US4221956A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for practising temperature gradient zone melting
Assignee: General Electric Co
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Filing: 1978-06-21
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Granted: 1980-09-09
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Expires: 1998-06-21
Abstract
Abstract An apparatus for practising temperature gradient zone melting simultaneously on a plurality of semiconductor bodies comprises a closable work chamber for receiving the bodies for processing; a heat source disposed in the work chamber and comprising a first closure member thereof; a heat sink disposed in the work chamber and comprising a second closure member thereof and means for transferring one or more bodies of semiconductor material to the work chamber for processing and from the work chamber subsequent to processing. The transferring means comprises manipulative means for selectively engaging the semiconductor bodies and supporting the bodies in transit and drive means for moving the manipulative means toward and away from the work chamber and orienting the manipulative means with respect to the semiconductor bodies.
Inventors
- 👤 John O. Fielding
- 👤 Carl A. Erikson
- 👤 Thomas R. Anthony
- 👤 Harvey E. Cline
- 👤 Siegwalt Ludke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:42
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436; C; C30; C30B; C30B13/00; C30B13/005; C30B13/02
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
403 words
Apparatus for the processing of one or more bodies of semiconductor material by temperature gradient zone melting, said apparatus including: (a) a closable work chamber in which the temperature gradient zone melting process is practiced, said closable work chamber comprising a first closure member having a heat source therein and a second closure member having a heat sink therein; (b) means disposed in said work chamber for supporting said bodies of semiconductor material therein; (c) a first actuator means for providing relative movement between said first and said second closure members to effect the opening and the closing of said work chamber; (d) said heat source facing internally of said work chamber and comprising radiative heating elements for heating said bodies of semiconductor material; (e) the heat sink cooperating with said heat source to produce a relatively uniform temperature gradient within said bodies of semiconductor material during processing; (f) first means for storing a plurality of bodies of semiconductor bodies prior to the transfer of said bodies to said closable work chamber; (g) second means for storing a plurality of bodies of semiconductor bodies after the transfer of said bodies from said closable work chamber; (h) manipulative means for selectively engaging and supporting a plurality of bodies of semiconductor material in transit from said first storage means to said closable work chamber, and from said closable work chamber to said second storage means; (i) drive means for moving said manipulative means to and from said first storage means, said second storage means and said said closable work chamber, and (j) means for operating said manipulative means for engaging and releasing a plurality of bodies of semiconductor material, (k) said manipulative means comprising (1) means including at least one vacuum line adapted for communication with a vacuum source for selectively attaching to said bodies of semiconductor material, a single one of said bodies of semiconductor material being engageable and supportable by said vacuum line at one end thereof through suction, and (2) a second actuator for placing said attaching means in contact with said bodies of semiconductor material, said single one of said bodies of semiconductor material being supported at said end of said vacuum line by application of a vacuum to the said vacuum line, and said single one of said bodies of semiconductor material being released from said end of said vacuum line by removal of the vacuum from said vacuum line.
Claim 2
Dependent Claim
403 words
Apparatus for the processing of one or more bodies of semiconductor material by temperature gradient zone melting, said apparatus including: (a) a closable work chamber in which the temperature gradient zone melting process is practiced, said closable work chamber comprising a first closure member having a heat source therein and a second closure member having a heat sink therein; (b) means disposed in said work chamber for supporting said bodies of semiconductor material therein; (c) a first actuator means for providing relative movement between said first and said second closure members to effect the opening and the closing of said work chamber; (d) said heat source facing internally of said work chamber and comprising radiative heating elements for heating said bodies of semiconductor material; (e) the heat sink cooperating with said heat source to produce a relatively uniform temperature gradient within said bodies of semiconductor material during processing; (f) first means for storing a plurality of bodies of semiconductor bodies prior to the transfer of said bodies to said closable work chamber; (g) second means for storing a plurality of bodies of semiconductor bodies after the transfer of said bodies from said closable work chamber; (h) manipulative means for selectively engaging and supporting a plurality of bodies of semiconductor material in transit from said first storage means to said closable work chamber, and from said closable work chamber to said second storage means; (i) drive means for moving said manipulative means to and from said first storage means, said second storage means and said said closable work chamber, and (j) means for operating said manipulative means for engaging and releasing a plurality of bodies of semiconductor material, (k) said manipulative means comprising (1) means including at least one vacuum line adapted for communication with a vacuum source for selectively attaching to said bodies of semiconductor material, a single one of said bodies of semiconductor material being engageable and supportable by said vacuum line at one end thereof through suction, and (2) a second actuator for placing said attaching means in contact with said bodies of semiconductor material, said single one of said bodies of semiconductor material being supported at said end of said vacuum line by application of a vacuum to the said vacuum line, and said single one of said bodies of semiconductor material being released from said end of said vacuum line by removal of the vacuum from said vacuum line.
Claim 3
Dependent Claim
29 words
The apparatus of claim 1 wherein said second storage means comprises at least one open cylindrical cup adapted to receive a stacked array of said bodies of semiconductor material.
Claim 4
Dependent Claim
29 words
The apparatus of claim 1 wherein said first storage means comprises at least one open cylindrical cup adapted to receive a stacked array of said bodies of semiconductor material.
Claim 5
Dependent Claim
20 words
The apparatus of claim 3 wherein said cylindrical cup is slotted at diametrically opposed locations in the lateral surface thereof.
Claim 6
Dependent Claim
34 words
The apparatus of claim 1 wherein said first closure member is stationary, and said second closure member is movable by said first actuator into and out of closing engagement with said first closure member.
Claim 7
Dependent Claim
13 words
The apparatus of claim 1 wherein said first actuator comprises a hydraulic actuator.
Claim 8
Dependent Claim
13 words
The apparatus of claim 1 wherein said first actuator comprises a pneumatic actuator.
Claim 9
Dependent Claim
13 words
The apparatus of claim 1 wherein said first actuator comprises a hydro-pneumatic actuator.
Claim 10
Dependent Claim
20 words
The apparatus of claim 1 wherein said radiative heat source emits radiation of a temperature as high as 3000° C.
Claim 11
Dependent Claim
25 words
The apparatus of claim 9 wherein said radiative heat source comprises a plurality of lamps emitting radiation of a peak wavelength greater than 0.8 microns.
Claim 12
Dependent Claim
22 words
The apparatus of claim 1 wherein said heat sink comprises a substantially flat plate cooled by a flow of liquid coolant therethrough.
Claim 13
Dependent Claim
24 words
The apparatus of claim 1 wherein each of said vacuum lines terminates in a vacuum cup at said end engageable with said semiconductor bodies.
Claim 14
Dependent Claim
83 words
The apparatus of claim 12 wherein each of said vacuum lines comprises (a) a flexible portion in communication with said vacuum source, and (b) a rigid end portion slidably received within a vacuum line guide, said vacuum line guide being movable by said second actuation means, and each of said vacuum cups being fixed to and communicating with said rigid end portion and biased toward the position occupied by a corresponding body of semiconductor material prior to its engagement with said vacuum cup.
Claim 15
Dependent Claim
17 words
The apparatus of claim 13 wherein each of said vacuum cups is biased downwardly by a weight.
Claim 16
Dependent Claim
36 words
The apparatus of claim 13 and further including a manifold adapted for applying a vacuum to each of a plurality of said vacuum lines, each of said vacuum lines being in fluid communication with said manifold.
Claim 17
Dependent Claim
24 words
The apparatus of claim 15 wherein said manifold is fixed to a manifold support movable with said vacuum line guide by said second actuator.
Claim 18
Dependent Claim
35 words
The apparatus of claim 1 wherein said second actuator comprises (a) a drive screw, and (b) a driven nut fixed to said attaching means, said driven nut being engageable and driven by said drive screw.
Claim 19
Dependent Claim
19 words
The apparatus of claim 17 and further including a first electric motor in driving engagement with said drive screw.
Claim 20
Dependent Claim
47 words
The apparatus of claim 17 and further including a bracket, said driven nut being operatively connected to said attaching means through said bracket, and a guide engageable by said bracket, and said guide maintaining the alignment of said bracket with said drive screw and said driven nut.
Claim 21
Dependent Claim
30 words
The apparatus of claim 19 wherein said guide is a straight rod disposed generally parallel to said drive screw, and said bracket being bored to slidably receive said straight rod.
Claim 22
Dependent Claim
46 words
The apparatus of claim 1 wherein said drive means comprises (a) a track extending approximately from said work chamber; (b) a carriage adapted to support said manipulative means, said carriage being movably supported on said track, and (c) means for propelling said carriage along said track.
Claim 23
Dependent Claim
65 words
The apparatus of claim 21 wherein said track comprises first and second generally parallel rails, and said carriage comprises a bridging member, said bridging member including a central portion for supporting said manipulative means and having first and second generally parallel legs extending from opposed ends of said central portion, each of said first and second legs movably engaging said first and second rails respectively.
Claim 24
Dependent Claim
40 words
The apparatus of claim 21 wherein said propelling means comprises (a) a drive screw disposed generally parallel to said track, and (b) a driven nut fixed to said carriage, said driven nut being engageable and driven by said drive screw.
Claim 25
Dependent Claim
16 words
The apparatus of claim 23 wherein said drive screw is powered by a second electric motor.
Claim 26
Dependent Claim
84 words
The apparatus of claim 22 and further including a pillow block fixed to said first leg of said central portion of said bridge member, said first rail of said track being slidably received within said pillow block, and a roller bearing rotatably mounted on said second leg of said central portion of said bridge member, said roller beraing being rotatable about said second rail, wherein said pillow block cooperating with said roller bearing to support said bridging member upon said first and second rails.
Claim 27
Dependent Claim
41 words
The apparatus of claim 1 wherein said first storing means includes a supporting base having a plurality of guides extending from the surface thereof, and said guides serving to maintain the alignment of one or more stacked arrays of semiconductor bodies.
Claim 28
Dependent Claim
17 words
The apparatus of claim 26 wherein said supporting base is biased toward said bodies of semiconductor material.
Claim 29
Dependent Claim
46 words
The apparatus of claim 26 and further including means for separating said semiconductor bodies from each other, said separating means ensuring that said transferring means removes only a single semiconductor body at any one time from each of said stacks to transfer to said work chamber.
Claim 30
Dependent Claim
76 words
The apparatus of claim 28 wherein said separating means comprises at least one gas nozzle disposed in proximity to each of said stacked arrays of semiconductor bodies and adapted for communication with a source of pressurized gas, said gas nozzles being further adapted for directing a jet of gas at two or more bodies of semiconductor material to cause the bodies to be movable from a single stack of said stacked arrays by said transferring means.
Claim 31
Dependent Claim
23 words
The apparatus of claim 29 wherein a plurality of said gas nozzles communicate with said pressurized gas source through at least one manifold.
Claim 32
Dependent Claim
38 words
The apparatus of claim 30 wherein each of said manifolds is fixed to a stationary support member disposed adjacent to a side of said supporting base opposite that on which said stacked array of semiconductor bodies is supported.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-09-09 | 1984-03-10 | 1984-09-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-09-09 | 1988-03-10 | 1988-09-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-09-09 | 1992-03-10 | 1992-09-09 | $7700.00 | Window Closed / Lapsed |