US4264642A
Expired / Lapsed
US
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Deposition of thin film organic coatings by ion implantation
Assignee: Lord Corp
•
Filing: 1978-12-11
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Granted: 1981-04-28
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Expires: 1998-12-11
Abstract
Abstract Thin film organic coatings of a polymeric nature are deposited on and merged into substrate surfaces by ion implantation of ionized organic monomers.
Inventors
- 👤 Michael W. Ferralli
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:50
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62
Claims Analysis
Total Claims: 53
Claim 1
Independent Claim
127 words
A method for the deposition of thin organic films comprising: (a) ionizing at least one vaporized organic monomeric material; (b) energizing said ions of vaporized organic monomeric material to an energy level of at least 10 Kev; (c) directing said energized ions of vaporized organic monomeric material against a surface of a substrate selected from the group consisting of metals, glass and sodium chloride; and (d) impinging said energized ions of vaporized organic monomeric material against said substrate to implant at least a portion of such ions into said substrate and form a thin organic coating having a polymeric nature in and on said substrate, said formed polymeric coating being merged into and with implanted ions of vaporized organic monomeric material and with atoms of said substrate.
Claim 2
Independent Claim
127 words
A method for the deposition of thin organic films comprising: (a) ionizing at least one vaporized organic monomeric material; (b) energizing said ions of vaporized organic monomeric material to an energy level of at least 10 Kev; (c) directing said energized ions of vaporized organic monomeric material against a surface of a substrate selected from the group consisting of metals, glass and sodium chloride; and (d) impinging said energized ions of vaporized organic monomeric material against said substrate to implant at least a portion of such ions into said substrate and form a thin organic coating having a polymeric nature in and on said substrate, said formed polymeric coating being merged into and with implanted ions of vaporized organic monomeric material and with atoms of said substrate.
Claim 3
Dependent Claim
15 words
A method according to claim 1 wherein said thin organic film comprises organic polymeric material.
Claim 4
Dependent Claim
15 words
A method according to claim 2 wherein said organic polymeric material comprises a polymeric hydrocarbon.
Claim 5
Dependent Claim
25 words
A method according to claim 3 wherein said organic polymeric material comprises a polymer of a saturated hydrocarbon having from 1 to 12 carbon atoms.
Claim 6
Dependent Claim
16 words
A method according to claim 4 wherein said organic polymeric material comprises a polymer of methane.
Claim 7
Dependent Claim
25 words
A method according to claim 3 wherein said organic polymeric material comprises a polymer of an unsaturated hydrocarbon having from 2 to 12 carbon atoms.
Claim 8
Dependent Claim
24 words
A method according to claim 6 wherein said organic polymeric material comprises a polymer of an olefin having from 2 to 12 carbon atoms.
Claim 9
Dependent Claim
16 words
A method according to claim 7 wherein said organic polymeric material comprises a polymer of ethylene.
Claim 10
Dependent Claim
24 words
A method according to claim 6 wherein said organic polymeric material comprises a polymer of a diolefin having from 4 to 12 carbon atoms.
Claim 11
Dependent Claim
16 words
A method according to claim 9 wherein said organic polymeric material comprises a polymer of 1,3-butadiene.
Claim 12
Dependent Claim
21 words
A method according to claim 6 wherein said organic polymeric material comprises a polymer of a mixture of ethylene and 1,3-butadiene.
Claim 13
Independent Claim
223 words
A method for the deposition of thin organic films comprising: (a) ionizing at least one vaporized non-deposition material to form a flux comprising ions and neutral fragments of such vaporized non-deposition material; (b) extracting from said flux an energetic beam consisting essentially of ions of vaporized non-deposition material; (c) accelerating said energetic beam of ions of vaporized non-deposition material to an energy level of at least 10 Kev and directing said energetic beam of ions into a deposition chamber containing a substrate selected from the group consisting of metals, glass and sodium chloride, said deposition chamber containing also at least one vaporized monomeric organic deposition material; (d) passing said energetic beam of ions of non-deposition material through said vaporized organic deposition material whereby such vaporized organic deposition material is ionized by collisional interaction with said energetic beam of ions of non-deposition material; and (e) coimpinging said energetic beam of ions of non-deposition material and ions of vaporized organic deposition material against a surface of said substrate for a time sufficient to implant at least a portion of said ions of vaporized organic deposition material into said substrate and to form a thin organic film having a polymeric nature in and on such substrate, such polymeric film being merged into and with ions of vaporized organic deposition material and the atoms of said substrate.
Claim 14
Independent Claim
223 words
A method for the deposition of thin organic films comprising: (a) ionizing at least one vaporized non-deposition material to form a flux comprising ions and neutral fragments of such vaporized non-deposition material; (b) extracting from said flux an energetic beam consisting essentially of ions of vaporized non-deposition material; (c) accelerating said energetic beam of ions of vaporized non-deposition material to an energy level of at least 10 Kev and directing said energetic beam of ions into a deposition chamber containing a substrate selected from the group consisting of metals, glass and sodium chloride, said deposition chamber containing also at least one vaporized monomeric organic deposition material; (d) passing said energetic beam of ions of non-deposition material through said vaporized organic deposition material whereby such vaporized organic deposition material is ionized by collisional interaction with said energetic beam of ions of non-deposition material; and (e) coimpinging said energetic beam of ions of non-deposition material and ions of vaporized organic deposition material against a surface of said substrate for a time sufficient to implant at least a portion of said ions of vaporized organic deposition material into said substrate and to form a thin organic film having a polymeric nature in and on such substrate, such polymeric film being merged into and with ions of vaporized organic deposition material and the atoms of said substrate.
Claim 15
Dependent Claim
17 words
A method according to claim 12 wherein said organic deposition material comprises at least one hydrocarbon monomer.
Claim 16
Dependent Claim
22 words
A method according to claim 13 wherein said deposited film comprises a polymer of saturated hydrocarbon having at least 1 carbon atom.
Claim 17
Dependent Claim
17 words
A method according to claim 14 wherein said saturated hydrocarbon has from 1 to 12 carbon atoms.
Claim 18
Dependent Claim
12 words
A method according to claim 15 wherein said saturated hydrocarbon comprises methane.
Claim 19
Dependent Claim
23 words
A method according to claim 13 wherein said deposited film comprises a polymer of an unsaturated hydrocarbon having at least two carbon atoms.
Claim 20
Dependent Claim
25 words
A method according to claim 17 wherein said deposition film comprises a polymer of at least one olefin having from 2 to 12 carbon atoms.
Claim 21
Dependent Claim
11 words
A method according to claim 18 wherein said olefin comprises ethylene.
Claim 22
Dependent Claim
25 words
A method according to claim 17 wherein said deposited film comprises a polymer of at least one diolefin having from 4 to 12 carbon atoms.
Claim 23
Dependent Claim
11 words
A method according to claim 20 wherein said diolefin comprises 1,3-butadiene.
Claim 24
Independent Claim
187 words
A method of the deposition of thin organic films comprising: (a) ionizing a vaporized mixture consisting essentially of at least one non-deposition material and at least one first organic monomeric deposition material to form a flux comprising a melange of ions of vaporized non-deposition material and ions of vaporized first organic monomeric deposition material; (b) extracting from said flux a beam consisting essentially of said melange of ions; (c) energizing said beam through acceleration by electrostatic attraction due to a potential gradient to an energy level of at least 10 Kev and directing said energized beam into a deposition chamber containing a substrate selected from the group consisting of metals, glass and sodium chloride; and (d) impinging said energized beam against said substrate for a time sufficient to implant at least a portion of said ions of vaporized first organic deposition material into said substrate and to form a film of organic material having a polymeric nature in and on said substrate, said film of polymeric organic material being merged into and with implanted ions of vaporized first organic deposition material and with atoms of said substrate.
Claim 25
Independent Claim
187 words
A method of the deposition of thin organic films comprising: (a) ionizing a vaporized mixture consisting essentially of at least one non-deposition material and at least one first organic monomeric deposition material to form a flux comprising a melange of ions of vaporized non-deposition material and ions of vaporized first organic monomeric deposition material; (b) extracting from said flux a beam consisting essentially of said melange of ions; (c) energizing said beam through acceleration by electrostatic attraction due to a potential gradient to an energy level of at least 10 Kev and directing said energized beam into a deposition chamber containing a substrate selected from the group consisting of metals, glass and sodium chloride; and (d) impinging said energized beam against said substrate for a time sufficient to implant at least a portion of said ions of vaporized first organic deposition material into said substrate and to form a film of organic material having a polymeric nature in and on said substrate, said film of polymeric organic material being merged into and with implanted ions of vaporized first organic deposition material and with atoms of said substrate.
Claim 26
Dependent Claim
28 words
A method according to claim 22 wherein said deposited film of organic material comprises a polymer of at least one hydrocarbon monomer having at least one carbon atom.
Claim 27
Dependent Claim
23 words
A method according to claim 23 wherein said hydrocarbon monomer comprises at least one saturated hydrocarbon having from 1 to 12 carbon atoms.
Claim 28
Dependent Claim
12 words
A method according to claim 24 wherein said saturated hydrocarbon comprises methane.
Claim 29
Dependent Claim
22 words
A method according to claim 23 wherein said hydrocarbon monomer comprises at least one unsaturated hydrocarbon having at least two carbon atoms.
Claim 30
Dependent Claim
22 words
A method according to claim 26 wherein said unsaturated hydrocarbon comprises at least one olefin having from 2 to 12 carbon atoms.
Claim 31
Dependent Claim
11 words
A method according to claim 27 wherein said olefin is ethylene.
Claim 32
Dependent Claim
22 words
A method according to claim 26 wherein said unsaturated hydrocarbon comprises at least one diolefin having from 4 to 12 carbon atoms.
Claim 33
Dependent Claim
11 words
A method according to claim 29 wherein said diolefin comprises 1,3-butadiene.
Claim 34
Dependent Claim
25 words
A method according to claim 22 wherein there is present in said deposition chamber at least one second organic monomer deposition material in vapor form.
Claim 35
Dependent Claim
132 words
A method according to claim 31 wherein said vaporized second organic deposition material is ionized by said energized beam containing said melange of ions and said energized beam containing said melange of ions and said ions of vaporized second organic monomer deposition material are coimpinged against said substrate for a time sufficient to implant at least a portion of said ions of vaporized first organic monomeric deposition material and ions of vaporized second organic monomer deposition material into said substrate and to form a film of organic material having a polymeric nature into and on said substrate, said film of polymeric organic material being merged into and with implanted ions of said vaporized first organic monomeric deposition material and said vaporized second organic monomer deposition material and with atoms of said substrate.
Claim 36
Dependent Claim
21 words
A method according to claim 32 wherein said first organic deposition material and said second organic deposition material are the same.
Claim 37
Dependent Claim
20 words
A method according to claim 32 wherein said first organic deposition material and said second organic deposition material are different.
Claim 38
Independent Claim
175 words
A method for the deposition of thin organic films comprising: (a) ionizing at least one vaporized first organic monomeric deposition material to form a flux comprising ions of said vaporized first organic monomeric deposition material; (b) extracting from said flux a beam consisting essentially of ions of vaporized first organic deposition material; (c) energizing said beam of ions through acceleration by electrostatic attraction due to a potential gradient to an energy level of at least 10 Kev and directing said energized beam into a deposition chamber containing a substrate selected from the group consisting of metals, glass and sodium chloride; and (d) impinging said energized beam against said substrate for a time sufficient to implant at least a portion of said ions of vaporized first organic monomeric deposition material into said substrate and to form a film of organic material having a polymeric nature in and on said substrate, said film of polymeric organic material being merged into and with implanted ions of vaporized first organic monomeric deposition material and with atoms of said substrate.
Claim 39
Independent Claim
175 words
A method for the deposition of thin organic films comprising: (a) ionizing at least one vaporized first organic monomeric deposition material to form a flux comprising ions of said vaporized first organic monomeric deposition material; (b) extracting from said flux a beam consisting essentially of ions of vaporized first organic deposition material; (c) energizing said beam of ions through acceleration by electrostatic attraction due to a potential gradient to an energy level of at least 10 Kev and directing said energized beam into a deposition chamber containing a substrate selected from the group consisting of metals, glass and sodium chloride; and (d) impinging said energized beam against said substrate for a time sufficient to implant at least a portion of said ions of vaporized first organic monomeric deposition material into said substrate and to form a film of organic material having a polymeric nature in and on said substrate, said film of polymeric organic material being merged into and with implanted ions of vaporized first organic monomeric deposition material and with atoms of said substrate.
Claim 40
Dependent Claim
17 words
The method of claim 35 wherein said first organic monomeric material comprises at least one hydrocarbon monomer.
Claim 41
Dependent Claim
22 words
The method of claim 36 wherein said hydrocarbon monomer combines at least one saturated hydrocarbon having from 1 to 12 carbon atoms.
Claim 42
Dependent Claim
11 words
The method of claim 37 wherein said hydrocarbon monomer comprises methane.
Claim 43
Dependent Claim
21 words
The method of claim 36 wherein said hydrocarbon monomer comprises at least one unsaturated hydrocarbon having at least 2 carbon atoms.
Claim 44
Dependent Claim
34 words
The method according to claim 39 wherein said unsaturated hydrocarbon monomer is selected from the group consisting of olefins having from 2 to 12 carbon atoms and diolefins having from 4 to 12 atoms.
Claim 45
Dependent Claim
13 words
The method according to claim 40 wherein said unsaturated hydrocarbon monomer comprises ethylene.
Claim 46
Dependent Claim
25 words
A method according to claim 35 wherein there is present in said deposition chamber at least one second organic monomeric deposition material in vapor form.
Claim 47
Dependent Claim
139 words
A method according to claim 42 wherein said vaporized second organic monomeric deposition material is ionized by collisional interaction with said energized beam consisting essentially of ions of vaporized first organic monomeric deposition material and said energized beam of ions and said ions of vaporized second organic monomeric deposition are coimpinged against said substrate for a time sufficient to implant at least a portion of said ions of vaporized first organic monomeric deposition material and said ions of vaporized second organic monomeric deposition material into said substrate and to form a film of organic material having a polymeric nature into and on said substrate, said film of polymeric organic material being merged into and with implanted ions of said vaporized first organic monomeric deposition material and said vaporized second organic monomeric deposition material and with atoms of said substrate.
Claim 48
Dependent Claim
17 words
A method according to claim 43 wherein said second organic material comprises at least one hydrocarbon monomer.
Claim 49
Dependent Claim
19 words
A method according to claim 43 wherein said first organic material and said second organic material are the same.
Claim 50
Dependent Claim
20 words
A method according to claim 45 wherein said first organic material comprises ethylene and said second organic material comprises ethylene.
Claim 51
Dependent Claim
18 words
A method according to claim 43 wherein said first organic material and said second organic material are different.
Claim 52
Dependent Claim
40 words
A method according to claim 47 wherein said first organic material comprises at least one olefin having from 2 to 12 carbon atoms and said second organic material comprises at least one diolefin having from 4 to 12 carbon atoms.
Claim 53
Dependent Claim
20 words
A method according to claim 48 wherein said first organic material comprises ethylene and said second organic material comprises 1,3-butadiene.
References Cited (Backward Citations)
US3912826A
Cited
US4096315A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1984-04-27 | 1984-10-27 | 1985-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-04-27 | 1988-10-27 | 1989-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-04-27 | 1992-10-27 | 1993-04-28 | $7700.00 | Window Closed / Lapsed |