scattered electrons from a sample in an electron microscope
Assignee: Ernst Leitz Wetzlar GmbH
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Filing: 1980-05-21
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Granted: 1981-12-29
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Expires: 2000-05-21
Abstract
Abstract Disclosed is a device for the detection of back-scattered electrons emitted by a specimen in an electron microscope, comprising a converter for converting back-scattered electrons emitted by the specimen into secondary electrons, which converter includes a surface layer of a crystalline material having a low atomic number and a low electrical conductivity, preferably magnesium oxide; and a detector for detecting secondary electrons emitted by the converter. Also disclosed is an improved electron microscope embodying this detection device.
Inventors
- 👤 Ludwig Reimer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:41
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/244; B; B82; B82Y; B82Y15/00; G; G01; G01T; G01T1/00; G01T1/16; G01T1/28; H01J2237/00; H01J2237/244; H01J2237/2443; H01J2237/24475; H01J2237/2448; H01J2237/2449; H01J2237/245; H01J2237/24507
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
61 words
A device for the detection of back-scattered electrons emitted by a specimen in an electron microscope, comprising: a converter for converting back-scattered electrons emitted by the specimen into secondary electrons, said converter including a surface layer of a crystalline material having a low atomic number and a low electrical conductivity; and a detector for detecting secondary electrons emitted by said converter.
Claim 2
Independent Claim
61 words
A device for the detection of back-scattered electrons emitted by a specimen in an electron microscope, comprising: a converter for converting back-scattered electrons emitted by the specimen into secondary electrons, said converter including a surface layer of a crystalline material having a low atomic number and a low electrical conductivity; and a detector for detecting secondary electrons emitted by said converter.
Claim 3
Dependent Claim
14 words
A device as claimed in claim 1, wherein said crystalline material comprises magnesium oxide.
Claim 4
Dependent Claim
23 words
A device as claimed in claim 1, wherein said converter comprises a metallic carrier plate having a vapor-deposited layer of said crystalline material.
Claim 5
Dependent Claim
27 words
A device as claimed in claim 3, wherein said converter further comprises an electrical connector attached to said metallic carrier plate for applying an electrical potential thereto.
Claim 6
Dependent Claim
18 words
A device as claimed in claim 1, further comprising means for producing an electrical field overlying said converter.
Claim 7
Dependent Claim
38 words
A device as claimed in claim 5, wherein said electric field producing means comprises a conductive grid overlapping the coated surface of said converter and an insulating connector for connecting said grid to the edge of said converter.
Claim 8
Dependent Claim
18 words
A device as claimed in claim 5, further comprising means for producing an electric field overlying the specimen.
Claim 9
Dependent Claim
49 words
A device as claimed in claim 1, comprising a first converter arranged between the specimen and the source of the electron beam in the electron microscope, and a second converter located on the side of the specimen opposite to the source of the electron beam in the electron microscope.
Claim 10
Dependent Claim
32 words
A device as claimed in claim 1, wherein said converter comprises a plurality of converter sections, each of said sections being arranged to receive back-scattered electrons emitted within different spatial angular ranges.
Claim 11
Dependent Claim
31 words
A device as claimed in claim 9, wherein each of said converter sections is electrically insulated from the others and includes separate means for independently applying a selected electrical potential thereto.
Claim 12
Dependent Claim
36 words
An electron microscope, comprising a source of an electron beam, means for holding a specimen and a device for detecting back-scattered electrons emitted by the specimen, said device comprising a device as defined by claim 1.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-12-28 | 1985-06-29 | 1985-12-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-12-28 | 1989-06-29 | 1989-12-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-12-28 | 1993-06-29 | 1993-12-29 | $7700.00 | Window Closed / Lapsed |