Patent US4222669A successfully refreshed from Google Patents.
US4222669A
Expired / Lapsed
US
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Interferometer for determining the shape of an object
Assignee: International Business Machines Corp
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Filing: 1977-11-21
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Granted: 1980-09-16
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Expires: 1997-11-21
Abstract
Abstract This invention relates to an interferometric process, and particularly to a process for examining the planarity of surfaces.
Inventors
- 👤 Albert Frosch
- 👤 Gerhard Holzinger
- 👤 Walter Jaerisch
- 👤 Claus Scheuing
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 06:27
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/30; G01B11/306
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
116 words
A method for analyzing the planarity of the surface of an object comprising: A. generating a light beam of monochromatic coherent light, B. splitting said light beam into a reference beam and an object beam and recombining the reflected reference and object beams into a view path, C. positioning an object in said object beam with the surface thereof normal to said object beam, D. vibrating said object to advance and recede said surface thereof in a direction normal to said surface, with the vibration being in a pattern wherein the receding of said surface is substantially instantaneous relative to a slow said advance thereof, and E. detecting the interference fringe changes in said view beam.
Claim 2
Independent Claim
116 words
A method for analyzing the planarity of the surface of an object comprising: A. generating a light beam of monochromatic coherent light, B. splitting said light beam into a reference beam and an object beam and recombining the reflected reference and object beams into a view path, C. positioning an object in said object beam with the surface thereof normal to said object beam, D. vibrating said object to advance and recede said surface thereof in a direction normal to said surface, with the vibration being in a pattern wherein the receding of said surface is substantially instantaneous relative to a slow said advance thereof, and E. detecting the interference fringe changes in said view beam.
Claim 3
Dependent Claim
18 words
The method of claim 1 wherein the amplitude of said vibration is one-half the wavelength of said light.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein said advance is effected within one-third second.
Claim 5
Dependent Claim
18 words
The method of claim 3 wherein the amplitude of said vibration is one-half the wavelength of said light.
Claim 6
Dependent Claim
18 words
The method of claim 1 wherein said advance is one-tenth as fast as the receding of said surface.
Claim 7
Dependent Claim
18 words
The method of claim 5 wherein the amplitude of said vibration is one-half the wavelength of said light.
Claim 8
Dependent Claim
28 words
The method of claim 1 wherein said object is mounted on a transducer vibrationally responsive to an applied voltage, and including applying a sawtooth voltage to said transducer.
Claim 9
Dependent Claim
18 words
The method of claim 7 wherein the amplitude of said vibration is one-half the wavelength of said light.
Claim 10
Dependent Claim
12 words
The method of claim 7, wherein said transducer is a piezoelectric element.
Claim 11
Dependent Claim
18 words
The method of claim 9 wherein the amplitude of said vibration is one-half the wavelength of said light.
Claim 12
Independent Claim
134 words
A system for analyzing the planarity of the surface of an object, comprising: A. means for generating a light beam of monochromatic coherent light, B. means for splitting said light beam into a reference beam and an object beam, and recombining the reflected reference and object beams into a view beam; C. means for monitoring said surface of said object in said object beam, with the said surface thereof normal to said object beam, D. means for vibrating said object in said object beam to advance and recede said surface thereof in a direction normal to said surface, wherein said vibrating means is characterized with a receding motion substantially instantaneous relative to a slow said advance motion thereof, and E. means in said view beam for detecting interference fringe changes resulting from said vibration.
Claim 13
Independent Claim
134 words
A system for analyzing the planarity of the surface of an object, comprising: A. means for generating a light beam of monochromatic coherent light, B. means for splitting said light beam into a reference beam and an object beam, and recombining the reflected reference and object beams into a view beam; C. means for monitoring said surface of said object in said object beam, with the said surface thereof normal to said object beam, D. means for vibrating said object in said object beam to advance and recede said surface thereof in a direction normal to said surface, wherein said vibrating means is characterized with a receding motion substantially instantaneous relative to a slow said advance motion thereof, and E. means in said view beam for detecting interference fringe changes resulting from said vibration.
Claim 14
Dependent Claim
21 words
The system of claim 11 wherein said vibrating means is characterized with an amplitude of one-half the wavelength of said light.
Claim 15
Dependent Claim
19 words
The system of claim 11 wherein said vibrating means is characterized with an advance motion effected within one-third second.
Claim 16
Dependent Claim
21 words
The system of claim 13 wherein said vibrating means is characterized with an amplitude of one-half the wavelength of said light.
Claim 17
Dependent Claim
22 words
The system of claim 11 wherein said vibrating means is characterized with an advance motion one-tenth as fast as its receding motion.
Claim 18
Dependent Claim
21 words
The system of claim 15 wherein said vibrating means is characterized with an amplitude of one-half the wavelength of said light.
Claim 19
Dependent Claim
25 words
The system of claim 15 wherein said vibrating means is characterized with an advance motion of 5 milliseconds and a receding motion of 0.5 milliseconds.
Claim 20
Dependent Claim
21 words
The system of claim 17 wherein said vibrating means is characterized with an amplitude of one-half the wavelength of said light.
Claim 21
Dependent Claim
25 words
The system of claim 11 wherein said vibrating means comprises a transducer having said object mounted thereon, with said transducer responsive to an applied voltage.
Claim 22
Dependent Claim
21 words
The system of claim 19 wherein said vibrating means is characterized with an amplitude of one-half the wavelength of said light.
Claim 23
Dependent Claim
15 words
The system of claim 19 including means to apply a sawtooth voltage to said transducer.
Claim 24
Dependent Claim
21 words
The system of claim 21 wherein said vibrating means is characterized with an amplitude of one-half the wavelength of said light.
Claim 25
Dependent Claim
12 words
The system of claim 19 wherein said transducer is a piezoelectric element.
Claim 26
Dependent Claim
21 words
The system of claim 23 wherein said vibrating means is characterized with an amplitude of one-half the wavelength of said light.
Claim 27
Dependent Claim
15 words
The system of claim 23 including means to apply a sawtooth voltage to said transducer.
References Cited (Backward Citations)
US4022532A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-09-16 | 1984-03-17 | 1984-09-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-09-16 | 1988-03-17 | 1988-09-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-09-16 | 1992-03-17 | 1992-09-16 | $7700.00 | Window Closed / Lapsed |