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US4217495A Expired / Lapsed US ⏱️ 0.0 years remaining

Electron microscope backscattered electron detectors

Assignee: Individual
•
Filing: 1979-04-04
•
Granted: 1980-08-12
•
Expires: 1999-04-04
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Abstract

Abstract An electron microscope backscattered detector comprising an arm of scintillation material with a hole through which the electron beam passes, the hole being provided with a removable grounded liner to facilitate cleaning and prevent astigmatism problems due to electron build up.

Inventors

  • 👤 Vivian N. E. Robinson

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 09:56
CPC Classifications
G; G01; G01T; G01T1/00; G01T1/16; G01T1/20; H; H01; H01J; H01J37/00; H01J37/02; H01J37/244; H01J2237/00; H01J2237/244; H01J2237/2443; H01J2237/2445; H01J2237/24475; H01J2237/245; H01J2237/24507

Claims Analysis

Total Claims: 12
Claim 1
Independent Claim 66 words
A backscattered electron detector for use in an electron microscope, said detector comprising an arm of scintillation material adapted to be coupled to a photomultiplier at one end thereof and incorporating adjacent the opposite end a transverse hole capable of passing the electron beam of said microscope therethrough, said hole having a liner of metallic material capable of being connected to an electrical connection in use.
Claim 2
Dependent Claim 66 words
A backscattered electron detector for use in an electron microscope, said detector comprising an arm of scintillation material adapted to be coupled to a photomultiplier at one end thereof and incorporating adjacent the opposite end a transverse hole capable of passing the electron beam of said microscope therethrough, said hole having a liner of metallic material capable of being connected to an electrical connection in use.
Claim 3
Dependent Claim 18 words
A backscattered electron detector as claimed in claim 1 wherein said liner is readily removable from said hole.
Claim 4
Dependent Claim 56 words
A backscattered electron detector as claimed in claim 2 wherein a bush of metallic material is provided fixed to said scintillation material within said hole, said bush being provided with a female thread and said liner being provided with a corresponding male thread so that said liner is removable by unscrewing said liner from said bush.
Claim 5
Dependent Claim 25 words
A backscattered electron detector as claimed in claim 3 wherein said bush is fixed to said scintillation material by gluing with an epoxy type resin.
Claim 6
Dependent Claim 40 words
A backscattered electron detector as claimed in claim 1 wherein said arm is provided with a metallic covering over at least the upper surface of said arm, and said electrical connection from said liner is made through said metallic covering.
Claim 7
Dependent Claim 34 words
A backscattered electron detector as claimed in claim 5 wherein said arm is generally rectangular in cross-section and said metallic covering extends over the upper surface and the sides and tip of said arm.
Claim 8
Dependent Claim 23 words
A backscattered electron detector as claimed in claim 1 wherein said scintillation material is cut away in a cone-like configuration beneath said liner.
Claim 9
Dependent Claim 22 words
A backscattered electron detector as claimed in claim 1 wherein the bore through said liner is less than 15 millimeters in diameter.
Claim 10
Dependent Claim 19 words
A backscattered electron detector as claimed in claim 8 wherein said bore is less than 10 millimeters in diameter.
Claim 11
Dependent Claim 27 words
A backscattered electron detector as claimed in claim 1 wherein the scintillation material subtends a solid angle at the specimen of between 0.8π steradian and 1.8π steradian.
Claim 12
Dependent Claim 17 words
A backscattered electron detector as claimed in claim 1 wherein said electrical connection is an earthed connection.

References Cited (Backward Citations)

US2939012A Cited
US3781562A Cited
US3942005A Cited
US4149074A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-08-12 1984-02-11 1984-08-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-08-12 1988-02-11 1988-08-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-08-12 1992-02-11 1992-08-12 $7700.00 Window Closed / Lapsed

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