Patent US3027894A successfully refreshed from Google Patents.
Patent US4218650A successfully refreshed from Google Patents.
US4218650A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for measuring semiconductor device resistance
Assignee: National Aeronautics and Space Administration
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Filing: 1978-06-23
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Granted: 1980-08-19
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Expires: 1998-06-23
Abstract
Abstract A test structure for enabling the accurate measurement of the resistance characteristics of a semiconductor material, of the type which includes one or more pairs of electrical terminals disposed on the surface of the material to enable measurements of the resistance encountered by currents passed between the terminals. A pair of terminals includes a first terminal extending in a closed path, such as a circle, around a second terminal, so that all currents flowing between the terminals flows along a region of known width and length. Two or more pairs of concentric terminals can be utilized, wherein the ratio of radii of each pair of terminals is the same as the ratio for all other pairs of terminals, to facilitate the calculation of the contact resistance between each terminal and the semiconductor surface, as well as the calculation of the resistance of the semiconductor material apart from the effect of the terminal-to-semiconductor contact resistances.
Inventors
- 👤 with respect to an invention of Frosch Robert A. Administrator of the National Aeronautics and Space Administration
- 👤 Walter J. Matzen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:03
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/26; G01R31/2607; G01R27/00; G01R27/02; G01R27/14; Y; Y10; Y10S; Y10S136/00; Y10S136/29
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
133 words
In combination with a body of material whose resistance is to be measured, apparatus for use in making such a measurement comprising: first and second electrical terminals, each disposed against a surface of said body of material, said second terminal extending in a closed path on said body surface, and said first terminal lying within said path so that said first terminal is surrounded by said second terminal; a layer of insulative material lying on the surface of said body, said insulative layer having a plurality of narrow grooves therein, and wherein each of said electrical terminals includes a wide layer lying on said insulative layer, with the wide layer on said second terminal being largely ring shaped, and a narrower portion lying in one of said grooves and contacting said body surface.
Claim 2
Dependent Claim
133 words
In combination with a body of material whose resistance is to be measured, apparatus for use in making such a measurement comprising: first and second electrical terminals, each disposed against a surface of said body of material, said second terminal extending in a closed path on said body surface, and said first terminal lying within said path so that said first terminal is surrounded by said second terminal; a layer of insulative material lying on the surface of said body, said insulative layer having a plurality of narrow grooves therein, and wherein each of said electrical terminals includes a wide layer lying on said insulative layer, with the wide layer on said second terminal being largely ring shaped, and a narrower portion lying in one of said grooves and contacting said body surface.
Claim 3
Independent Claim
94 words
A method for measuring the resistance of a body of material having a surface, comprising: establishing a layer of insulative material on the surface of the body, which has narrow grooves therein; establishing a plurality of terminals on said surface, wherein a first terminal extends in a closed path about a second termainal, including establishing wide terminal portions on said insulative layer and narrower terminal portions that extend through said grooves and contact said body surface; and connecting a resistance measuring means between said first and second terminals and measuring the resistance between them.
Claim 4
Independent Claim
94 words
A method for measuring the resistance of a body of material having a surface, comprising: establishing a layer of insulative material on the surface of the body, which has narrow grooves therein; establishing a plurality of terminals on said surface, wherein a first terminal extends in a closed path about a second termainal, including establishing wide terminal portions on said insulative layer and narrower terminal portions that extend through said grooves and contact said body surface; and connecting a resistance measuring means between said first and second terminals and measuring the resistance between them.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-08-19 | 1984-02-18 | 1984-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-08-19 | 1988-02-18 | 1988-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-08-19 | 1992-02-18 | 1992-08-19 | $7700.00 | Window Closed / Lapsed |