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Tin oxide, cadmium chloride doped silver chloride electron beam recording medium

Assignee: Corning Glass Works
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Filing: 1979-10-22
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Granted: 1981-05-26
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Expires: 1999-10-22
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Abstract

Abstract Electron beam-sensitive films containing silver chloride, cadmium chloride and tin oxide, and the use of such films to provide optical masks by selective film darkening with an electron beam, are described.

Inventors

  • 👤 Nicholas F. Borrelli
  • 👤 Peter L. Young

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 15:27
CPC Classifications
G; G03; G03C; G03C1/00; G03C1/705

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 20 words
An electron beam recording medium comprising a supported polycrystalline film containing cadmium chloride-doped silver chloride in combination with tin oxide.
Claim 2
Dependent Claim 20 words
An electron beam recording medium comprising a supported polycrystalline film containing cadmium chloride-doped silver chloride in combination with tin oxide.
Claim 3
Dependent Claim 51 words
An electron beam recording medium comprising a supported polycrystalline film which consists essentially of AgCl, CdCl 2 and SnO x , wherein x is between 1 and 2, the weight ratio AgCl/CdCl 2 is in the range of 4-24, and the weight ratio AgCl/SnO x is in the range of 5-60.
Claim 4
Dependent Claim 51 words
An electron beam recording medium comprising a supported polycrystalline film which consists essentially of AgCl, CdCl 2 and SnO x , wherein x is between 1 and 2, the weight ratio AgCl/CdCl 2 is in the range of 4-24, and the weight ratio AgCl/SnO x is in the range of 5-60.
Claim 5
Dependent Claim 27 words
An electron beam recording medium in accordance with claim 2 wherein the polycrystalline film consists essentially of a mixture of AgCl, CdCl 2 and SnO x .
Claim 6
Dependent Claim 27 words
An electron beam recording medium in accordance with claim 2 wherein the polycrystalline film consists essentially of alternating layers of SnO x and mixed AgCl-CdCl 2 .
Claim 7
Dependent Claim 24 words
An electron beam recording medium in accordance with claim 2 wherein the polycrystalline film has a thickness in the range of about 0.1-2 microns.
Claim 8
Independent Claim 65 words
A method for making an optical mask which comprises the step of selectively darkening portions of a polycrystalline film containing cadmium chloride-doped silver chloride in combination with tin oxide by exposing said portions to an electron beam for a time sufficient to obtain an optical contrast ratio of at least about 3 between the selectively darkened portions of the film and the undarkened portions thereof.
Claim 9
Independent Claim 65 words
A method for making an optical mask which comprises the step of selectively darkening portions of a polycrystalline film containing cadmium chloride-doped silver chloride in combination with tin oxide by exposing said portions to an electron beam for a time sufficient to obtain an optical contrast ratio of at least about 3 between the selectively darkened portions of the film and the undarkened portions thereof.
Claim 10
Independent Claim 101 words
A method for making an optical mask which comprises the step of selectively darkening portions of a polycrystalline film by exposing said portions to an electron beam, said film consisting essentially of AgCl, CdCl 2 and SnO x , wherein x is between 1 and 2, the weight ratio AgCl CdCl 2 is in the range 4-24, and the weight ratio AgCl/SnO x is in the range of about 5-60, said exposure being continued for a time sufficient to obtain an optical contrast ratio of at least about 3 between said darkened portions of said film and the undarkened portions thereof.
Claim 11
Independent Claim 101 words
A method for making an optical mask which comprises the step of selectively darkening portions of a polycrystalline film by exposing said portions to an electron beam, said film consisting essentially of AgCl, CdCl 2 and SnO x , wherein x is between 1 and 2, the weight ratio AgCl CdCl 2 is in the range 4-24, and the weight ratio AgCl/SnO x is in the range of about 5-60, said exposure being continued for a time sufficient to obtain an optical contrast ratio of at least about 3 between said darkened portions of said film and the undarkened portions thereof.
Claim 12
Dependent Claim 24 words
A method in accordance with claim 7 wherein the polycrystalline film consists essentially of a mixture of AgCl, CdCl 2 and SnO x .
Claim 13
Dependent Claim 24 words
A method in accordance with claim 7 wherein the polycrystalline film consists essentially of alternating layers of SnO x and mixed AgCl--CdCl 2 .
Claim 14
Dependent Claim 21 words
A method in accordance with claim 7 wherein the polycrystalline film has a thickness in the range of about 0.1-2 microns.

References Cited (Backward Citations)

US3219448A Cited
US3664837A Cited
US3852771A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1984-05-25 1984-11-24 1985-05-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1988-05-25 1988-11-24 1989-05-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1992-05-25 1992-11-24 1993-05-26 $7700.00 Window Closed / Lapsed

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