US4229248A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for forming bonding pads on magnetic bubble devices
Assignee: Intel Corp
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Filing: 1979-04-06
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Granted: 1980-10-21
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Expires: 1999-04-06
Abstract
Abstract A process for thickening the relatively thin bonding pads of a single wall magnetic domain (bubble) device is disclosed. The process is particularly suited for thickening the pads defined by a buried metal layer, such as the conductive layer often disposed between the magnet garnet layer and permalloy layer. Windows are etched through a polyimide scratch protection layer to expose underlying bonding pads. A layer of gold is formed over this protective layer and over the exposed pads. The gold layer is washed away from the protective layer. Since the gold adheres only to the bonding pads, it remains to build up the thickness of these pads.
Inventors
- 👤 Peter J. Silverman
- 👤 Donald K. Rose
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:43
CPC Classifications
H; H01; H01F; H01F41/00; H01F41/32; H01F41/34
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
97 words
In a magnetic bubble device which includes a layer of magnetic material in which magnetic bubbles are moved and a metal layer covered except for an exposed region by an overlying protective layer, a process for increasing the thickness of said exposed region comprising the steps of: forming a layer of gold over said protective layer and over said exposed region; washing said layer of gold from said protective layer but not from said exposed region; whereby the thickness of said exposed region is augmented by a layer of gold without an additional masking and etching step.
Claim 2
Dependent Claim
97 words
In a magnetic bubble device which includes a layer of magnetic material in which magnetic bubbles are moved and a metal layer covered except for an exposed region by an overlying protective layer, a process for increasing the thickness of said exposed region comprising the steps of: forming a layer of gold over said protective layer and over said exposed region; washing said layer of gold from said protective layer but not from said exposed region; whereby the thickness of said exposed region is augmented by a layer of gold without an additional masking and etching step.
Claim 3
Dependent Claim
24 words
The process defined by claim 1 wherein said washing of said layer of gold comprises the washing of said layer of gold with water.
Claim 4
Dependent Claim
18 words
The process defined by claim 1 wherein said washing step comprises the spraying of said layer of gold.
Claim 5
Dependent Claim
20 words
The process defined by claim 1 wherein said washing step comprises subjecting said layer of gold to an ultrasonic bath.
Claim 6
Dependent Claim
105 words
In a magnetic bubble device which includes a first layer of material in which magnetic bubbles are moved and a second layer disposed above said first layer, said second layer defining bonding pads, a process for preparing said device for probe testing or bonding comprising the steps of: forming a protective layer over said second layer; etching said protective layer to expose said bonding pads underlying said protective layer; forming a gold layer on said protective layer and on said bonding pads; washing said gold layer from said protective layer; whereby gold remains on said bonding pads, thereby thickening them before probe testing or bonding.
Claim 7
Dependent Claim
105 words
In a magnetic bubble device which includes a first layer of material in which magnetic bubbles are moved and a second layer disposed above said first layer, said second layer defining bonding pads, a process for preparing said device for probe testing or bonding comprising the steps of: forming a protective layer over said second layer; etching said protective layer to expose said bonding pads underlying said protective layer; forming a gold layer on said protective layer and on said bonding pads; washing said gold layer from said protective layer; whereby gold remains on said bonding pads, thereby thickening them before probe testing or bonding.
Claim 8
Dependent Claim
17 words
The process defined by claim 5 wherein said washing step comprises the spraying of said gold layer.
Claim 9
Dependent Claim
19 words
The process defined by claim 5 wherein said washing step comprises subjecting said gold layer to an ultrasonic bath.
Claim 10
Dependent Claim
17 words
The process defined by claim 5 wherein said washing step comprises washing said gold layer with water.
Claim 11
Dependent Claim
24 words
The process defined by claim 5 wherein said forming of said protective layer comprises the forming of a polyimide layer over said second layer.
Claim 12
Dependent Claim
142 words
In a magnetic bubble device which includes a layer of material in which magnetic bubbles are moved, a first layer having first bonding pads covered by an insulative layer and a second layer disposed on said insulative layer having second bonding pads, a process for preparing said device for probe testing or bonding, comprising the steps of: forming a polyimide layer over said insulative layer, second layer and second bonding pads, thereby exposing said second bonding pads; etching said insulative layer in said region of said first bonding pads, thereby exposing said first bonding pads; forming a gold layer over said polyimide layer and said first and second bonding pads; washing away said gold layer from said polyimide layer; whereby said first and second bonding pads are thickened by said gold layer, thereby making them more suitable for probe testing or bonding.
Claim 13
Dependent Claim
142 words
In a magnetic bubble device which includes a layer of material in which magnetic bubbles are moved, a first layer having first bonding pads covered by an insulative layer and a second layer disposed on said insulative layer having second bonding pads, a process for preparing said device for probe testing or bonding, comprising the steps of: forming a polyimide layer over said insulative layer, second layer and second bonding pads, thereby exposing said second bonding pads; etching said insulative layer in said region of said first bonding pads, thereby exposing said first bonding pads; forming a gold layer over said polyimide layer and said first and second bonding pads; washing away said gold layer from said polyimide layer; whereby said first and second bonding pads are thickened by said gold layer, thereby making them more suitable for probe testing or bonding.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-10-21 | 1984-04-21 | 1984-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-10-21 | 1988-04-21 | 1988-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-10-21 | 1992-04-21 | 1992-10-21 | $7700.00 | Window Closed / Lapsed |