Semiconductor laser device

Claim 2

In a semiconductor laser device, the combination comprising: a substrate of semiconductive material having a high resistivity and including one main face, a first semiconductor layer of a first type conductivity, a second semiconductor layer of said first type conductivity, a third semiconductor layer of said first type conductivity, a fourth semiconductor layer of a second type conductivity and a fifth semiconductor layer of said first type conductivity successively grown on said main face of said substrate to form a multi-layer structure thereon, said second layer being formed of a semiconductive material narrower in forbidden band-width than that of said first semiconductor layer, said third layer being formed of a semiconductive material broader in forbidden band-width than that of said second semiconductor layer, a semiconductor region of said second type conductivity disposed on the surface portion of said fifth semiconductor layer and in one lateral portion of said multi-layer structure to extend from the surface of said fifth semiconductor layer and reach said substrate thereby to form PN junctions in said first, second, third and fifth semiconductor layers respectively, said second semiconductor layer of said first type conductivity including an exposed surface portion on the other lateral portion of said multi-layer structure formed by removing those portions of said fifth, fourth and third semiconductor layers located in said other lateral portion of said multi-layer structure, a first electrode disposed in ohmic contact with said exposed surface portion of said second semiconductor layer, and a second electrode disposed in ohmic contact with the remaining portion of said surface of said fifth semiconductor layer.

Claim 3

In a semiconductor laser device as claimed in claim 1, the combination wherein said semiconductor substrate is formed of gallium arsenide (GaAs) having a resistivity of at least 10 4 ohm centimeter, said first, third and fourth semiconductor layers are formed of aluminum gallium arsenide (AlGaAs), and said second and fifth semiconductor layers are formed of gallium arsenide (GaAs).

Claim 4

In a semiconductor laser device as claimed in claim 2, the combination wherein a selected one of hydrogen fluoride (HF) and a mixed solution of ammonium hydroxide (NH 4 OH) and hydrogen peroxide (H 2 O 2 ) is used to selectively etch away those portions of said fifth, fourth and third semiconductor layers located in the other lateral portion of said multi-layer structure.

Claim 5

In a semiconductor laser device as claimed in any of claims 1 through 3, the combination wherein said first, second, third, fourth and fifth semiconductor layers are successively disposed on said main face of said semiconductor substrate according to a liquid phase growth technique.

Claim 6

In a semiconductor laser device as claimed in any of claims 1 through 3, the combination wherein said semiconductor region of said second type conductivity is formed through the selective diffusion of zinc (Zn).

Claim 7

In a semiconductor laser device as claimed in any of claims 1 through 3, the combination wherein said first type conductivity is of an N type and said second type conductivity of a P type.

Claim 8

In semiconductor laser device as claimed in claim 6, the combination wherein a voltage is applied across said first and second electrodes so as to render said second electrode positive with respect to said first electrode.

Claim 9

In a semiconductor laser device as claimed in any of claims 1 through 3, the combination wherein said first type conductivity of a P type and said second type conductivity is of an N type.

Claim 10

In a semiconductor laser device as claimed in claim 4, the combination wherein said semiconductor region of said second type conductivity is formed through the selective diffusion of zinc (Zn).

Claim 11

In a semiconductor laser device as claimed in claim 4, the combination wherein said first type conductivity is of an N type and said second type conductivity of a P type.

Claim 12

In a semiconductor laser device as claimed in claim 5, the combination wherein said first type conductivity is of an N type and said second type conductivity of a P type.

Claim 13

In semiconductor laser device as claimed in claim 10, the combination wherein a voltage is applied across said first and second electrodes so as to render said second electrode positive with respect to said first electrode.

Claim 14

In semiconductor laser device as claimed in claim 11, the combination wherein a voltage is applied across said first and second electrodes so as to render said second electrode positive with respect to said first electrode.

Claim 15

In a semiconductor laser device as claimed in claim 4, the combination wherein said first type conductivity of a P type and said second type conductivity is of an N type.

Claim 16

In a semiconductor laser device as claimed in claim 5, the combination wherein said first type conductivity of a P type and said second type conductivity is of an N type.

Claim 17

In a semiconductor laser device, the combination comprising: a substrate of semiconductive material having a high resistivity and including one main face, a first semiconductor layer of a first type conductivity, a second semiconductor layer of said first type conductivity, a third semiconductor layer of said first type conductivity, a fourth semiconductor layer of a second type conductivity and a fifth semiconductor layer of said first type conductivity successively grown on said one main face of said substrate to form a multi-layer structure thereon, said second layer being formed of a semiconductive material narrower in forbidden band-width than that of said first semiconductor layer, said third layer being formed of a semiconductive material broader in forbidden band-width than that of said second semiconductor layer, a semiconductor region of said second type conductivity disposed on the surface portion of said fifth semiconductor layer and in one lateral portion of said multi-layer structure to extend from the surface of said fifth semiconductor layer and reach said substrate, thereby to form PN junctions in said first, second, third and fifth semiconductor layers respectively, said second semiconductor layer of said first type conductivity including an exposed surface portion on the other lateral portion of said multi-layer structure formed by removing those portions of said fifth, fourth and third semiconductor layers located in said other lateral portion of said multi-layer structure, a first electrode disposed in ohmic contact with said exposed surface portion of said second semiconductor layer, a second electrode disposed in ohmic contact with the remaining portion of said surface of said fifth semiconductor layer, and a heat sink disposed adjacent to said second electrode.

Claim 18

In a semiconductor laser device, the combination comprising: a substrate of semiconductive material having a high resistivity and including one main face, a first semiconductor layer of a first type conductivity, a second semiconductor layer of said first type conductivity, a third semiconductor layer of said first type conductivity, a fourth semiconductor layer of a second type conductivity and a fifth semiconductor layer of said first type conductivity successively grown on said one main face of said substrate to form a multi-layer structure thereon, said second layer being formed of a semiconductive material narrower in forbidden band-width than that of said first semiconductor layer, said third layer being formed of a semiconductive material broader in forbidden band-width than that of said second semiconductor layer, a semiconductor region of said second type conductivity disposed on the surface portion of said fifth semiconductor layer and in one lateral portion of said multi-layer structure to extend from the surface of said fifth semiconductor layer and reach said substrate, thereby to form PN junctions in said first, second, third and fifth semiconductor layers respectively, said second semiconductor layer of said first type conductivity including an exposed surface portion on the other lateral portion of said multi-layer structure formed by removing those portions of said fifth, fourth and third semiconductor layers located in said other lateral portion of said multi-layer structure, a first electrode disposed in ohmic contact with said exposed surface portion of said second semiconductor layer, a second electrode disposed in ohmic contact with the remaining portion of said surface of said fifth semiconductor layer, and a heat sink disposed adjacent to said second electrode.

Claim 19

In a semiconductor laser device as claimed in claim 16, the combination wherein said heat sink includes a surface complementary in configuration to the surface of said device provided with first and second electrode.

Claim 20

In a semiconductor laser device as claimed in claims 16 or 17, the combination wherein said heat sink is composed of a silicon substrate.

Claim 21

In a semiconductor laser device as claimed in claims 16 or 17, the combination wherein an electric conductor is disposed on said heat sink to contact each of said first and second electrodes.

Claim 22

In a semiconductor laser device as claimed in claim 11, the combination wherein an electric conductor is disposed on said heat sink to contact each of said first and second electrodes.