US4266986A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Passivation of defects in laser annealed semiconductors
Assignee: AT&T Inc
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Filing: 1979-11-29
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Granted: 1981-05-12
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Expires: 1999-11-29
Abstract
Abstract The application describes a technique for passivating point defects that are characteristic of laser annealed semiconductors. According to the technique, the laser annealed material is treated with atomic hydrogen to electrically deactivate the defects.
Inventors
- 👤 Janet L. Benton
- 👤 Charles J. Doherty
- 👤 Lionel C. Kimerling
- 👤 Harry J. Leamy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:45
CPC Classifications
H; H10; H10P; H10P34/00; H10P34/40; H10P34/42; H10P95/00; H10P95/94; Y; Y10; Y10S; Y10S148/00; Y10S148/024; Y10S148/09; Y10S148/093
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
54 words
A method for processing a semiconductor comprising exposing at least a portion of the semiconductor to laser or electron radiation sufficient to heat the portion to within 200 degrees C. of the melting point, quenching the heated portion, and exposing the quenched portion to atomic hydrogen thereby passivating a substantial number of the defects.
Claim 2
Independent Claim
54 words
A method for processing a semiconductor comprising exposing at least a portion of the semiconductor to laser or electron radiation sufficient to heat the portion to within 200 degrees C. of the melting point, quenching the heated portion, and exposing the quenched portion to atomic hydrogen thereby passivating a substantial number of the defects.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein the atomic hydrogen has an integrated flux of at least 10 11 atoms per square centimeter.
Claim 4
Dependent Claim
15 words
The method of claim 2 wherein the atomic hydrogen is produced by a hydrogen plasma.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-05-11 | 1984-11-10 | 1985-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-05-11 | 1988-11-10 | 1989-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-05-11 | 1992-11-10 | 1993-05-12 | $7700.00 | Window Closed / Lapsed |