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US4287294A
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US
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Method for the preparation of relief structures by phototechniques
Assignee: Siemens AG
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Filing: 1980-05-09
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Granted: 1981-09-01
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Expires: 2000-05-09
Abstract
Abstract The invention relates to a method for making more efficient the preparation of relief structures by phototechniques from mixtures containing olefinically unsaturated polymers and azides as photo initiators. For this purpose, the invention provides the use of aromatic azidomaleinimides as photo initiators. The method according to the invention is suitable particularly for the structuring by phototechniques of insulating materials as well as of semiconductor and conductor materials.
Inventors
- 👤 Roland Rubner
- 👤 Eberhard Kuhn
- 👤 Hellmut Ahne
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/12
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
84 words
In a method for the preparation of relief structures by phototechniques wherein a mixture of (i) a photo-or radiation-reactive olefinically unsaturated polymer and (ii) as a photo-initiator, an azide is applied in the form of a layer or foil to a substrate; the layer or foil is exposed or irradiated through a mask; and the non-exposed or non-irradiated portions of the layer or foil are removed from the substrate to obtain a relief structure, the improvement comprising utilizing as said photo-initiator an aromatic azidomaleinimide.
Claim 2
Dependent Claim
84 words
In a method for the preparation of relief structures by phototechniques wherein a mixture of (i) a photo-or radiation-reactive olefinically unsaturated polymer and (ii) as a photo-initiator, an azide is applied in the form of a layer or foil to a substrate; the layer or foil is exposed or irradiated through a mask; and the non-exposed or non-irradiated portions of the layer or foil are removed from the substrate to obtain a relief structure, the improvement comprising utilizing as said photo-initiator an aromatic azidomaleinimide.
Claim 3
Dependent Claim
13 words
The method according to claim 1 wherein said azidomaleinimide comprises an azidosulfonyl maleinimide.
Claim 4
Dependent Claim
13 words
The method according to claim 1 wherein said mixture further comprises a sensitizer.
Claim 5
Dependent Claim
11 words
The method according to claim 3 wherein said sensitizer comprises 4,4'-bis(dimethylamino)-benzophenone.
Claim 6
Dependent Claim
17 words
The method according to claim 1 wherein said olefinically unsaturated polymer comprises an acrylate- and/or methacrylate-group-containing polymer.
Claim 7
Dependent Claim
13 words
The method of claim 4 wherein said relief structure obtained is subsequently annealed.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-08-31 | 1985-03-02 | 1985-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-08-31 | 1989-03-02 | 1989-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-08-31 | 1993-03-02 | 1993-09-01 | $7700.00 | Window Closed / Lapsed |