US4263089A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma development process controller
Assignee: Motorola Solutions Inc
•
Filing: 1980-03-10
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Granted: 1981-04-21
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Expires: 2000-03-10
Abstract
Abstract End point detection in developing photoresist is accomplished by monitoring the output of a photodetector and sensing a plateau in the output.
Inventors
- 👤 Jed V. Keller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 01:33
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32917; H01J37/32935; G; G01; G01N; G01N21/00; G01N21/75; G01N21/76
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
51 words
In a process for etching a material with a plasma, said plasma characterized by a decreasing luminosity during the etching and a momentary stability in luminosity when the etch is partially complete, the improvement comprising: monitoring the variations in luminosity of the plasma; terminating the plasma when the variations first stabilize.
Claim 2
Dependent Claim
51 words
In a process for etching a material with a plasma, said plasma characterized by a decreasing luminosity during the etching and a momentary stability in luminosity when the etch is partially complete, the improvement comprising: monitoring the variations in luminosity of the plasma; terminating the plasma when the variations first stabilize.
Claim 3
Dependent Claim
24 words
The process as set forth in claim 1 wherein said luminosity is monitored in a selected portion of the spectrum produced by the plasma.
References Cited (Backward Citations)
US4198261A
Cited
US4201579A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-04-20 | 1984-10-20 | 1985-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-04-20 | 1988-10-20 | 1989-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-04-20 | 1992-10-20 | 1993-04-21 | $7700.00 | Window Closed / Lapsed |