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Transducer and method of making the same

Assignee: International Standard Electric Corp
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Filing: 1979-05-29
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Granted: 1980-10-28
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Expires: 1999-05-29
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Abstract

Abstract A silicon transducer including a silicon frame with one or more lands extending from a diaphragm or the like. The lands are interconnected by two thin strips formed integrally with the lands. The strips are essentially the transducer. The transducer is constructed by etching a boron doped wafer with a mixture of catechol, ethylene diamine and water.

Inventors

  • 👤 John C. Greenwood

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 20:18
CPC Classifications
H; H10; H10D; H10D48/00; H10D48/50; G; G01; G01L; G01L9/00; G01L9/0001; G01L9/0008; G01L9/0019; G01L9/0041; G01L9/0042; Y; Y10; Y10S; Y10S438/00; Y10S438/928

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 105 words
A pressure transducer comprising: a flexible diaphragm supported in a frame of the same material as the diaphragm; first and second lands extending from one surface of said diaphragm; a plurality of filaments stretched and fixed between said lands; and means to vibrate said filaments at their respective resonant frequencies as determined by the configuration of said diaphragm, movement of said diaphragm producing movements of said lands toward and away from each other, said movements respectively causing stresses, strains and therefore lengthwise contractions and elongations of said filaments and thereby respective lowering and raising of the tensions in and the resonant frequencies of said filaments.
Claim 2
Dependent Claim 105 words
A pressure transducer comprising: a flexible diaphragm supported in a frame of the same material as the diaphragm; first and second lands extending from one surface of said diaphragm; a plurality of filaments stretched and fixed between said lands; and means to vibrate said filaments at their respective resonant frequencies as determined by the configuration of said diaphragm, movement of said diaphragm producing movements of said lands toward and away from each other, said movements respectively causing stresses, strains and therefore lengthwise contractions and elongations of said filaments and thereby respective lowering and raising of the tensions in and the resonant frequencies of said filaments.
Claim 3
Dependent Claim 13 words
A transducer as claimed in claim 1, in which said material is silicon.

References Cited (Backward Citations)

US3399572A Cited
US3672220A Cited
GB1483344A Cited
US4074576A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-10-28 1984-04-28 1984-10-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-10-28 1988-04-28 1988-10-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-10-28 1992-04-28 1992-10-28 $7700.00 Window Closed / Lapsed

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