Patent US4255216A successfully refreshed from Google Patents.
US4255216A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pellicle ring removal method and tool
Assignee: International Business Machines Corp
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Filing: 1980-01-14
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Granted: 1981-03-10
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Expires: 2000-01-14
Abstract
Abstract The invention discloses a method of separating a glass mask from a pellicle ring adhesively mounted thereon. This is accomplished by maintaining a coolant in contact with the mask for a period of time sufficient to cool the adhesive bond between the mask and pellicle ring to below its embrittlement temperature so that when a shearing force is applied to the ring with respect to the glass mask will cause shearing of the adhesive bond at the adhesive glass mask interface. When pressure is applied to the ring across the adhesive, separation at the surface of the mask occurs and the ring is released from the mask without damage to the mask or the ring and without leaving significant amounts of adhesive on the surface of the mask. Pellicles removed in this manner can be rebonded at a later time to a glass mask using the same adhesive and without using additional adhesive.
Inventors
- 👤 Jay W. Conant
- 👤 Donald W. Fisher
- 👤 David D. Fox
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 06:11
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/62; G03F1/64; B; B29; B29C; B29C65/00; B29C65/76; B29C66/00; B29C66/70; B29C66/72; B29C66/727; Y; Y10; Y10S; Y10S428/00; Y10S428/913; Y10T; Y10T156/00; Y10T156/10; Y10T156/1052; Y10T156/1059; Y10T156/19; Y10T156/1928; Y10T156/1933; Y10T156/1939; Y10T225/00; Y10T225/10; Y10T225/30; Y10T225/304
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
149 words
A method of separating two workpieces adhesively bonded together with a layer of adhesive which is embrittled at a temperature below zero degrees centigrade, one of the workpieces and the adhesive having a coefficient of expansion substantially greater then the other of said workpieces comprising the steps of; fixedly holding the workpiece with the higher coefficient of expansion, applying a coolant only to the side of the workpiece having the smaller coefficient of expansion opposite the adhesive layer, maintaining the coolant in contact with the workpiece having the smaller coefficient of expansion for a period of time sufficient to cool the adhesive layer to below its embrittlement temperature and to shear the adhesive layer at its interface with the workpiece having the smaller coefficient of expansion, and applying a separating force to the workpieces to separate the workpieces at the interface at which the embrittled adhesive layer is sheared.
Claim 2
Independent Claim
149 words
A method of separating two workpieces adhesively bonded together with a layer of adhesive which is embrittled at a temperature below zero degrees centigrade, one of the workpieces and the adhesive having a coefficient of expansion substantially greater then the other of said workpieces comprising the steps of; fixedly holding the workpiece with the higher coefficient of expansion, applying a coolant only to the side of the workpiece having the smaller coefficient of expansion opposite the adhesive layer, maintaining the coolant in contact with the workpiece having the smaller coefficient of expansion for a period of time sufficient to cool the adhesive layer to below its embrittlement temperature and to shear the adhesive layer at its interface with the workpiece having the smaller coefficient of expansion, and applying a separating force to the workpieces to separate the workpieces at the interface at which the embrittled adhesive layer is sheared.
Claim 3
Dependent Claim
17 words
The method of claim 1 wherein the coolant has a temperature between -70° C. and 120° C.
Claim 4
Dependent Claim
24 words
The method of claim 1 wherein one of said workpieces is comprised of glass and the other of said workpieces is comprised of aluminum.
Claim 5
Dependent Claim
11 words
The method of claim 3 wherein the adhesive comprises an acrylic.
Claim 6
Dependent Claim
11 words
The method of claim 4 wherein said coolant comprises liquid nitrogen.
Claim 7
Dependent Claim
15 words
The method of claim 4 wherein said coolant comprises a gas cooled by liquid nitrogen.
Claim 8
Dependent Claim
34 words
The method of claim 1 wherein there is further provided the step of; applying an external shearing force to the workpiece having the smaller coefficient of expansion and parallel to the embrittled adhesive layer.
Claim 9
Dependent Claim
89 words
A tool for separating two workpieces bonded together by a layer of adhesive comprising means for holding in a fixed position a first one of said workpieces, means for applying a coolant fluid only to the side of the second of said workpieces opposite to said first workpiece for a period of time to embrittle and shear the adhesive layer bonding together said workpieces, and means for applying a force to said second workpiece normal to said adhesive layer to separate said workpieces when said adhesive layer is embrittled.
Claim 10
Dependent Claim
89 words
A tool for separating two workpieces bonded together by a layer of adhesive comprising means for holding in a fixed position a first one of said workpieces, means for applying a coolant fluid only to the side of the second of said workpieces opposite to said first workpiece for a period of time to embrittle and shear the adhesive layer bonding together said workpieces, and means for applying a force to said second workpiece normal to said adhesive layer to separate said workpieces when said adhesive layer is embrittled.
Claim 11
Dependent Claim
29 words
The tool of claim 8 wherein there is further provided means for applying a shearing force to said second workpiece parallel to the said adhesive layer between the workpieces.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-03-09 | 1984-09-08 | 1985-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-03-09 | 1988-09-08 | 1989-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-03-09 | 1992-09-08 | 1993-03-10 | $7700.00 | Window Closed / Lapsed |