Abstract A layer of polycrystalline silicon is coated with a masking layer leaving at least one edge of the silicon layer exposed. A P-type dopant is diffused into the exposed edge of the silicon layer so that the dopant diffuses laterally along the silicon layer a desired distance. The masking layer is then removed and the undoped portion of the silicon layer is removed by an etchant which does not etch the doped portion of the silicon layer. This leaves the narrow strip of the doped silicon which can be used as the gate electrode of an MOS transistor and/or as an interconnection in an integrated circuit. Since the lateral diffusion of the dopant can be accurately controlled, narrow strips of the doped silicon can be achieved.
A semiconductor device comprising: a substrate of an insulating material; an island of semiconductor material on the substrate, the island being in the shape of an elongated rectangle having two connected portions, each portion having drain, source and channel regions, the drain and source regions of one of the portions being of one conductivity type and the drain and source regions the other of the portions being of an opposite conductivity type; a strip of oxide on and extending across each of the channel regions of the semiconductor island; and a narrow strip of P-type polycrystalline silicon extending across the substrate and on each oxide strip, the polycrystalline silicon strip being in an enclosed form and insulated from the island by each strip of oxide.
Claim 2
Dependent Claim
125 words
A semiconductor device comprising: a substrate of an insulating material; an island of semiconductor material on the substrate, the island being in the shape of an elongated rectangle having two connected portions, each portion having drain, source and channel regions, the drain and source regions of one of the portions being of one conductivity type and the drain and source regions the other of the portions being of an opposite conductivity type; a strip of oxide on and extending across each of the channel regions of the semiconductor island; and a narrow strip of P-type polycrystalline silicon extending across the substrate and on each oxide strip, the polycrystalline silicon strip being in an enclosed form and insulated from the island by each strip of oxide.
Claim 3
Dependent Claim
30 words
A semiconductor device in accordance with claim 1, wherein: the channel region of each of the connected portions is of opposite conductivity type to its respective source and drain regions.