Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
118 words
A method of reshaping warped graphite susceptor enclosures which are split and whose confronting split edges have spread apart with repeated exposure to monocrystalline vapor influences comprising: (a) compressing the enclosure to move the confronting edges to a less spaced apart condition, (b) holding the enclosure in said compressed condition while heating it from the temperature at which it was compressed to a higher temperature sufficient to cause the vaporization of the monocrystalline material and the monocrystalline material carbide compounds resident as a boundary layer on the outer surface of the enclosure to drive off those materials sufficiently to cause the graphite enclosure to return substantially to its original set condition when cooled, (c) and cooling the enclosure.
Claim 2
Independent Claim
118 words
A method of reshaping warped graphite susceptor enclosures which are split and whose confronting split edges have spread apart with repeated exposure to monocrystalline vapor influences comprising: (a) compressing the enclosure to move the confronting edges to a less spaced apart condition, (b) holding the enclosure in said compressed condition while heating it from the temperature at which it was compressed to a higher temperature sufficient to cause the vaporization of the monocrystalline material and the monocrystalline material carbide compounds resident as a boundary layer on the outer surface of the enclosure to drive off those materials sufficiently to cause the graphite enclosure to return substantially to its original set condition when cooled, (c) and cooling the enclosure.
Claim 3
Dependent Claim
16 words
The method of claim 1 in which the enclosures are cold compressed at ambient room temperature.
Claim 4
Dependent Claim
16 words
The method of claim 1 in which the heating takes place in an oxygen free atmosphere.
Claim 5
Dependent Claim
16 words
The method of claim 1 in which the heating takes place in a halogen gas atmosphere.
Claim 6
Dependent Claim
29 words
The method of claim 1 in which the heating is accomplished by burying the enclosure in a heated particulate furnace bed and exposing the enclosure to halogen gas flow.
Claim 7
Dependent Claim
11 words
The method of claim 5 in which the gas is difluorodichloromethane.
Claim 8
Dependent Claim
42 words
The method of claim 1 wherein the enclosure is placed in an open-ended sleeve container and axially extending rods circumferentially spaced around the container are used to compress the enclosure and form circumferentially spaced axially extending gas evolution channels within the container.
Claim 9
Independent Claim
159 words
A method of reshaping warped graphite susceptor sleeve enclosures which are split and whose confronting split edges have spread apart as a result of the formation of silicon carbides and silicon vapor on the exterior cylindrical surface of the sleeve and the deposition of free silicon thereon and in the pores of the sleeve, comprising: (a) cold compressing the enclosure to move the confronting edges to a less spaced apart location by placing the enclosure within a graphite sleeve container; (b) heating the susceptor sleeve and container to a temperature at which vaporization of the free silicon and the silicon-carbon compounds occurs for a time sufficiently to drive these materials off; (c) removing the vapor from the vicinity of the container and susceptor sleeve; (d) cooling the susceptor sleeve and container; (e) and removing the susceptor sleeve from the container in a state in which it repossesses its original set and is more resistant to such warpage than originally.
Claim 10
Independent Claim
159 words
A method of reshaping warped graphite susceptor sleeve enclosures which are split and whose confronting split edges have spread apart as a result of the formation of silicon carbides and silicon vapor on the exterior cylindrical surface of the sleeve and the deposition of free silicon thereon and in the pores of the sleeve, comprising: (a) cold compressing the enclosure to move the confronting edges to a less spaced apart location by placing the enclosure within a graphite sleeve container; (b) heating the susceptor sleeve and container to a temperature at which vaporization of the free silicon and the silicon-carbon compounds occurs for a time sufficiently to drive these materials off; (c) removing the vapor from the vicinity of the container and susceptor sleeve; (d) cooling the susceptor sleeve and container; (e) and removing the susceptor sleeve from the container in a state in which it repossesses its original set and is more resistant to such warpage than originally.
Claim 11
Dependent Claim
24 words
The method of claim 8 in which the heating takes place in a halogen gas atmosphere and silicon fluoride and chloride vapors are formed.
Claim 12
Dependent Claim
37 words
The method of claim 8 in which the heating is accomplished by burying the container in a particulate petroleum coke furnace bed and piping a halogen gas into the bed, while raising the bed to elevated temperatures.
Claim 13
Dependent Claim
104 words
A product comprising: a formerly warped graphite susceptor enclosure having confronting split edges which were formerly in unduly spaced condition due to the original enclosure assuming an expanded warped set, because of monocrystalline material and monocrystalline material carbide compounds resident on the boundary outer layer of the enclosure; the formerly warped enclosure having been compressed to substantially present shape and then heated to a higher temperature sufficient to cause the vaporization of the monocrystalline material and the monocrystalline material carbide compounds sufficiently so that the enclosure was reset in a condition in which it is more resistant to further warpage than the original product.
Claim 14
Dependent Claim
104 words
A product comprising: a formerly warped graphite susceptor enclosure having confronting split edges which were formerly in unduly spaced condition due to the original enclosure assuming an expanded warped set, because of monocrystalline material and monocrystalline material carbide compounds resident on the boundary outer layer of the enclosure; the formerly warped enclosure having been compressed to substantially present shape and then heated to a higher temperature sufficient to cause the vaporization of the monocrystalline material and the monocrystalline material carbide compounds sufficiently so that the enclosure was reset in a condition in which it is more resistant to further warpage than the original product.
Claim 15
Dependent Claim
17 words
The product of claim 11 in which the monocrystalline material was silicon vaporized off in crystal pulling.