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Semiconductor photoelectric conversion device

Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1979-07-16
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Granted: 1980-12-16
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Expires: 1999-07-16
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Abstract

Abstract A semiconductor photoelectric conversion device employing a semiconductor layer which has at least one inter-semiconductor heterojunction. The semiconductor layer is composed of at least a first non-single-crystal semiconductor region having a first energy gap, a second non-single-crystal semiconductor region having a second energy gap different from the first energy gap and a third non-single-crystal semiconductor region serving as the heterojunction formed to extend between the first and second semiconductor regions and having an energy gap continuously changing from the first energy gap on the side of the first semiconductor region to the second energy gap on the side of the second semiconductor region. The semiconductor layer is doped with a recombination center neutralizer and a conductive material. The non-single-crystal semiconductor layer doped with the conductive material is formed on a substrate by a low pressure chemical vapor deposition or glow discharge method. Then, the non-single-crystal semiconductor layer is exposed to a hydrogen gas or a mixture thereof with a small amount of halogen so that the non-single-crystal semiconductor layer is doped with hydrogen or halogen as a recombination center neutralizer, whereby to obtain the semiconductor photoelectric conversion device.

Inventors

  • 👤 Shunpei Yamazaki

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 06:11
CPC Classifications
H; H10; H10F; H10F10/00; H10F10/10; H10F10/14; H10F10/142; H10F10/17; H10F10/172; H10F77/00; H10F77/10; H10F77/16; H10F77/169; Y; Y02; Y02E; Y02E10/00; Y02E10/50; Y02E10/544; Y02E10/548

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 119 words
A semiconductor photoelectric conversion device employing a semiconductor layer having at least one inter-semiconductor heterojunction, which comprises at least a first non-single-crystal semiconductor region having a first energy gap, a second non-single-crystal semiconductor region having a second energy gap different from the first energy gap, and a third non-single-crystal semiconductor region defined between the first and second semiconductor regions to serve as a heterojunction, and wherein the third semiconductor region has an energy gap which successively changes from the first energy gap on the side of the first semiconductor region to the second energy gap on the side of the second semiconductor region, and wherein the semiconductor layer has doped therein a recombination center neutralizer and a conductive material.
Claim 2
Dependent Claim 119 words
A semiconductor photoelectric conversion device employing a semiconductor layer having at least one inter-semiconductor heterojunction, which comprises at least a first non-single-crystal semiconductor region having a first energy gap, a second non-single-crystal semiconductor region having a second energy gap different from the first energy gap, and a third non-single-crystal semiconductor region defined between the first and second semiconductor regions to serve as a heterojunction, and wherein the third semiconductor region has an energy gap which successively changes from the first energy gap on the side of the first semiconductor region to the second energy gap on the side of the second semiconductor region, and wherein the semiconductor layer has doped therein a recombination center neutralizer and a conductive material.
Claim 3
Dependent Claim 23 words
A semiconductor photoelectric conversion device according to claim 1, wherein the recombination center neutralizer is hydrogen or halogen or a combination of them.
Claim 4
Dependent Claim 26 words
A semiconductor photoelectric conversion device according to claim 1, wherein the conductive material is one or more of antimony, tellurium, tin, lead, indium, aluminum and gallium.
Claim 5
Dependent Claim 45 words
A semiconductor photoelectric conversion device according to claim 1, wherein each of the first, second and third semiconductor regions is formed of a material selected from a group consisting of silicon, germanium, silicon carbides, germanium carbides, silicon nitrides, germanium nitrides, silicon oxides and germanium oxides.
Claim 6
Dependent Claim 82 words
A semiconductor photoelectric conversion device according to claim 1, wherein the first semiconductor region is formed of Si x C 1-x where 0.5<x<1, wherein the second semiconductor region is formed of Si, and wherein the third semiconductor region is formed of Si y C 1-y where the value of y is larger than the value of x and changes from the value of x on the side of the first semiconductor region to 1 on the side of the second semiconductor region.
Claim 7
Dependent Claim 82 words
A semiconductor photoelectric conversion device according to claim 1, wherein the first semiconductor region is formed of Si 3 N 4-x where 0<x<4, wherein the second semiconductor region is formed of Si, and wherein the third semiconductor region is formed of Si 3 N 4-y where the value of y is larger than the value of x and changes from the value of x on the side of the first semiconductor region to 1 on the side of the second semiconductor region.
Claim 8
Dependent Claim 78 words
A semiconductor photoelectric conversion device according to claim 1, wherein the first semiconductor region is formed of SiO 2-x where 0<x<2, wherein the second semiconductor region is formed of Si, and wherein the third semiconductor region is formed of SiO 2-y where the value of y is larger than the value of x and changes from the value of x on the side of the first semiconductor region to 1 on the side of the second semiconductor region.

References Cited (Backward Citations)

US3015762A Cited
US4109271A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-12-16 1984-06-16 1984-12-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-12-16 1988-06-16 1988-12-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-12-16 1992-06-16 1992-12-16 $7700.00 Window Closed / Lapsed

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