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US4201473A Expired / Lapsed US ⏱️ 0.0 years remaining

Optical interferometer system with CCTV camera for measuring a wide range of aperture sizes

Assignee: Zygo Corp
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Filing: 1978-04-21
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Granted: 1980-05-06
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Expires: 1998-04-21
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Abstract

Abstract Apparatus is disclosed for the generation and display of interference patterns for the purpose of quantifying the distortion of either a surface or a transmitted wavefront. The invention comprises, in one embodiment, means to align the elements comprising the interferometer cavity, means to continuously magnify, i.e., zoom, the aperture diameter of the interference pattern, means to focus either the measured or limiting aperture onto the face of the vidicon, and means for transducing both the alignment spots and the interference pattern with a standard CCTV camera.

Inventors

  • 👤 Peter L. Domenicali
  • 👤 George C. Hunter

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 05:02
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/0209; G01B9/02083; G01B9/02089

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 220 words
An interferometer system capable of measuring test articles over a broad range of aperture size comprising (1) a source of a beam of coherent energy, (2) means for splitting said beam into a reference wavefront and a measurement wavefront, (3) means for interacting said reference wavefront with a reference surface and said measurement wavefront with the article under test, (4) means for collecting said two wavefronts and focusing them as spots onto a diffuse screen containing an integral alignment reticle having a marked center, (5) means for viewing said diffuse screen and said spots focused thereon on a monitor of a closed circuit television system, (6) means for moving said spots relative to each other so they coincide on said monitor at said marked center, thereby properly aligning said reference and measurement wavefronts to form an interference pattern, (7) means for removing the image of said screen from said monitor, (8) means for imaging the limiting aperture in the measurement region onto (9) means which destroys the coherence length of the beam comprised of the recombined aligned reference and test wavefronts without producing any spurious patterns on said monitor, (10) means for providing variable magnification of the image on means (9), and (11) means for focusing said image of means (9) onto the vidicon of said closed circuit television system.
Claim 2
Dependent Claim 220 words
An interferometer system capable of measuring test articles over a broad range of aperture size comprising (1) a source of a beam of coherent energy, (2) means for splitting said beam into a reference wavefront and a measurement wavefront, (3) means for interacting said reference wavefront with a reference surface and said measurement wavefront with the article under test, (4) means for collecting said two wavefronts and focusing them as spots onto a diffuse screen containing an integral alignment reticle having a marked center, (5) means for viewing said diffuse screen and said spots focused thereon on a monitor of a closed circuit television system, (6) means for moving said spots relative to each other so they coincide on said monitor at said marked center, thereby properly aligning said reference and measurement wavefronts to form an interference pattern, (7) means for removing the image of said screen from said monitor, (8) means for imaging the limiting aperture in the measurement region onto (9) means which destroys the coherence length of the beam comprised of the recombined aligned reference and test wavefronts without producing any spurious patterns on said monitor, (10) means for providing variable magnification of the image on means (9), and (11) means for focusing said image of means (9) onto the vidicon of said closed circuit television system.
Claim 3
Dependent Claim 25 words
The system of claim 1, in which said means (9) is a diffuse screen moving continuously in a path perpendicular to that of said wavefronts.
Claim 4
Dependent Claim 20 words
The system of claim 1, in which said means (9) is a non-moving liquid crystal of the dynamic scattering type.
Claim 5
Dependent Claim 32 words
The system of claim 1, in which said diffuse screen includes means for occulting said spots at said marked center, whereby large differences in spot intensity do not interfere with proper alignment.
Claim 6
Dependent Claim 18 words
The system of claim 1, in which said source of said beam of coherent energy is a laser.
Claim 7
Dependent Claim 17 words
The system of claim 1, in which the means (10) for providing variable magnification is continuously variable.

References Cited (Backward Citations)

No citation records indexed.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-05-06 1983-11-05 1984-05-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-05-06 1987-11-05 1988-05-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-05-06 1991-11-05 1992-05-06 $7700.00 Window Closed / Lapsed

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