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US4296347A Expired / Lapsed US ⏱️ 0.0 years remaining

Surface acoustic wave sensor

Assignee: Texas Instruments Inc
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Filing: 1979-09-28
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Granted: 1981-10-20
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Expires: 1999-09-28
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Abstract

Abstract An improved surface acoustic wave sensor in which two surface acoustic wave arrays are disposed in predetermined overlapping relationship by the use of a sealing compound which both establishes a thin sealed cavity and spaces the two surface acoustic wave arrays apart a predetermined distance, thereby eliminating the need for spacing rings or the like.

Inventors

  • 👤 Donald F. Weirauch

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 12:23
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/125; H03H9/145

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 154 words
A surface acoustic wave sensor comprising a first member having a first relatively flat surface, a second member having a second relatively flat surface, a first surface acoustic wave array positioned upon said first surface, a second surface acoustic wave array positioned upon said second surface, first electrical connection means for making electrical connections to said first array, second electrical connection means for making electrical connections to said second array, said first surface acoustic wave array and said second surface acoustic wave array disposed in proximity one to the other so as to create a capacitive coupling effect between said arrays, and a fired glass frit bonding agent solely disposed between said first and second surfaces to form an enclosed chamber between said first and said second members while rigidly affixing said first and said second members each to the other, said chamber enclosing at least one of said first and said second arrays.
Claim 2
Dependent Claim 154 words
A surface acoustic wave sensor comprising a first member having a first relatively flat surface, a second member having a second relatively flat surface, a first surface acoustic wave array positioned upon said first surface, a second surface acoustic wave array positioned upon said second surface, first electrical connection means for making electrical connections to said first array, second electrical connection means for making electrical connections to said second array, said first surface acoustic wave array and said second surface acoustic wave array disposed in proximity one to the other so as to create a capacitive coupling effect between said arrays, and a fired glass frit bonding agent solely disposed between said first and second surfaces to form an enclosed chamber between said first and said second members while rigidly affixing said first and said second members each to the other, said chamber enclosing at least one of said first and said second arrays.
Claim 3
Dependent Claim 31 words
A sensor according to claim 1 in which said frit is disposed in annular configuration, and one of said first and second members is composed of relatively thin and resilient quartz.
Claim 4
Dependent Claim 13 words
A sensor according to claim 1 in which said arrays overlap one another.
Claim 5
Dependent Claim 22 words
A sensor according to claim 1 in which said arrays completely overlie each other while being spaced apart by a predetermined distance.
Claim 6
Dependent Claim 17 words
A sensor according to claim 4 in which said predetermined distance is from 2 to 3 mils.
Claim 7
Dependent Claim 12 words
A sensor according to claim 1 in which said chamber is evacuated.
Claim 8
Dependent Claim 19 words
A sensor according to claim 1 in which said chamber contains a small quantity of helium gas essentially only.
Claim 9
Dependent Claim 21 words
A sensor according to claim 1 further including means for communicating with said chamber through an orifice in said bonding agent.
Claim 10
Dependent Claim 32 words
A sensor according to claim 8 in which said last mentioned means comprises a tube disposed in sealed relationship with said orifice thereby to provide means for exclusively communicating with said chamber.
Claim 11
Dependent Claim 21 words
A sensor according to claim 1 in which both of said first and second quartz members are relatively thin and resilient.

References Cited (Backward Citations)

US3274828A Cited
US3427876A Cited
US3888115A Cited
US4096740A Cited
US4100811A Cited
US4216401A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1984-10-19 1985-04-20 1985-10-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1988-10-19 1989-04-20 1989-10-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1992-10-19 1993-04-20 1993-10-20 $7700.00 Window Closed / Lapsed

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