US4241259A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Scanning electron microscope
Assignee: Advantest Corp
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Filing: 1979-04-16
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Granted: 1980-12-23
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Expires: 1999-04-16
Abstract
Abstract A scanning electron microscope with an electron optical column and a sample chamber for a test sample disposed therein in a vacuum, in which the sample holder forms, directly or indirectly, an hermetic seal for the sample chamber. The electron-optical column is preferably suspended underneath the sample chamber, and the sample holder or its base form a cover for the sample chamber permitting simple and troublefree contact with the sample. Use of the electron microscope for the testing of integrated circuits is disclosed.
Inventors
- 👤 Hans P. Feuerbaum
- 👤 Johann Otto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:21
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/02; H01J37/18
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
63 words
In a scanning electron microscope with electron-optical column for the contactless testing of a sample disposed in a sample chamber in a vacuum on a sample holder, said sample holder being one which forms, directly or indirectly, a vacuum tight closure for the sample chamber, the improvement comprising a thrust ball bearing disposed between the closure and the housing of the sample chamber.
Claim 2
Dependent Claim
63 words
In a scanning electron microscope with electron-optical column for the contactless testing of a sample disposed in a sample chamber in a vacuum on a sample holder, said sample holder being one which forms, directly or indirectly, a vacuum tight closure for the sample chamber, the improvement comprising a thrust ball bearing disposed between the closure and the housing of the sample chamber.
Claim 3
Dependent Claim
54 words
The improvement according to claim 1 for the functional testing of integrated circuits, and further including a circuit board for accepting an integrated circuit disposed on a reinforcement to which the sample holder is fastened and which is movably mounted on the housing of the sample chamber and connected vacuum tight to the housing.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-12-23 | 1984-06-23 | 1984-12-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-12-23 | 1988-06-23 | 1988-12-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-12-23 | 1992-06-23 | 1992-12-23 | $7700.00 | Window Closed / Lapsed |