Process for forming mullite

Claim 1

A method of fabricating a multi-layer ceramic substrate for an integrated circuit semiconductor package formed of a ceramic material composed of a high percentage of high purity dense mullite comprising forming a particulate ceramic mixture of (1) mullite in an amount in the range of 5 to 30% by weight, (2) Al 2 O 3 in an amount such that it is from stoichiometric amount to excess as necessary to form the desired mullite composition percentage less the initially added mullite, and (3) aluminosilicate glass with an SiO 2 content in the range of 40 to 80% and including a significant amount of alkaline earth oxides, said glass in an amount to provide sufficient SiO 2 to combine with Al 2 O 3 to form the desired mullite composition percentage, combining the particulate mixture with an organic binder resin, and a solvent for the resin to form a liquid dispersion, forming the liquid dispersion into a sheet, drying the resultant sheet to remove the solvent from the resin to thereby form a ceramic green sheet, laminating a plurality of processed green sheets, sintering the resultant laminated green sheet substrate at a temperature in the range of 1300° to 1600° C. for a time in the range of one-half to 24 hours to remove the binder resin and subsequently react the Al 2 O 3 and SiO 2 in the glass to form dense mullite under the influence of the initially added mullite, the resultant substrate having 0% apparent porosity.

Claim 2

A method of fabricating a multi-layer ceramic substrate for an integrated circuit semiconductor package formed of a ceramic material composed of a high percentage of high purity dense mullite comprising forming a particulate ceramic mixture of (1) mullite in an amount in the range of 5 to 30% by weight, (2) Al 2 O 3 in an amount such that it is from stoichiometric amount to excess as necessary to form the desired mullite composition percentage less the initially added mullite, and (3) aluminosilicate glass with an SiO 2 content in the range of 40 to 80% and including a significant amount of alkaline earth oxides, said glass in an amount to provide sufficient SiO 2 to combine with Al 2 O 3 to form the desired mullite composition percentage, combining the particulate mixture with an organic binder resin, and a solvent for the resin to form a liquid dispersion, forming the liquid dispersion into a sheet, drying the resultant sheet to remove the solvent from the resin to thereby form a ceramic green sheet, laminating a plurality of processed green sheets, sintering the resultant laminated green sheet substrate at a temperature in the range of 1300° to 1600° C. for a time in the range of one-half to 24 hours to remove the binder resin and subsequently react the Al 2 O 3 and SiO 2 in the glass to form dense mullite under the influence of the initially added mullite, the resultant substrate having 0% apparent porosity.