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US4218618A
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Apparatus for switching high voltage pulses with picosecond accuracy
Assignee: University of Rochester
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Filing: 1979-02-21
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Granted: 1980-08-19
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Expires: 1999-02-21
Abstract
Abstract Switching of high voltage pulses (of the order of 10 kV) of durations from about 10μs (microseconds) to 10ms (milliseconds) with picosecond accuracy is accomplished by a laser activated semiconductor switch made up of a body (18) of high resistivity semiconductor material, such as nearly intrinsic silicon, integrated into a wide band (10GHz) geometry, which is part of a transmission line (28). The high bias voltage pulses are obtained by charging the line in synchronism with the generation of the laser pulse. The high voltage bias pulse width can be typically in the range of 10μs- 10ms, and the length of the body (18) is selected so as to prevent thermal breakdown of the semiconductor with such pulse widths. The energy of the laser pulse switches the high voltage to produce a multikilovolt output pulse suitable for driving devices, such as streak cameras or Pockels cells, by the same laser, which need to be synchronized with picosecond accuracy to the laser pulse. The length of the transmission line may be varied to adjust the width of the multikilovolt output pulse.
Inventors
- 👤 Gerard Mourou
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:46
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/03; G02F1/0327; H; H03; H03K; H03K17/00; H03K17/51; H03K17/78; H03K3/00; H03K3/02; H03K3/42; H03K3/53; H03K3/57; H10; H10F; H10F30/00; H10F30/10
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
246 words
Apparatus for switching high voltage pulses having magnitudes of the order of 10 kV and durations up to about 10 ms in a period of time of the order of picoseconds, which comprises a body of semiconductor material the resistivity of which both decreases several orders of magnitude when illuminated by optical energy of a certain wavelength and also decreases with increasing temperature, means for supporting said body between a pair of electrodes in a path traversed by a beam of said optical energy, the length of said body between said electrodes being L, said length L being such that for a voltage magnitude V o of said pulses, the change in temperature T, of said body from an initial temperature T o , the resistivity, p, of said body changes, in the absence of said optical energy illumination, no more than 50% from the resistivity, p o , thereof at the initial temperature where ##EQU4## where T is the instantaneous temperature of said body in degrees Kelvin, T o is the initial temperature in degrees Kelvin, p is the resistivity in ohms per centimeter, p o is the resistivity in ohms per centimeter at temperature T o , c is the specific heat of said semiconductor material, L is said length in centimeters, k is the Boltzmann constant, E g is the band gap energy of said semiconductor material in Joules, and d is the density of said semiconductor material in grams per cubic centimeter.
Claim 2
Dependent Claim
246 words
Apparatus for switching high voltage pulses having magnitudes of the order of 10 kV and durations up to about 10 ms in a period of time of the order of picoseconds, which comprises a body of semiconductor material the resistivity of which both decreases several orders of magnitude when illuminated by optical energy of a certain wavelength and also decreases with increasing temperature, means for supporting said body between a pair of electrodes in a path traversed by a beam of said optical energy, the length of said body between said electrodes being L, said length L being such that for a voltage magnitude V o of said pulses, the change in temperature T, of said body from an initial temperature T o , the resistivity, p, of said body changes, in the absence of said optical energy illumination, no more than 50% from the resistivity, p o , thereof at the initial temperature where ##EQU4## where T is the instantaneous temperature of said body in degrees Kelvin, T o is the initial temperature in degrees Kelvin, p is the resistivity in ohms per centimeter, p o is the resistivity in ohms per centimeter at temperature T o , c is the specific heat of said semiconductor material, L is said length in centimeters, k is the Boltzmann constant, E g is the band gap energy of said semiconductor material in Joules, and d is the density of said semiconductor material in grams per cubic centimeter.
Claim 3
Dependent Claim
53 words
Apparatus as set forth in claim 1 further comprising a transmission line, said electrodes and said body being included in said line, means for charging said line at an input end thereof to provide said high voltage pulses at said body therein, and load means connected to the output end of said line.
Claim 4
Dependent Claim
28 words
Apparatus as set forth in claim 2 wherein said line has a characteristic impedance, Z o , equal to the impedance, Z L , of said load means.
Claim 5
Dependent Claim
35 words
Apparatus as set forth in claim 2 wherein said charging means comprises a high voltage pulse generator, a current limiting resistor, said generator being connected to the input end of said line through said resistor.
Claim 6
Dependent Claim
72 words
Apparatus as set forth in claim 2 further comprising means for producing said optical energy beam with an absorbed energy E a in Joules where ##EQU5## where h is Planck's constant, υ is the optical frequency of said optical energy beam in sec -1 , e is the charge of the electron, V s is the carrier saturation velocity of said semiconductor material, and Z o is the impedance of said line.
Claim 7
Dependent Claim
58 words
Apparatus as set forth in claim 1 wherein said beam producing means a laser, triggerable pulse generating means for pumping said laser to produce said illumination in pulses of the order of 10 ps in duration, and means synchronized with said triggerable pulse generator for applying high voltage pulses to said body in synchronism with said beam pulses.
Claim 8
Dependent Claim
86 words
Apparatus as set forth in claim 6 wherein said laser is a mode locked optically pumped laser having pump lamp means, said pulse forming means comprises a pulse forming network connected to said lamp means for providing a pulse for firing said lamp means, a transmission line coupled to said body, and said synchronized means including means for charging said line to produce each of said high voltage pulses commencing a predetermined time less than said time T-T o before said optical pulse reaches said body.
Claim 9
Dependent Claim
15 words
Apparatus as set forth in claim 1 wherein said semiconductor material is nearly intrinsic silicon.
Claim 10
Dependent Claim
65 words
Apparatus as set forth in claim 1 wherein said electrodes are conductive rods, a conductive cylinder, insulating cylindrical means for supporting said rods coaxially within said cylinder with a gap between opposed ends of said rods, said body being disposed in said gap between the said opposed ends, said cylinder having a lateral opening aligned with said body for the passage of said laser illumination.
Claim 11
Dependent Claim
19 words
The apparatus as set forth in claim 1 wherein said initial temperature is room temperature, such as 293° K.
Claim 12
Dependent Claim
29 words
The apparatus as set forth in claim 1 wherein said semiconductor material consists of nearly intrinsic silicon and said certain wavelength is equal to or less than 1.06 μm.
References Cited (Backward Citations)
US3809953A
Cited
US3917943A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-08-19 | 1984-02-18 | 1984-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-08-19 | 1988-02-18 | 1988-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-08-19 | 1992-02-18 | 1992-08-19 | $7700.00 | Window Closed / Lapsed |