Patent US1281579A successfully refreshed from Google Patents.
Patent US4201473A successfully refreshed from Google Patents.
US4201473A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical interferometer system with CCTV camera for measuring a wide range of aperture sizes
Assignee: Zygo Corp
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Filing: 1978-04-21
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Granted: 1980-05-06
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Expires: 1998-04-21
Abstract
Abstract Apparatus is disclosed for the generation and display of interference patterns for the purpose of quantifying the distortion of either a surface or a transmitted wavefront. The invention comprises, in one embodiment, means to align the elements comprising the interferometer cavity, means to continuously magnify, i.e., zoom, the aperture diameter of the interference pattern, means to focus either the measured or limiting aperture onto the face of the vidicon, and means for transducing both the alignment spots and the interference pattern with a standard CCTV camera.
Inventors
- 👤 Peter L. Domenicali
- 👤 George C. Hunter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 05:02
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/0209; G01B9/02083; G01B9/02089
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
220 words
An interferometer system capable of measuring test articles over a broad range of aperture size comprising (1) a source of a beam of coherent energy, (2) means for splitting said beam into a reference wavefront and a measurement wavefront, (3) means for interacting said reference wavefront with a reference surface and said measurement wavefront with the article under test, (4) means for collecting said two wavefronts and focusing them as spots onto a diffuse screen containing an integral alignment reticle having a marked center, (5) means for viewing said diffuse screen and said spots focused thereon on a monitor of a closed circuit television system, (6) means for moving said spots relative to each other so they coincide on said monitor at said marked center, thereby properly aligning said reference and measurement wavefronts to form an interference pattern, (7) means for removing the image of said screen from said monitor, (8) means for imaging the limiting aperture in the measurement region onto (9) means which destroys the coherence length of the beam comprised of the recombined aligned reference and test wavefronts without producing any spurious patterns on said monitor, (10) means for providing variable magnification of the image on means (9), and (11) means for focusing said image of means (9) onto the vidicon of said closed circuit television system.
Claim 2
Dependent Claim
220 words
An interferometer system capable of measuring test articles over a broad range of aperture size comprising (1) a source of a beam of coherent energy, (2) means for splitting said beam into a reference wavefront and a measurement wavefront, (3) means for interacting said reference wavefront with a reference surface and said measurement wavefront with the article under test, (4) means for collecting said two wavefronts and focusing them as spots onto a diffuse screen containing an integral alignment reticle having a marked center, (5) means for viewing said diffuse screen and said spots focused thereon on a monitor of a closed circuit television system, (6) means for moving said spots relative to each other so they coincide on said monitor at said marked center, thereby properly aligning said reference and measurement wavefronts to form an interference pattern, (7) means for removing the image of said screen from said monitor, (8) means for imaging the limiting aperture in the measurement region onto (9) means which destroys the coherence length of the beam comprised of the recombined aligned reference and test wavefronts without producing any spurious patterns on said monitor, (10) means for providing variable magnification of the image on means (9), and (11) means for focusing said image of means (9) onto the vidicon of said closed circuit television system.
Claim 3
Dependent Claim
25 words
The system of claim 1, in which said means (9) is a diffuse screen moving continuously in a path perpendicular to that of said wavefronts.
Claim 4
Dependent Claim
20 words
The system of claim 1, in which said means (9) is a non-moving liquid crystal of the dynamic scattering type.
Claim 5
Dependent Claim
32 words
The system of claim 1, in which said diffuse screen includes means for occulting said spots at said marked center, whereby large differences in spot intensity do not interfere with proper alignment.
Claim 6
Dependent Claim
18 words
The system of claim 1, in which said source of said beam of coherent energy is a laser.
Claim 7
Dependent Claim
17 words
The system of claim 1, in which the means (10) for providing variable magnification is continuously variable.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-05-06 | 1983-11-05 | 1984-05-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-05-06 | 1987-11-05 | 1988-05-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-05-06 | 1991-11-05 | 1992-05-06 | $7700.00 | Window Closed / Lapsed |