US4285053A
Expired / Lapsed
US
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Acoustic method and apparatus for measuring micron and submicron distances
Assignee: Tencor Instruments Inc
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Filing: 1979-05-21
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Granted: 1981-08-18
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Expires: 1999-05-21
Abstract
Abstract A gauge for measuring variations in distance of a surface relative to a reference by means of phase shifts in a zone of high acoustic impedance. A gauge head is provided with a first orifice for emitting acoustic waves, driven by a reference signal, toward a surface positioned very close to the gauge head, forming a high impedance zone. A second orifice in the gauge head picks up acoustic waves subjected to the zone and these waves are converted to electrical signals for comparison to the reference signal in a phase detector. The phase error between the two signals is indicative of surface distance variations.
Inventors
- 👤 George J. Kren
- 👤 Franklin R. Koenig
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:33
CPC Classifications
G; G01; G01B; G01B17/00; G01S; G01S15/00; G01S15/02; G01S15/06; G01S15/08; G01S15/32; G01S15/36
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
206 words
A gauge for measuring a change in the relative distance of a surface from an acoustic emission orifice of the gauge comprising, an electrical oscillator producing an audio frequency electrical signal and driving an acoustic wave source producing waves having a wavelength which is very long compared to the distance between a first orifice emitting acoustic waves and a surface, changes to which are to be measured, a gauge head having said first orifice therein open toward said surface for emitting ecoustic waves, and a second orifice therein open toward said surface proximate to the first orifice, said gauge head closely spaced relative to the surface at a distance, changes to which are to be measured, whereby a relatively high acoustic impedance is formed between the gauge head and the surface, said first orifice communicating with the acoustic wave source, the wavelength of said waves being independent of dimensions of said gauge head, acoustic wave detection means communicting with the second orifice in said gauge head, said detection means producing a detector electrical signal representing detected acoustic waves, and phase detection means connected to receive said oscillator audio frequency electrical signal and detector electrical signals, for producing a distance variation signal from the phase difference therebetween.
Claim 2
Dependent Claim
206 words
A gauge for measuring a change in the relative distance of a surface from an acoustic emission orifice of the gauge comprising, an electrical oscillator producing an audio frequency electrical signal and driving an acoustic wave source producing waves having a wavelength which is very long compared to the distance between a first orifice emitting acoustic waves and a surface, changes to which are to be measured, a gauge head having said first orifice therein open toward said surface for emitting ecoustic waves, and a second orifice therein open toward said surface proximate to the first orifice, said gauge head closely spaced relative to the surface at a distance, changes to which are to be measured, whereby a relatively high acoustic impedance is formed between the gauge head and the surface, said first orifice communicating with the acoustic wave source, the wavelength of said waves being independent of dimensions of said gauge head, acoustic wave detection means communicting with the second orifice in said gauge head, said detection means producing a detector electrical signal representing detected acoustic waves, and phase detection means connected to receive said oscillator audio frequency electrical signal and detector electrical signals, for producing a distance variation signal from the phase difference therebetween.
Claim 3
Dependent Claim
40 words
The gauge of claim 1 wherein said first orifice is defined at an end of a first tube, and said second orifice is defined at an end of a seocnd tube, said first and second tubes terminating at said head.
Claim 4
Dependent Claim
16 words
The gauge of claim 2 wherein said first tube is coaxially disposed within said second tube.
Claim 5
Dependent Claim
13 words
The gauge of claim 1 wherein said acoustic wave source is a speaker.
Claim 6
Dependent Claim
14 words
The gauge of claim 1 wherein said acoustic wave detection means is a microphone.
Claim 7
Independent Claim
205 words
A method for measuring variations in distance from an acoustic source and detector to a surface comprising, generating continuous acoustic energy out of a first orifice in a first acoustic conduit open toward a surface, changes to which are to be measured, said energy from an acoustic wave source having a wavelength which is very long compared to the distance variations being measured, said source having a reference phase electrical signal, siad first orifice and surface disposed in close proximity forming a zone of high acoustic impedance such that the phase of acoustic waves is shifted due to such inpedance, simultaneously receiving acoustic waves subject to said acoustic impedance through a second orifice in another acoustic conduit distinct from said first acoustic conduit and open toward the surface at a position adjacent to the first orifice and converting said waves into a phase shifted electrical signal, the wavelength of said acoustic waves being independent of dimensions of said acoustic conduits, and detecting the extent of phase shift of said phase shifted electrical signal relative to said reference phase electrical signal, whereby said extent of phase shift is indicative of variations in distance between said acoustic source and said surface in accord with a known relation.
Claim 8
Independent Claim
205 words
A method for measuring variations in distance from an acoustic source and detector to a surface comprising, generating continuous acoustic energy out of a first orifice in a first acoustic conduit open toward a surface, changes to which are to be measured, said energy from an acoustic wave source having a wavelength which is very long compared to the distance variations being measured, said source having a reference phase electrical signal, siad first orifice and surface disposed in close proximity forming a zone of high acoustic impedance such that the phase of acoustic waves is shifted due to such inpedance, simultaneously receiving acoustic waves subject to said acoustic impedance through a second orifice in another acoustic conduit distinct from said first acoustic conduit and open toward the surface at a position adjacent to the first orifice and converting said waves into a phase shifted electrical signal, the wavelength of said acoustic waves being independent of dimensions of said acoustic conduits, and detecting the extent of phase shift of said phase shifted electrical signal relative to said reference phase electrical signal, whereby said extent of phase shift is indicative of variations in distance between said acoustic source and said surface in accord with a known relation.
Claim 9
Dependent Claim
203 words
A gauge for measuring very small distance variations in a gap between a surface reflective of acoustic waves and an acoustic emission orifice of the gauge comprising, means for producing acoustic waves having a wavelength which is very long compared to a gap distance, changes in which are to be measured, first and second adjacent tubes, each tube having a first orifice at a first tube end open to said surface reflective of acoustic waves and a second orifice associated with an end of each tube opposite the first end, the second orifice of the first tube communicating with said means for producing acoustic waves in an orientation such that the first orifice of the first tube emits acoustic waves toward said reflective surface at a distance sufficiently close that an acoustic impedance zone is established, the wavelength of said acoustic waves being independent of dimensions of said tubes, acoustic wave detection means communication with the second orifice of the second tube, said detection means producing a detector electrical signal representing detected acoustic waves, and phase detection means connected to receive said detector electrical signal and a signal from the oscillator means for producing a distance variation signal from the phase difference therebetween.
Claim 10
Dependent Claim
203 words
A gauge for measuring very small distance variations in a gap between a surface reflective of acoustic waves and an acoustic emission orifice of the gauge comprising, means for producing acoustic waves having a wavelength which is very long compared to a gap distance, changes in which are to be measured, first and second adjacent tubes, each tube having a first orifice at a first tube end open to said surface reflective of acoustic waves and a second orifice associated with an end of each tube opposite the first end, the second orifice of the first tube communicating with said means for producing acoustic waves in an orientation such that the first orifice of the first tube emits acoustic waves toward said reflective surface at a distance sufficiently close that an acoustic impedance zone is established, the wavelength of said acoustic waves being independent of dimensions of said tubes, acoustic wave detection means communication with the second orifice of the second tube, said detection means producing a detector electrical signal representing detected acoustic waves, and phase detection means connected to receive said detector electrical signal and a signal from the oscillator means for producing a distance variation signal from the phase difference therebetween.
Claim 11
Dependent Claim
212 words
A gauge for measuring very small distance variations in a gap between a surface reflective of acoustic waves and an acoustic emission orifice of the gauge comprising, an electrical oscillator producing an audio frequency electrical signal and driving an acoustic wave source producing waves having a wavelength which is very long compared to a gap distance, changes in which are to be measured, first and second adjacent tubes, each tube having a first orifice at a first tube end open to said surface reflective of acoustic waves and a second orifice associated with an end of each tube opposite the first end, the second orifice of the first tube communicating with said acoustic wave source in an orientation such that the first orifice of the first tube emits acoustic waves toward said reflective surface at a distance sufficiently close that an acoustic impedance zone is established, the wavelength of said acoustic waves being independent of dimensions of said tubes, acoustic wave detection means communicating with the second orifice of the second tube, said detection means producing a detector electrical signal representing detected acoustic waves, and phase detection means connected to receive said oscillator audio frequency electrical signal and detector electrical signal for producing a distance variation signal from the phase difference therebetween.
Claim 12
Dependent Claim
212 words
A gauge for measuring very small distance variations in a gap between a surface reflective of acoustic waves and an acoustic emission orifice of the gauge comprising, an electrical oscillator producing an audio frequency electrical signal and driving an acoustic wave source producing waves having a wavelength which is very long compared to a gap distance, changes in which are to be measured, first and second adjacent tubes, each tube having a first orifice at a first tube end open to said surface reflective of acoustic waves and a second orifice associated with an end of each tube opposite the first end, the second orifice of the first tube communicating with said acoustic wave source in an orientation such that the first orifice of the first tube emits acoustic waves toward said reflective surface at a distance sufficiently close that an acoustic impedance zone is established, the wavelength of said acoustic waves being independent of dimensions of said tubes, acoustic wave detection means communicating with the second orifice of the second tube, said detection means producing a detector electrical signal representing detected acoustic waves, and phase detection means connected to receive said oscillator audio frequency electrical signal and detector electrical signal for producing a distance variation signal from the phase difference therebetween.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-08-17 | 1985-02-16 | 1985-08-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-08-17 | 1989-02-16 | 1989-08-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-08-17 | 1993-02-16 | 1993-08-18 | $7700.00 | Window Closed / Lapsed |