Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
273 words
An optical micrometer measuring system adapted to gauge minute distances between spaced points on an object under test, said system comprising: A. a stage for supporting the object; B. an objective disposed above said stage and having a vertical optical axis; C. a beam-splitting element disposed above said objective and having an interface inclined relative to said vertical axis; D. a semi-reflective mirror interposed between said objective and said element; E. means including an object light source to illuminate said object to produce object-modulated rays which are directed by said objective upwardly through said mirror onto said element interface, the rays being deflected by said interface toward a main optical path to create in the real image plane of said objective an aerial object image; F. an eyepiece disposed in said main path to provide an operator with a magnified view of the object image; G. a pointer image projector including a projector light source whose rays are masked by a mask component having a shaped aperture which defines the geometry of the pointer and are projected by a projection lens component to produce pointer-modulated rays; H. means directing said pointer-modulated rays from the projector downwardly through the element toward the mirror to be reflected upwardly thereby to impinge on the interface and to be deflected thereby along the main optical path toward the real image plane to produce a pointer image thereon which is superimposed over the object image; and I. micrometer means operatively coupled to said projector to laterally displace the pointer image to transverse the distance between any two spaced points on the object image and to indicate said distance.
Claim 2
Dependent Claim
273 words
An optical micrometer measuring system adapted to gauge minute distances between spaced points on an object under test, said system comprising: A. a stage for supporting the object; B. an objective disposed above said stage and having a vertical optical axis; C. a beam-splitting element disposed above said objective and having an interface inclined relative to said vertical axis; D. a semi-reflective mirror interposed between said objective and said element; E. means including an object light source to illuminate said object to produce object-modulated rays which are directed by said objective upwardly through said mirror onto said element interface, the rays being deflected by said interface toward a main optical path to create in the real image plane of said objective an aerial object image; F. an eyepiece disposed in said main path to provide an operator with a magnified view of the object image; G. a pointer image projector including a projector light source whose rays are masked by a mask component having a shaped aperture which defines the geometry of the pointer and are projected by a projection lens component to produce pointer-modulated rays; H. means directing said pointer-modulated rays from the projector downwardly through the element toward the mirror to be reflected upwardly thereby to impinge on the interface and to be deflected thereby along the main optical path toward the real image plane to produce a pointer image thereon which is superimposed over the object image; and I. micrometer means operatively coupled to said projector to laterally displace the pointer image to transverse the distance between any two spaced points on the object image and to indicate said distance.
Claim 3
Dependent Claim
38 words
A system as set forth in claim 1, wherein said projector is rotatable to assume any desired angular position normal to the optical axis of the projector to orient the pointer image with respect to the object image.
Claim 4
Dependent Claim
18 words
A system as set forth in claim 1, wherein said aperture in the mask has a diamond shape.
Claim 5
Dependent Claim
18 words
A system as set forth in claim 1, wherein said aperture in the mask has a rectangular shape.
Claim 6
Dependent Claim
35 words
A system as set forth in claim 1, wherein said micrometer means includes a mechanical micrometer whose screw is operatively coupled to the mask component of said projector to effect displacement of said pointer image.
Claim 7
Dependent Claim
36 words
A system as set forth in claim 5, wherein said mechanical micrometer is coupled to an analog-to-digital converter having a digital readout to provide a reading of the distance between the points gauged by the system.
Claim 8
Dependent Claim
42 words
A system as set forth in claim 1, wherein said projector is disposed above said element and has a vertical optical axis which is parallel to the vertical axis of the objective whereby said pointer-modulated rays are directed downwardly toward said mirror.
Claim 9
Dependent Claim
69 words
A system as set forth in claim 1, wherein said projector is disposed to one side of said element and has a horizontal optical axis, further including an inclined semireflective planar mirror interposed between a phototube placed above said element and said element, said mirror directing the pointer-modulated rays from the projector downwardly toward said element, rays from said object image being directed through said element to said phototube.
Claim 10
Dependent Claim
35 words
A system as set forth in claim 1, further including means to separately control said object light source and said projector light source to adjust the contrast between the object image and the pointer image.
Claim 11
Dependent Claim
35 words
A system as set forth in claim 1, wherein said object is transparent and said means to illuminate said object includes a reflector to direct light from said object light source through said stage-supported object.
Claim 12
Dependent Claim
32 words
A system as set forth in claim 10, wherein said transparent object is a film having an integrated circuit pattern with lines therein whose width and spacing are gauged by said system.
Claim 13
Dependent Claim
24 words
A system as set forth in claim 10, wherein said object light source is a halogen lamp whose rays are passed through a diffuser.
Claim 14
Dependent Claim
36 words
A system as set forth in claim 1, further including a revolving nose piece having a series of objectives thereon providing different magnifying powers, said piece being positionable to insert a selected objective above said stage.
Claim 15
Dependent Claim
14 words
A system as set forth in claim 1, wherein said element is a prism.