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US4175441A Expired / Lapsed US ⏱️ 0.0 years remaining

Gauge for measuring distance to planar surfaces and thicknesses of planar members

Assignee: Tencor Instruments Inc
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Filing: 1978-05-08
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Granted: 1979-11-27
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Expires: 1998-05-08
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Abstract

Abstract Apparatus for measuring distance between a gauge head orifice, and the front planar surface of an object by sensing acoustic pressure near the gauge head orifice. The acoustic pressure is initially generated by an audio oscillator activating a speaker which emits acoustic waves through a first orifice. Acoustic pressure is sensed through a second orifice, proximate to the first, and the pressure is converted to an electrical signal which is processed to yield a distance signal for a display. Two similar distance gauges spaced apart on opposite sides of a planar member at a known distance are used to compute the thickness of the planar member.

Inventors

  • 👤 Karel Urbanek
  • 👤 George J. Kren
  • 👤 William R. Wheeler

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 19:19
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/2648; G01S; G01S15/00; G01S15/02; G01S15/06; G01S15/08; G01S15/32

Claims Analysis

Total Claims: 26
Claim 1
Independent Claim 171 words
A gauge for measuring gap distance between a planar surface of an object and an orifice comprising, acoustic means for modulating ambient pressure, said acoustic modulating means having an acoustic output means having a first orifice for emitting acoustic modulation toward the frontal surface of a non-vibrating planar object and establishing acoustic pressure in a gap defined between said acoustic output means and said frontal surface, acoustic modulation detection means having an acoustic input means, including a second orifice for receiving acoustic modulation, operating at the same time as said acoustic output means and disposed proximate to said acoustic output means, said detection means for producing electrical signals representing the amplitude of detected acoustic modulation in said gap, said acoustic output means and said acoustic input means both facing said frontal surface in an acoustic emission, reflection and detection relationship therewith, and signal processing means connected to receive said electrical signals, for producing a gap distance measurement signal from the amplitude of said electrical signals in accord with a known relation.
Claim 2
Dependent Claim 171 words
A gauge for measuring gap distance between a planar surface of an object and an orifice comprising, acoustic means for modulating ambient pressure, said acoustic modulating means having an acoustic output means having a first orifice for emitting acoustic modulation toward the frontal surface of a non-vibrating planar object and establishing acoustic pressure in a gap defined between said acoustic output means and said frontal surface, acoustic modulation detection means having an acoustic input means, including a second orifice for receiving acoustic modulation, operating at the same time as said acoustic output means and disposed proximate to said acoustic output means, said detection means for producing electrical signals representing the amplitude of detected acoustic modulation in said gap, said acoustic output means and said acoustic input means both facing said frontal surface in an acoustic emission, reflection and detection relationship therewith, and signal processing means connected to receive said electrical signals, for producing a gap distance measurement signal from the amplitude of said electrical signals in accord with a known relation.
Claim 3
Dependent Claim 30 words
The apparatus of claim 1 wherein said acoustic means for modulating ambient pressure includes a speaker electrically connected to an audio oscillator which supplies a driving signal to said speaker.
Claim 4
Dependent Claim 112 words
The apparatus of claim 2 wherein said signal processing means comprises first and second signal processing channels, said first channel comprising a first rectifier adapted to receive said electrical waves for producing a first d.c. signal therefrom, said second channel comprising a second rectifier adapted to receive said driving signal for producing a second d.c. signal therefrom, said first and second d.c. signals transmitted to a multifunction converter having an input and an output, the input connected to receive said first and second electrical signals for forming a ratio of said second signal to said first signal, said ratio cancelling systematic fluctuations in power levels of said first and second electrical signals.
Claim 5
Dependent Claim 17 words
The apparatus of claim 3 wherein said second channel is electrically connected directly to said audio oscillator.
Claim 6
Dependent Claim 33 words
The apparatus of claim 3 wherein said second channel is acoustically connected to said audio oscillator by means of a microphone disposed a fixed distance from the frontal surface of said planar object.
Claim 7
Dependent Claim 35 words
The apparatus of claim 3 wherein said second channel is acoustically connected to said audio oscillator by means of a microphone connected to directly sample the acoustic wave output of said acoustic wave modulation means.
Claim 8
Dependent Claim 37 words
The apparatus of claim 2 wherein said acoustic output means includes said first orifice defined at one end of a first tube, the other end of which is connected to said speaker for transmitting acoustic energy therefrom.
Claim 9
Dependent Claim 39 words
The apparatus of claim 7 wherein said acoustic wave input means includes said second orifice defined at one end of a second tube, the other end of which is connected to a microphone forming said acoustic pressure detection means.
Claim 10
Dependent Claim 16 words
The apparatus of claim 8 wherein said first tube is coaxially disposed within said second tube.
Claim 11
Dependent Claim 15 words
The apparatus of claim 1 wherein said acoustic pressure modulation detection means includes a microphone.
Claim 12
Dependent Claim 28 words
The apparatus of claim 1 wherein said output means orifice of said acoustic modulating means is disposed within the input means orifice of said acoustic modulation detection means.
Claim 13
Dependent Claim 280 words
A thickness gauge for planar objects or continuous sheet material or the like comprising, (a) a pair of distance measuring gauges having gauge heads spaced from each other by a known fixed width, said gauge heads facing an opposite frontal surface of a non-vibrating planar object or sheet material disposed in the fixed width and whose thickness is to be measured, each gauge comprising, acoustic means for modulating ambient pressure, said acoustic modulating means having an acoustic output means disposed in a gauge head for emitting acoustic modulation toward a frontal surface of said non-vibrating planar object and establishing acoustic pressure in a gap defined between said acoustic output means and said frontal surface, acoustic modulation detection means having an acoustic input means operating at the same time as said acoustic output means and disposed proximate to said acoustic output means, said detection means for producing electrical signals representing the amplitude of detected acoustic modulation in said gap, said acoustic output means and said acoustic input means facing said frontal surface in an acoustic emission, reflection and detection relationship therewith, and signal processing means connected to receive said electrical signals for producing a gap distance measurement signal from the amplitude of said electrical signals in accord with a known relation, (b) signal summing means connected to receive gap distance measurement signals from each distance measuring gauge for additively combining said signals and producing an output signal, (c) signal difference means having a first signal input representing the known gauge head fixed width and having as a second signal input, the output of said signal summing means for subtracting said second signal from the first signal, yielding a signal representing thickness.
Claim 14
Dependent Claim 280 words
A thickness gauge for planar objects or continuous sheet material or the like comprising, (a) a pair of distance measuring gauges having gauge heads spaced from each other by a known fixed width, said gauge heads facing an opposite frontal surface of a non-vibrating planar object or sheet material disposed in the fixed width and whose thickness is to be measured, each gauge comprising, acoustic means for modulating ambient pressure, said acoustic modulating means having an acoustic output means disposed in a gauge head for emitting acoustic modulation toward a frontal surface of said non-vibrating planar object and establishing acoustic pressure in a gap defined between said acoustic output means and said frontal surface, acoustic modulation detection means having an acoustic input means operating at the same time as said acoustic output means and disposed proximate to said acoustic output means, said detection means for producing electrical signals representing the amplitude of detected acoustic modulation in said gap, said acoustic output means and said acoustic input means facing said frontal surface in an acoustic emission, reflection and detection relationship therewith, and signal processing means connected to receive said electrical signals for producing a gap distance measurement signal from the amplitude of said electrical signals in accord with a known relation, (b) signal summing means connected to receive gap distance measurement signals from each distance measuring gauge for additively combining said signals and producing an output signal, (c) signal difference means having a first signal input representing the known gauge head fixed width and having as a second signal input, the output of said signal summing means for subtracting said second signal from the first signal, yielding a signal representing thickness.
Claim 15
Dependent Claim 30 words
The apparatus of claim 12 wherein said acoustic means for modulating ambient pressure includes a speaker electrically connected to an audio oscillator which supplies a driving signal to said speaker.
Claim 16
Dependent Claim 112 words
The apparatus of claim 13 wherein said signal processing means comprises first and second signal processing channels, said first channel comprising a first rectifier adapted to receive said electrical waves for producing a first d.c. signal therefrom, said second channel comprising a second rectifier adapted to receive said driving signal for producing a second d.c. signal therefrom, said first and second d.c. signals transmitted to a multifunction converter having an input and an output, the input connected to receive said first and second electrical signals for forming a ratio of said second signal to said first signal, said ratio cancelling systematic fluctuations in power levels of said first and second electrical signals.
Claim 17
Dependent Claim 17 words
The apparatus of claim 14 wherein said second channel is electrically connected directly to said audio oscillator.
Claim 18
Dependent Claim 33 words
The apparatus of claim 14 wherein said second channel is acoustically connected to said audio oscillator by means of a microphone disposed a fixed distance from the frontal surface of said planar object.
Claim 19
Dependent Claim 33 words
The apparatus of claim 14 wherein said second channel is acoustically connected to said audio oscillator by means of a microphone connected to directly sample the acoustic output of said acoustic modulation means.
Claim 20
Dependent Claim 37 words
The apparatus of claim 13 wherein said acoustic output means includes a first orifice defined at one end of a first tube, the other end of which is connected to said speaker for transmitting acoustic energy therefrom.
Claim 21
Dependent Claim 38 words
The apparatus of claim 18 wherein said acoustic input means includes a second orifice defined at one end of a second tube, the other end of which is connected to a microphone forming said acoustic pressure detection means.
Claim 22
Dependent Claim 16 words
The apparatus of claim 19 wherein said first tube is coaxially disposed within said second tube.
Claim 23
Dependent Claim 15 words
The apparatus of claim 12 wherein said acoustic pressure modulation detection means includes a microphone.
Claim 24
Dependent Claim 34 words
The apparatus of claim 12 wherein said output means of said acoustic modulating means includes a first orifice disposed within a second orifice included in the input means of said acoustic modulation detection means.
Claim 25
Independent Claim 111 words
A method for measuring between a planar object and an acoustic source and detector comprising, generating continuous acoustic energy in an acoustic source from a first orifice facing a non-vibrating planar object at a gap distance to be measured, whereby acoustic pressure is created in the gap, simultaneously picking up reflected acoustic energy from a second orifice proximate to said acoustic source first orifice and converting said energy to a first electrical signal representing said acoustic pressure, generating a second electrical signal representing acoustic energy output from said acoustic wave source, combining said first and second electrical signals with a reference signal to yield an output signal proportional to gap distance.
Claim 26
Independent Claim 111 words
A method for measuring between a planar object and an acoustic source and detector comprising, generating continuous acoustic energy in an acoustic source from a first orifice facing a non-vibrating planar object at a gap distance to be measured, whereby acoustic pressure is created in the gap, simultaneously picking up reflected acoustic energy from a second orifice proximate to said acoustic source first orifice and converting said energy to a first electrical signal representing said acoustic pressure, generating a second electrical signal representing acoustic energy output from said acoustic wave source, combining said first and second electrical signals with a reference signal to yield an output signal proportional to gap distance.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1982-11-26 1983-05-28 1983-11-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1986-11-26 1987-05-28 1987-11-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1990-11-26 1991-05-28 1991-11-27 $7700.00 Window Closed / Lapsed

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