Thin film metal package for LSI chips

Claim 2

In an electronic chip carrier, a substrate with pad areas thereon for connection to a thin film, integrated circuit chip, a said chip connected to said pad areas, said substrate including a plurality of conductors coupled to said pad areas for electrical connection of said pads to various points, the improvement comprising connecting means for said chip to said pad areas by means of connections on the base of said chip, said conductors comprising a plurality of parallel conductive planar metallic sheets having large parallel surfaces with a layer of high dielectric material between adjacent ones of said sheets for providing high electrical capacitance and minimal inductive coupling therebetween, and at least one of said pads extending through at least one of said planar metallic sheets, each said pad being electrically insulated from said sheets through which it passes.

Claim 3

A substrate in accordance with claim 1 wherein said conductors and said pad areas are coupled by means of coaxial structures with low inductance.

Claim 4

In a structure for packaging at least one integrated circuit chip, including a chip with active devices thereon, said chip having pad connection devices adapted to connect to pads, said structure including stacked parallel conductive elements generally shaped as flat sheets, said elements being adapted for carrying currents from a power supply to said chips, the improvement comprising at least one of said conductive elements having at least one projection comprising a pad extending through a hole in a said stacked element towards said chip and connected to a said pad connection device, said hole and said pad having complementary shapes conforming to each other, a thin layer of high dielectric constant insulating material providing uniform spacing between said stacked elements including said pad and said hole, whereby said pad and said element with said hole form a capacitor and have an electrically coaxial relationship.

Claim 5

In a structure for packaging at least one integrated circuit chip, including a chip with active devices thereon, said chip having pad connection devices adapted to connect to pads, said structure including stacked parallel conductive elements generally shaped as flat sheets, said elements being adapted for carrying currents from a power supply to said chips, the improvement comprising at least one of said conductive elements having at least one projection comprising a pad extending through a hole in a said stacked element towards said chip and connected to a said pad connection device, said hole and said pad having complementary shapes conforming to each other, a thin layer of high dielectric constant insulating material providing uniform spacing between said stacked elements including said pad and said hole, whereby said pad and said element with said hole form a capacitor and have an electrically coaxial relationship.

Claim 6

The structure of claim 3 wherein on said element with said hole, adjacent to said pad, layers of interconnection wires are deposited upon said element for connection to signal lines of said chips.

Claim 7

The structure of claim 3 wherein said insulating material has a predetermined high dielectric constant and a predetermined spacing, whereby said elements possess substantial decoupling capacitance between each other.

Claim 8

In an electronic chip carrier, a substrate with pad areas thereon for mounting leads of thin film, integrated circuit chip, a chip connected to said pad areas and said substrate including a plurality of conductors coupled to said pad areas for electrical connection of said pads to various points, the improvement comprising forming said conductors from a plurality of parallel conductive planar metallic sheets having large parallel surfaces with high electrical capacitance between said sheets and minimal inductive coupling therebetween with said chip mounted above the primary one of said conductors, said primary conductor having openings therein, a plurality of pads extending out from a supporting one of said conductors into mating ones of said openings in said primary conductor, said pads extending coaxially through said openings, said pads being separated from contact with said primary conductor by means of a dielectric material with a high dielectric constant, and said chip being permanently bonded electrically and mechanically to said pad areas.

Claim 9

In an electronic chip carrier, a substrate with pad areas thereon for mounting leads of thin film, integrated circuit chip, a chip connected to said pad areas and said substrate including a plurality of conductors coupled to said pad areas for electrical connection of said pads to various points, the improvement comprising forming said conductors from a plurality of parallel conductive planar metallic sheets having large parallel surfaces with high electrical capacitance between said sheets and minimal inductive coupling therebetween with said chip mounted above the primary one of said conductors, said primary conductor having openings therein, a plurality of pads extending out from a supporting one of said conductors into mating ones of said openings in said primary conductor, said pads extending coaxially through said openings, said pads being separated from contact with said primary conductor by means of a dielectric material with a high dielectric constant, and said chip being permanently bonded electrically and mechanically to said pad areas.

Claim 10

A chip carrier in accordance with claim 6 wherein said supporting conductor includes a plurality of apertures therethrough, a pair of said pads on opposing sides of each of said apertures, with said primary conductor including complementary pairs of said openings therein adapted to receive said pads in mating relationship in a quasi-coaxial relationship between said pads and said primary conductor including outwardly extending projections therefrom between pairs of said openings, each extending out in mating relationship into one of said apertures.