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US4282537A Expired / Lapsed US ⏱️ 0.0 years remaining

Silicon MOS inductor

Assignee: Intersil Corp
•
Filing: 1979-08-20
•
Granted: 1981-08-04
•
Expires: 1999-08-20
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Abstract

Abstract A device made of amorphous silicon which exhibits inductive properties at certain voltage biases and in certain frequency ranges in described. Devices of the type described can be made in integrated circuit form.

Inventors

  • 👤 Isaac Balberg

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 14:49
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/40; H01; H01C; H01C7/00; H01C7/10; H01C7/1013; H10N; H10N99/00

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 56 words
An MOS inductor comprising: (a) an insulating substrate; (b) a conductive metal layer on a surface of said insulating substrate; (c) an amorphous silicon layer on the surface of said metal layer; (d) an insulating layer on the surface of said amorphous silicon layer; and (e) a metal contact on the surface of said insulating layer.
Claim 2
Dependent Claim 56 words
An MOS inductor comprising: (a) an insulating substrate; (b) a conductive metal layer on a surface of said insulating substrate; (c) an amorphous silicon layer on the surface of said metal layer; (d) an insulating layer on the surface of said amorphous silicon layer; and (e) a metal contact on the surface of said insulating layer.
Claim 3
Dependent Claim 14 words
The MOS inductor of claim 1 wherein said insulating substrate is comprised of glass.
Claim 4
Dependent Claim 25 words
The MOS inductor of claim 2 wherein said metal layer consists of a metal selected from the group consisting of molybdenum, chromium, and stainless steel.
Claim 5
Dependent Claim 15 words
The MOS inductor of claim 3 wherein said amorphous silicon layer is hydrogenated amorphous silicon.
Claim 6
Dependent Claim 15 words
The MOS inductor of claim 3 wherein said amorphous silicon layer is non-hydrogenated amorphous silicon.
Claim 7
Dependent Claim 15 words
The MOS inductor of claim 3 wherein said insulating layer is comprised of silicon dioxide.
Claim 8
Dependent Claim 26 words
The MOS inductor of claim 6 wherein said metal contact is made of a metal selected from the group consisting of molybdenum, chromium and stainless steel.
Claim 9
Dependent Claim 21 words
The MOS inductor of claim 7 wherein said metal contact has an area of less than about 4 mm 2 .

References Cited (Backward Citations)

US4064521A Cited
US4142195A Cited
US4163677A Cited
US4202928A Cited
US4166919A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1984-08-03 1985-02-02 1985-08-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1988-08-03 1989-02-02 1989-08-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1992-08-03 1993-02-02 1993-08-04 $7700.00 Window Closed / Lapsed

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