US4299518A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Manufacturing work station
Assignee: Texas Instruments Inc
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Filing: 1980-03-03
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Granted: 1981-11-10
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Expires: 2000-03-03
Abstract
Abstract Disclosed for use in a line for manufacturing an article is a manufacturing work station which operates at subatmospheric conditions. The work station comprises a housing which includes a base plate having a recess at least as large as the article to be manufactured. The recess has a plurality of grooves formed in it. A spacer plate overlies the recess and has an aperture over each of the grooves in the base. A track insert plate generally of the same configuration as the spacer plate overlies said spacer plate and has a plurality of grooves therein which overlie each of said spacer apertures. A plurality of slanted holes are formed through the track insert plate and connect to the grooves in the track insert plate whereby when gas is applied through selected base plate grooves, the gas is transmitted through the slanted holes to move the article in the work station.
Inventors
- 👤 Paul L. Whelan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 20:31
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; H10P72/3604; B; B65; B65G; B65G51/00; B65G51/02; B65G51/03
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
116 words
A work station for performing a manufacturing operation on an article comprising: a base having a recess therein at least as large as said article, said recess having a plurality of grooves therein; a spacer plate overlying said recess and having an aperture over each of said base plate grooves; a track insert plate overlying said spacer plate and having a plurality of grooves therein over each of said spacer apertures; and at least one slanted hole coupled through said track insert plate to each of said track insert plate grooves such that when gas is applied to selected base grooves, gas is transmitted through said slanted holes to move the article in said work station.
Claim 2
Dependent Claim
116 words
A work station for performing a manufacturing operation on an article comprising: a base having a recess therein at least as large as said article, said recess having a plurality of grooves therein; a spacer plate overlying said recess and having an aperture over each of said base plate grooves; a track insert plate overlying said spacer plate and having a plurality of grooves therein over each of said spacer apertures; and at least one slanted hole coupled through said track insert plate to each of said track insert plate grooves such that when gas is applied to selected base grooves, gas is transmitted through said slanted holes to move the article in said work station.
Claim 3
Dependent Claim
22 words
A work station according to claim 1 further including sensor means for detecting position of the article on said track insert plate.
Claim 4
Dependent Claim
51 words
A work station according to claim 2 wherein said sensor comprises a light source and detector on opposite sides of said base and track insert plate and said base, spacer plate and track insert plates each have holes that are in line for transmitting the light from said light source therethrough.
Claim 5
Dependent Claim
30 words
A work station according to claim 1 wherein said track insert plate comprises holes slanted in opposite direction to thereby move an article into and out of said work station.
Claim 6
Dependent Claim
29 words
A work station according to claim 1 further including a power source coupled to said base for moving said base during the loading and unloading cycle of said articles.
Claim 7
Dependent Claim
26 words
A work station according to claim 1 wherein at least one of said base recesses can accomodate at least two articles for performing a manufacturing operation.
Claim 8
Dependent Claim
13 words
A work station according to claim 1 wherein said base is generally circular.
Claim 9
Dependent Claim
24 words
A work station according to claim 7 wherein said recesses are alternately configured in said base plate to accomodate both one and two articles.
Claim 10
Dependent Claim
14 words
A work station according to claim 1 wherein said article is a semiconductor slice.
Claim 11
Dependent Claim
16 words
A work station according to claim 1 wherein said work station operates as a plasma reactor.
References Cited (Backward Citations)
US3765763A
Cited
US3718371A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-11-09 | 1985-05-11 | 1985-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-11-09 | 1989-05-11 | 1989-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-11-09 | 1993-05-11 | 1993-11-10 | $7700.00 | Window Closed / Lapsed |