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US4241167A Expired / Lapsed US ⏱️ 0.0 years remaining

Electrolytic blocking contact to InP

Assignee: United States Department of the Navy
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Filing: 1979-05-25
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Granted: 1980-12-23
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Expires: 1999-05-25
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Abstract

Abstract A liquid barrier contact to InP made of 40% tartatic acid and 30% hydrogen peroxide in a 3:1 ratio by volume is used for capacitance-voltage carrier profiling to large voltages (>10 V) on relatively heavily doped material (>10 17 CM -3 ) and at room temperature.

Inventors

  • 👤 David A. Collins
  • 👤 Derek L. Lile

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-30 22:13
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/2607; G01R31/2632; H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/6729; H10D30/6737; H10D30/6738; H10D30/674; H10D30/675; H10D62/00; H10D62/80; H10D62/85; H10D64/00; H10D64/60; H10D64/64; Y; Y10; Y10S; Y10S204/00; Y10S204/06

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 35 words
A liquid barrier contact on InP comprising: approximately 40% aqueous solution of tartaric acid; approximately 30% aqueous peroxide; said tartaric acid and said hydrogen peroxide being combined in an approximate 3:1 ratio, respectively, by volume.
Claim 2
Dependent Claim 35 words
A liquid barrier contact on InP comprising: approximately 40% aqueous solution of tartaric acid; approximately 30% aqueous peroxide; said tartaric acid and said hydrogen peroxide being combined in an approximate 3:1 ratio, respectively, by volume.
Claim 3
Dependent Claim 25 words
A liquid barrier contact on InP comprising: 40% aqueous solution of tartaric acid and 30% aqueous hydrogen peroxide mixed in a 3:1, respectively, by volume.
Claim 4
Dependent Claim 25 words
A liquid barrier contact on InP comprising: 40% aqueous solution of tartaric acid and 30% aqueous hydrogen peroxide mixed in a 3:1, respectively, by volume.
Claim 5
Dependent Claim 106 words
In a method of measuring the carrier concentration profile of a semiconducting InP speciman wherein the profile is obtained from measurements of electronic parameters of capacitance and voltage taken across a Schottky diode formed by depositing a rectifying contact upon the semiconducting InP specimen, the improvement comprising the steps of: coating the InP specimen with photoresist; forming an aperture in the photoresist to expose an area of InP; slightly etching said exposed area; depositing a liquid on said exposed area comprising approximately 40% aqueous solution of tartaric acid mixed with an approximately 30% aqueous solution of hydrogen peroxide in an approximate 3:1 ratio, respectively, by volume.
Claim 6
Dependent Claim 106 words
In a method of measuring the carrier concentration profile of a semiconducting InP speciman wherein the profile is obtained from measurements of electronic parameters of capacitance and voltage taken across a Schottky diode formed by depositing a rectifying contact upon the semiconducting InP specimen, the improvement comprising the steps of: coating the InP specimen with photoresist; forming an aperture in the photoresist to expose an area of InP; slightly etching said exposed area; depositing a liquid on said exposed area comprising approximately 40% aqueous solution of tartaric acid mixed with an approximately 30% aqueous solution of hydrogen peroxide in an approximate 3:1 ratio, respectively, by volume.
Claim 7
Dependent Claim 102 words
In a method of measuring the carrier concentration profile of a semiconducting InP specimen wherein the profile is obtained from measurements of electronic parameters of capacitance and voltage taken across a Schottky diode formed by depositing a rectifying contact upon the semiconducting InP specimen, the improvement comprising the steps of: coating the InP specimen with photoresist; forming an aperture in the photoresist to expose an area of InP; slightly etching said exposed area; depositing a liquid on said exposed area comprising 40% aqueous solution of tartaric acid mixed with 30% aqueous solution of hydrogen peroxide in a 3:1 ratio, respectively, by volume.
Claim 8
Dependent Claim 102 words
In a method of measuring the carrier concentration profile of a semiconducting InP specimen wherein the profile is obtained from measurements of electronic parameters of capacitance and voltage taken across a Schottky diode formed by depositing a rectifying contact upon the semiconducting InP specimen, the improvement comprising the steps of: coating the InP specimen with photoresist; forming an aperture in the photoresist to expose an area of InP; slightly etching said exposed area; depositing a liquid on said exposed area comprising 40% aqueous solution of tartaric acid mixed with 30% aqueous solution of hydrogen peroxide in a 3:1 ratio, respectively, by volume.

References Cited (Backward Citations)

US2623102A Cited
US2627545A Cited
GB999679A Cited
US3701930A Cited
US3858304A Cited
US3977015A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-12-23 1984-06-23 1984-12-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-12-23 1988-06-23 1988-12-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-12-23 1992-06-23 1992-12-23 $7700.00 Window Closed / Lapsed

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