Process and arrangement for the alignment of imaging systems

Claim 2

A process for the alignment of the image plane of an imaging system with a plane for the interception of the image, wherein at least one measuring mark is reproduced by at least two partial pupils of the imaging system comprising the steps of moving at least one of the partial pupils (18', 19'; 58, 59, 60, 61) over the full pupil of the imaging system (20) and selecting a minimum movement of the image depending on the alternating use of the partial pupils as the criterion of said alignment.

Claim 3

A process according to claim 1, wherein said moving step comprises displacing a diaphragm (18, 19) over the full pupil of the imaging system (20).

Claim 4

A process according to claim 1, wherein said moving step comprises deflecting the beam associated with said at least one partial pupil.

Claim 5

A process according to claim 1, wherein said moving step comprises alternately activating light fluxes with differential optical properties.

Claim 6

A process according to claim 1 wherein said moving step comprises moving both partial pupils opposingly with respect to each other over the full pupil of the imaging system.

Claim 7

A process according to claim 1 wherein said moving step is a continuous displacement of said at least one partial pupils.

Claim 8

A process according to claim 1 wherein said moving step is an abrupt displacement of said at least one partial pupils.

Claim 9

A process according to claim 1 wherein said moving step is an oscillatory moving.

Claim 10

Apparatus for the alignment of an image plane of an imaging system with a plane for the interception of the image, said apparatus comprising: (a) at least one measuring mark, (b) means for producing at least two distinguishable imaging beams, said imaging beams reproducing said at least one measuring mark by two partial pupils of the imaging system, (c) means for adjusting the relative position of the imaging system and the interception plane,

Claim 11

Apparatus for the alignment of an image plane of an imaging system with a plane for the interception of the image, said apparatus comprising: (a) at least one measuring mark, (b) means for producing at least two distinguishable imaging beams, said imaging beams reproducing said at least one measuring mark by two partial pupils of the imaging system, (c) means for adjusting the relative position of the imaging system and the interception plane,

Claim 12

(d) said beam producing means comprising at least two diaphragm apertures, and (e) means for displacing at least one of said diaphragm apertures over the full pupil of the imaging system.

Claim 13

(d) said beam producing means comprising at least two diaphragm apertures, and (e) means for displacing at least one of said diaphragm apertures over the full pupil of the imaging system.

Claim 14

Apparatus as recited in claim 9 further comprising filter means associated with each of said diaphragm apertures.

Claim 15

Apparatus as recited in claim 10 further comprising: a light source, a condenser positioned along an optical axis of said apparatus, collimator means positioned along said optical axis for illuminating the full pupil of the imaging system to be aligned, and said measuring mark positioned in a focal plane of said collimator means.

Claim 16

Apparatus as recited in claim 11 wherein said filter means comprises color filters.

Claim 17

Apparatus as recited in claim 11 wherein said filter means comprises polarizing filters.

Claim 18

Apparatus as recited in claim 9 further comprising a prism associated with each of said diaphragm apertures, said prism deflecting the imaging beams in opposite directions.

Claim 19

Apparatus as recited in claim 14 wherein said prisms have refracting edges and said means for displacing comprises means for displacing said diaphragm apertures in the direction of the refracting edge of said prisms.

Claim 20

Apparatus as recited in claim 10 or 14 wherein said at least two diaphragm apertures are each displaceable in a direction parallel to one another and said apparatus further comprises a common drive means for displacing said diaphragm apertures.

Claim 21

Apparatus as recited in claim 10 or 14 wherein said at least two diaphragm apertures are each displaceable and said apparatus further comprises a carrier mounted for rotation around an optical axis of said apparatus, said diaphragm apertures mounted on said carrier in diametrically opposing positions with respect to one another whereby said partial pupils may be moved rapidly into positions associated with different zones of the full pupil of the imaging system.

Claim 22

Apparatus for the alignment of an image plane of an imaging system with a plane for the interception of the image, said apparatus comprising: (a) at least one measuring mark, (b) means for producing at least two distinguishable imaging beams, said imaging beams reproducing said at least one measuring mark by two partial pupils of the imaging system, (c) means for adjusting the relative position of the imaging system and the interception plane, (d) said beam producing means comprising a diaphragm aperture located centrally along an optical axis of said apparatus and prism means having refracting edges for oppositely deflecting said imaging beams, said prism means positioned on one side of said diaphragm aperture away from said interception plane, and (e) two plane parallel plates positioned on the other side of said diaphragm aperture, said plates having surfaces parallel to said refracting edges of said prism means, at least one of said plates mounted for rotation about an axis perpendicular to said refracting edge of said prism means for displacing at least one partial pupil over the full pupil of the imaging system.

Claim 23

Apparatus for the alignment of an image plane of an imaging system with a plane for the interception of the image, said apparatus comprising: (a) at least one measuring mark, (b) means for producing at least two distinguishable imaging beams, said imaging beams reproducing said at least one measuring mark by two partial pupils of the imaging system, (c) means for adjusting the relative position of the imaging system and the interception plane, (d) said beam producing means comprising a diaphragm aperture located centrally along an optical axis of said apparatus and prism means having refracting edges for oppositely deflecting said imaging beams, said prism means positioned on one side of said diaphragm aperture away from said interception plane, and (e) two plane parallel plates positioned on the other side of said diaphragm aperture, said plates having surfaces parallel to said refracting edges of said prism means, at least one of said plates mounted for rotation about an axis perpendicular to said refracting edge of said prism means for displacing at least one partial pupil over the full pupil of the imaging system.

Claim 24

Apparatus as recited in claim 18 wherein both of said plates are rotatably mounted about an axis perpendicular to said refracting edge of said prism means.

Claim 25

Apparatus as recited in claim 19 wherein both of said plates are rotatably mounted about a common axis of rotation, said common rotation axis intersecting said optical axis.

Claim 26

Apparatus as recited in claim 20 further comprising: a light source, a condenser positioned along an optical axis of said apparatus, collimator means positioned along said optical axis for illuminating the full pupil of the imaging system to be aligned, and said measuring mark positioned in a focal plane of said collimator means.

Claim 27

Apparatus as recited in claim 21 wherein said imaging system comprises a plurality of lenses.

Claim 28

Apparatus as recited in claim 22 further comprising means for varying the refracting power of said plurality of lenses.

Claim 29

Apparatus as recited in claim 18 or 23 wherein said diaphragm aperture is formed by halves of circular lunes.

Claim 30

Apparatus as recited in claim 9 wherein said beam producing means further comprises means for alternately producing two distinguishable light fluxes.