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Method of fabricating semiconductor junction device employing separate metallization

Assignee: Individual
•
Filing: 1980-01-21
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Granted: 1981-11-24
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Expires: 2000-01-21
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Abstract

Abstract A method of fabricating a p-n junction device such as solar cells using metal contacts for p regions and n region heat-treated at two different temperatures. A metal with low work functions is heated first to a high temeperature for making ohmic contact to a p-type semiconductor substrate, and then at low temperature for contacting the n-type region. A metal with high work function is heated first to a high temperature for contacting an n-type semiconductor substrate and then at low temperature for contacting the p-type region.

Inventors

  • 👤 Hung Chang Lin

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 15:10
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/60; H10D64/62; H10F; H10F77/00; H10F77/20; H10F77/206; H10F77/211; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y10; Y10S; Y10S148/00; Y10S148/018; Y10S148/02

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 125 words
A method of contacting a semiconductor junction device comprising the steps of forming a pn or an np junction on a doped semiconductor substrate of one conductivity type by creating a thin layer of opposite conductivity type on said substrate, depositing a layer of a metal on said substrate, heating said substrate and said metal at first temperature to form an ohmic contact, depositing a layer of the same metal on said thin layer of opposite conductivity type, heating said substrate and said metal to a second temperature which is lower than said first temperature, said second temperature being sufficient to form an ohmic contact between said metal and said thin layer but insufficient to form an ohmic contact between said metal and said substrate.
Claim 2
Independent Claim 125 words
A method of contacting a semiconductor junction device comprising the steps of forming a pn or an np junction on a doped semiconductor substrate of one conductivity type by creating a thin layer of opposite conductivity type on said substrate, depositing a layer of a metal on said substrate, heating said substrate and said metal at first temperature to form an ohmic contact, depositing a layer of the same metal on said thin layer of opposite conductivity type, heating said substrate and said metal to a second temperature which is lower than said first temperature, said second temperature being sufficient to form an ohmic contact between said metal and said thin layer but insufficient to form an ohmic contact between said metal and said substrate.
Claim 3
Dependent Claim 29 words
A method of contacting a semiconductor junction device as defined in claim 1, wherein said substrate is n-type and said metal is of higher work function than said substrate.
Claim 4
Dependent Claim 18 words
A method of contacting a semiconductor junction device as defined in claim 2, wherein said metal is aluminum.
Claim 5
Dependent Claim 33 words
A method of contacting a semiconductor junction device as defined in claim 3, wherein said first temperature is higher than 400 degrees centigrade and said second temperature is less than 400 degrees centigrade.
Claim 6
Dependent Claim 29 words
A method of contacting a semiconductor junction device as defined in claim 1, wherein said substrate is p-type and said metal is of lower work function than said substrate.

References Cited (Backward Citations)

US3434885A Cited
US3736180A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1984-11-23 1985-05-25 1985-11-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1988-11-23 1989-05-25 1989-11-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1992-11-23 1993-05-25 1993-11-24 $7700.00 Window Closed / Lapsed

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