US4243740A
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Light sensitive compositions of polymethyl isopropenyl ketone
Assignee: Tokyo Ohka Kogyo Co Ltd
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Filing: 1979-03-16
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Granted: 1981-01-06
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Expires: 1999-03-16
Abstract
Abstract A sensitive composition comprising polymethyl isopropenyl ketone of limited molecular weight and a compound of a given general formula. The formation of a pattern of less than 1 μm is made possible by employing ultraviolet rays of wave lengths of 100-350 nm in place of those of 350-450 nm utilized in conventional processes. The sensitive composition is highly sensitive to ultraviolet rays in said wave range and reproduces a fine pattern precisely.
Inventors
- 👤 Minoru Tsuda
- 👤 Yoichi Nakamura
- 👤 Hideo Nagata
- 👤 Hisashi Nakane
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 13:59
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/118; Y10S430/119; Y10S522/00; Y10S522/913
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
118 words
A light sensitive composition consisting essentially of (1) polymethyl isopropenyl ketone of a molecular weight of about 10,000-about 1,000,000 and (2) from 0.1 to 50 parts by weight per 100 parts by weight of the polymethyl isopropenyl ketone of a compound having the general formula: ##STR10## wherein X 1 , X 2 and X 3 independently represent hydrogen atom, an alkyl group, hydroxyl group, an alkoxyl group or a halogen atom, Y represents hydrogen atom or a group having the formula --COOR, R being hydrogen atom or an alkyl group; Q represents hydrogen atom, an alkyl group or a lower hydrocarbon chain which may be substituted with hydroxyl group and n represents an integer of at least 1.
Claim 2
Dependent Claim
118 words
A light sensitive composition consisting essentially of (1) polymethyl isopropenyl ketone of a molecular weight of about 10,000-about 1,000,000 and (2) from 0.1 to 50 parts by weight per 100 parts by weight of the polymethyl isopropenyl ketone of a compound having the general formula: ##STR10## wherein X 1 , X 2 and X 3 independently represent hydrogen atom, an alkyl group, hydroxyl group, an alkoxyl group or a halogen atom, Y represents hydrogen atom or a group having the formula --COOR, R being hydrogen atom or an alkyl group; Q represents hydrogen atom, an alkyl group or a lower hydrocarbon chain which may be substituted with hydroxyl group and n represents an integer of at least 1.
Claim 3
Dependent Claim
39 words
A light sensitive composition according to claim (1) wherein X 1 in general formula (I) represents hydrogen atom or an alkyl group, X 2 , X 3 , Y and Q each represent hydrogen atom and n represents 1.
Claim 4
Dependent Claim
23 words
A light sensitive composition according to claim (2) wherein X 1 in general formula (I) represents an alkyl group of 1-8 carbon atoms.
Claim 5
Dependent Claim
46 words
A light sensitive composition according to claim (1) wherein X 1 in general formula (I) represents hydroxyl group, X 2 and X 3 independently represent hydrogen atom or hydroxyl group, Q represents hydrogen atom or an alkyl group, Y represents hydrogen atom and n represents 1.
Claim 6
Dependent Claim
22 words
A light sensitive composition according to claim (4) wherein Q in general formula (I) represents an alkyl group of 1-5 carbon atoms.
Claim 7
Dependent Claim
41 words
A light sensitive composition according to claim (1) wherein X 1 in general formula (I) represents an alkoxyl group, X 2 represents hydrogen atom or an alkoxyl group, X 3 , Y and Q represent hydrogen atom, and n represents 1.
Claim 8
Dependent Claim
37 words
A light sensitive composition according to claim 6 wherein X 1 in general formula (I) represents an alkoxyl group of 1-5 carbon atoms and X 2 represents hydrogen atom or an alkoxyl group of 1-5 carbon atoms.
Claim 9
Dependent Claim
42 words
A light sensitive composition according to claim (1) wherein X 1 in general formula (I) represents a halogen atom, X 2 represents hydrogen atom or a halogen atom, X 3 , Y and Q each represent hydrogen atom and n represents 1.
Claim 10
Dependent Claim
21 words
A light sensitive composition according to claim (8) wherein X 1 in general formula (I) represents chlorine atom or bromine atom.
Claim 11
Dependent Claim
21 words
A light sensitive composition according to claim (9) wherein X 2 in general formula (I) represents chlorine atom or bromine atom.
Claim 12
Dependent Claim
43 words
A light sensitive composition according to claim (1) wherein X 1 , X 2 and X 3 in general formula (I) each represent hydrogen atom, Y represents --COOR, Q and R independently represent hydrogen atom or an alkyl group and n represents 1.
Claim 13
Dependent Claim
38 words
A light sensitive composition according to claim (11) wherein X 1 , X 2 and X 3 each represent hydrogen atom, Y represents --COOR group and R and Q independently represent an alkyl group of 1-8 carbon atoms.
Claim 14
Dependent Claim
30 words
A light sensitive composition according to claim (1) wherin X 1 in general formula (I) represents an alkyl group, and X 2 , X 3 and Y represents hydrogen atom.
Claim 15
Dependent Claim
23 words
A light sensitive composition according to claim (13) wherein X 1 in general formula (I) represents an alkyl group of 1-8 carbon atoms.
Claim 16
Dependent Claim
22 words
A light sensitive composition according to claim (14) wherein Q in general formula (I) represents an alkyl group of 1-12 carbon atoms.
Claim 17
Dependent Claim
36 words
A light sensitive composition according to claim (14) wherein Q in general formula (I) represents a hydrocarbon chain of 2-5 carbon atoms which may be substituted with hydroxyl group and n represents an integer of 2-4.
Claim 18
Dependent Claim
31 words
A light sensitive composition according to claim (1) wherein X 1 and X 2 in general formula (I) independently represent an alkoxyl group, and X 3 and Y represent hydrogen atom.
Claim 19
Dependent Claim
27 words
A light sensitive composition according to claim (17) wherein X 1 and X 2 in general formula (I) independently represent an alkoxyl group of 1-5 carbon atoms.
Claim 20
Dependent Claim
22 words
A light sensitive composition according to claim (18) wherein Q in general formula (I) represents an alkyl group of 1-12 carbon atoms.
Claim 21
Dependent Claim
36 words
A light sensitive composition according to claim (18) wherein Q in general formula (I) represents a hydrocarbon chain of 2-5 carbon atoms which may be substituted with hydroxyl group, and n represents an integer of 2-4.
Claim 22
Dependent Claim
159 words
A composition according to claim (1) wherein the compound of general formula (I) is selected from the group consisting of benzoic acid, o-methylbenzoic acid, m-methylbenzoic acid, p-methylbenzoic acid, p-isopropylbenzoic acid, p-n-butylbenzoic acid, p-tert.-butylbenzoic acid, p-n-amylbenzoic acid, p-n-octylbenzoic acid, p-hydroxybenzoic acid, methyl p-hydroxybenzoate, dodecyl p-hydroxybenzoate, 2,4-dihydroxybenzoic acid, 3,4-dihydroxybenzoic acid, 3,4-dihydroxybenzoic acid, ethyl gallate, propyl gallate, isoamyl gallate, o-methoxybenzoic acid, p-methoxybenzoic acid, 3,4-dimethoxybenzoic acid, p-ethoxybenzoic acid, p-n-amyloxybenzoic acid, p-chlorobenzoic acid, 2,4-dichlorobenzoic acid, 3,4-dichlorobenzoic acid, p-bromobenzoic acid, terephthalic acid, dimethyl terephthalate, dodecyl p-tert.-butylbenzoate, ethylene glycol diester of p-tert.-butylbenzoic acid, propylene glycol diester of the same acid, 1,4-butanediol diester of the same acid, glycerol diester and triester of the same acid, pentaerythritol diester, triester and tetraester of the same acid, dodecyl ester of 3,4-dimethoxybenzoic acid, ethylene glycol diester of the same acid, propylene glycol diester of the same acid, 1,4-butanediol diester of the same acid, glycerol diester and triester of the same acid, and pentaerythritol diester, triester and tetraester of the same acid.
Claim 23
Dependent Claim
30 words
A light sensitive composition according to any of claims 1 to 21 wherein the amount of the compound of general formula (I) is from 1 to 25 parts by weight.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-01-06 | 1984-07-07 | 1985-01-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-01-06 | 1988-07-07 | 1989-01-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-01-06 | 1992-07-07 | 1993-01-06 | $7700.00 | Window Closed / Lapsed |