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US4243740A Expired / Lapsed US ⏱️ 0.0 years remaining

Light sensitive compositions of polymethyl isopropenyl ketone

Assignee: Tokyo Ohka Kogyo Co Ltd
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Filing: 1979-03-16
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Granted: 1981-01-06
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Expires: 1999-03-16
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Abstract

Abstract A sensitive composition comprising polymethyl isopropenyl ketone of limited molecular weight and a compound of a given general formula. The formation of a pattern of less than 1 μm is made possible by employing ultraviolet rays of wave lengths of 100-350 nm in place of those of 350-450 nm utilized in conventional processes. The sensitive composition is highly sensitive to ultraviolet rays in said wave range and reproduces a fine pattern precisely.

Inventors

  • 👤 Minoru Tsuda
  • 👤 Yoichi Nakamura
  • 👤 Hideo Nagata
  • 👤 Hisashi Nakane

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 13:59
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/118; Y10S430/119; Y10S522/00; Y10S522/913

Claims Analysis

Total Claims: 23
Claim 1
Independent Claim 118 words
A light sensitive composition consisting essentially of (1) polymethyl isopropenyl ketone of a molecular weight of about 10,000-about 1,000,000 and (2) from 0.1 to 50 parts by weight per 100 parts by weight of the polymethyl isopropenyl ketone of a compound having the general formula: ##STR10## wherein X 1 , X 2 and X 3 independently represent hydrogen atom, an alkyl group, hydroxyl group, an alkoxyl group or a halogen atom, Y represents hydrogen atom or a group having the formula --COOR, R being hydrogen atom or an alkyl group; Q represents hydrogen atom, an alkyl group or a lower hydrocarbon chain which may be substituted with hydroxyl group and n represents an integer of at least 1.
Claim 2
Dependent Claim 118 words
A light sensitive composition consisting essentially of (1) polymethyl isopropenyl ketone of a molecular weight of about 10,000-about 1,000,000 and (2) from 0.1 to 50 parts by weight per 100 parts by weight of the polymethyl isopropenyl ketone of a compound having the general formula: ##STR10## wherein X 1 , X 2 and X 3 independently represent hydrogen atom, an alkyl group, hydroxyl group, an alkoxyl group or a halogen atom, Y represents hydrogen atom or a group having the formula --COOR, R being hydrogen atom or an alkyl group; Q represents hydrogen atom, an alkyl group or a lower hydrocarbon chain which may be substituted with hydroxyl group and n represents an integer of at least 1.
Claim 3
Dependent Claim 39 words
A light sensitive composition according to claim (1) wherein X 1 in general formula (I) represents hydrogen atom or an alkyl group, X 2 , X 3 , Y and Q each represent hydrogen atom and n represents 1.
Claim 4
Dependent Claim 23 words
A light sensitive composition according to claim (2) wherein X 1 in general formula (I) represents an alkyl group of 1-8 carbon atoms.
Claim 5
Dependent Claim 46 words
A light sensitive composition according to claim (1) wherein X 1 in general formula (I) represents hydroxyl group, X 2 and X 3 independently represent hydrogen atom or hydroxyl group, Q represents hydrogen atom or an alkyl group, Y represents hydrogen atom and n represents 1.
Claim 6
Dependent Claim 22 words
A light sensitive composition according to claim (4) wherein Q in general formula (I) represents an alkyl group of 1-5 carbon atoms.
Claim 7
Dependent Claim 41 words
A light sensitive composition according to claim (1) wherein X 1 in general formula (I) represents an alkoxyl group, X 2 represents hydrogen atom or an alkoxyl group, X 3 , Y and Q represent hydrogen atom, and n represents 1.
Claim 8
Dependent Claim 37 words
A light sensitive composition according to claim 6 wherein X 1 in general formula (I) represents an alkoxyl group of 1-5 carbon atoms and X 2 represents hydrogen atom or an alkoxyl group of 1-5 carbon atoms.
Claim 9
Dependent Claim 42 words
A light sensitive composition according to claim (1) wherein X 1 in general formula (I) represents a halogen atom, X 2 represents hydrogen atom or a halogen atom, X 3 , Y and Q each represent hydrogen atom and n represents 1.
Claim 10
Dependent Claim 21 words
A light sensitive composition according to claim (8) wherein X 1 in general formula (I) represents chlorine atom or bromine atom.
Claim 11
Dependent Claim 21 words
A light sensitive composition according to claim (9) wherein X 2 in general formula (I) represents chlorine atom or bromine atom.
Claim 12
Dependent Claim 43 words
A light sensitive composition according to claim (1) wherein X 1 , X 2 and X 3 in general formula (I) each represent hydrogen atom, Y represents --COOR, Q and R independently represent hydrogen atom or an alkyl group and n represents 1.
Claim 13
Dependent Claim 38 words
A light sensitive composition according to claim (11) wherein X 1 , X 2 and X 3 each represent hydrogen atom, Y represents --COOR group and R and Q independently represent an alkyl group of 1-8 carbon atoms.
Claim 14
Dependent Claim 30 words
A light sensitive composition according to claim (1) wherin X 1 in general formula (I) represents an alkyl group, and X 2 , X 3 and Y represents hydrogen atom.
Claim 15
Dependent Claim 23 words
A light sensitive composition according to claim (13) wherein X 1 in general formula (I) represents an alkyl group of 1-8 carbon atoms.
Claim 16
Dependent Claim 22 words
A light sensitive composition according to claim (14) wherein Q in general formula (I) represents an alkyl group of 1-12 carbon atoms.
Claim 17
Dependent Claim 36 words
A light sensitive composition according to claim (14) wherein Q in general formula (I) represents a hydrocarbon chain of 2-5 carbon atoms which may be substituted with hydroxyl group and n represents an integer of 2-4.
Claim 18
Dependent Claim 31 words
A light sensitive composition according to claim (1) wherein X 1 and X 2 in general formula (I) independently represent an alkoxyl group, and X 3 and Y represent hydrogen atom.
Claim 19
Dependent Claim 27 words
A light sensitive composition according to claim (17) wherein X 1 and X 2 in general formula (I) independently represent an alkoxyl group of 1-5 carbon atoms.
Claim 20
Dependent Claim 22 words
A light sensitive composition according to claim (18) wherein Q in general formula (I) represents an alkyl group of 1-12 carbon atoms.
Claim 21
Dependent Claim 36 words
A light sensitive composition according to claim (18) wherein Q in general formula (I) represents a hydrocarbon chain of 2-5 carbon atoms which may be substituted with hydroxyl group, and n represents an integer of 2-4.
Claim 22
Dependent Claim 159 words
A composition according to claim (1) wherein the compound of general formula (I) is selected from the group consisting of benzoic acid, o-methylbenzoic acid, m-methylbenzoic acid, p-methylbenzoic acid, p-isopropylbenzoic acid, p-n-butylbenzoic acid, p-tert.-butylbenzoic acid, p-n-amylbenzoic acid, p-n-octylbenzoic acid, p-hydroxybenzoic acid, methyl p-hydroxybenzoate, dodecyl p-hydroxybenzoate, 2,4-dihydroxybenzoic acid, 3,4-dihydroxybenzoic acid, 3,4-dihydroxybenzoic acid, ethyl gallate, propyl gallate, isoamyl gallate, o-methoxybenzoic acid, p-methoxybenzoic acid, 3,4-dimethoxybenzoic acid, p-ethoxybenzoic acid, p-n-amyloxybenzoic acid, p-chlorobenzoic acid, 2,4-dichlorobenzoic acid, 3,4-dichlorobenzoic acid, p-bromobenzoic acid, terephthalic acid, dimethyl terephthalate, dodecyl p-tert.-butylbenzoate, ethylene glycol diester of p-tert.-butylbenzoic acid, propylene glycol diester of the same acid, 1,4-butanediol diester of the same acid, glycerol diester and triester of the same acid, pentaerythritol diester, triester and tetraester of the same acid, dodecyl ester of 3,4-dimethoxybenzoic acid, ethylene glycol diester of the same acid, propylene glycol diester of the same acid, 1,4-butanediol diester of the same acid, glycerol diester and triester of the same acid, and pentaerythritol diester, triester and tetraester of the same acid.
Claim 23
Dependent Claim 30 words
A light sensitive composition according to any of claims 1 to 21 wherein the amount of the compound of general formula (I) is from 1 to 25 parts by weight.

References Cited (Backward Citations)

US3444208A Cited
US4008138A Cited
US3860538A Cited
US4012536A Cited
US3915269A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1984-01-06 1984-07-07 1985-01-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1988-01-06 1988-07-07 1989-01-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1992-01-06 1992-07-07 1993-01-06 $7700.00 Window Closed / Lapsed

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