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Anti-reflection film for synthetic resin base

Assignee: Nikon Corp
•
Filing: 1977-06-22
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Granted: 1980-04-01
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Expires: 1997-06-22
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Abstract

Abstract Anti-reflection film for a synthetic resin base comprises a first layer of silicon dioxide (SiO2) deposited on the synthetic resin base by evaporation, a second layer of alumina (Al2O3) deposited on the first layer by evaporation, and a third layer of silicon dioxide (SiO2) or magnesium fluoride (MgF2) deposited on the second layer by evaporation. The first layer has a geometrical film thickness of 1 to 5 mu , the second layer has an optical film thickness of lambda /4, and the third layer has an optical film thickness of lambda /4.

Inventors

  • 👤 Hidetaka Takayama
  • 👤 Hideo Ikeda

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-25 22:58
CPC Classifications
B; B29; B29D; B29D11/00; B29D11/00605; B29D11/0073; B29D11/00865; G; G02; G02B; G02B1/00; G02B1/10; G02B1/11; G02B1/113; G02B1/115; Y; Y10; Y10S; Y10S428/00; Y10S428/913; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/2495; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265; Y10T428/31504; Y10T428/31652; Y10T428/31667

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 123 words
Anti-reflection film on a synthetic resin base comprising: a first layer selected from the group consisting of silicon dioxide (SiO 2 ) and a mixture of silicon dioxide (SiO 2 ) and alumina (Al 2 O 3 ) deposited on said synthetic resin base by evaporation, said first layer having a geometrical film thickness of 1 to 5μ; a second layer formed of alumina (Al 2 O 3 ) deposited on said first layer by evaporation, said second layer having an optical film thickness of λ/4; and a third layer selected from the group consisting of silicon dioxide (SiO 2 ) and magnesium fluoride (MgF 2 ) deposited on said second layer by evaporation, said third layer having an optical film thickness λ/4.
Claim 2
Dependent Claim 123 words
Anti-reflection film on a synthetic resin base comprising: a first layer selected from the group consisting of silicon dioxide (SiO 2 ) and a mixture of silicon dioxide (SiO 2 ) and alumina (Al 2 O 3 ) deposited on said synthetic resin base by evaporation, said first layer having a geometrical film thickness of 1 to 5μ; a second layer formed of alumina (Al 2 O 3 ) deposited on said first layer by evaporation, said second layer having an optical film thickness of λ/4; and a third layer selected from the group consisting of silicon dioxide (SiO 2 ) and magnesium fluoride (MgF 2 ) deposited on said second layer by evaporation, said third layer having an optical film thickness λ/4.
Claim 3
Dependent Claim 33 words
Anti-reflection film according to claim 1, wherein the film thickness of said first layer is 1μ, and the refractive indices of said first, second and third layers are 1.47, 1.60 and 1.46, respectively.
Claim 4
Dependent Claim 33 words
Anti-reflection film according to claim 1, wherein the film thickness of said first layer is 2μ, and the refractive indices of said first, second and third layers are 1.47, 1.60 and 1.46, respectively.
Claim 5
Dependent Claim 33 words
Anti-reflection film according to claim 1, wherein the film thickness of said first layer is 3μ, and the refractive indices of said first, second and third layers are 1.47, 1.60 and 1.46, respectively.
Claim 6
Dependent Claim 33 words
Anti-reflection film according to claim 1, wherein the film thickness of said first layer is 4μ, and the refractive indices of said first, second and third layers are 1.47, 1.60 and 1.46, respectively.
Claim 7
Dependent Claim 33 words
Anti-reflection film according to claim 1, wherein the film thickness of said first layer is 5μ, and the refractive indices of said first, second and third layers are 1.47, 1.60 and 1.46, respectively.
Claim 8
Dependent Claim 83 words
Anti-reflection film according to claim 1, further comprising a fourth layer located between said second and third layers selected from the group consisting of zirconium oxide (ZrO 2 ) and titanium dioxide (TiO 2 ), said fourth layer having an optical film thickness of λ/2, and wherein said first, said second and said fourth layers satisfy the following relation: n.sub.1 <n.sub.2 <n.sub.4, where n 1 , n 2 and n 4 represent the refractive indices of said first, second and fourth layers, respectively.
Claim 9
Dependent Claim 72 words
Anti-reflection film according to claim 1, wherein said first layer is a film formed of a mixture of silicon dioxide (SiO 2 ) evaporated so that its amount is decreased in the direction toward said second layer and alumina (Al 2 O 3 ) evaporated from an evaporation source different from that of said silicon dioxide (SiO 2 ) so that its amount is increased in the direction toward said second layer.
Claim 10
Dependent Claim 74 words
Anti-reflection film according to claim 8, wherein the refractive index of that portion of said first layer which is adjacent to said base ranges from 1.47 to 1.49, the refractive index of that portion of said first layer which is adjacent to said second layer ranges from 1.45 to 1.47, the refractive index of said second layer ranges from 1.51 to 1.63, and the refractive index of said third layer is 1.46 or below.
Claim 11
Dependent Claim 202 words
Anti-reflection film on a synthetic resin base comprising: a first layer formed of silicon dioxide (SiO 2 ) deposited on said synthetic resin base by evaporation, said first layer having a geometrical film thickness of 1 to 5μ; a second layer selected from the group consisting of silicon monoxide (SiO), zirconium dioxide (ZrO 2 ) and titanium trioxide (Ti 2 O 3 ), said second layer having an optical film thickness of λ/4; a third layer selected from the group consisting of zirconium oxide (ZrO 2 ) titanium trioxide (Ti 2 O 3 ), titanium dioxide (TiO 2 ) and cerium dioxide (CeO 2 ), said third layer having an optical film thickness of λ/4; and a fourth layer selected from the group consisting of silicon dioxide (SiO 2 ) and magnesium fluoride (MgF 2 ), said fourth layer having an optical film thickness of λ/4; said first, second, third and fourth layers satisfying the following relations: n.sub.1 <n.sub.2 <n.sub.3 and ##EQU2## where n 1 , n 2 , n 3 and n 4 represent the refractive indices of said first, second, third and fourth layers, respectively, and Ro represents the reflection factor of said anti-reflection film for a desired wavelength λ.
Claim 12
Dependent Claim 202 words
Anti-reflection film on a synthetic resin base comprising: a first layer formed of silicon dioxide (SiO 2 ) deposited on said synthetic resin base by evaporation, said first layer having a geometrical film thickness of 1 to 5μ; a second layer selected from the group consisting of silicon monoxide (SiO), zirconium dioxide (ZrO 2 ) and titanium trioxide (Ti 2 O 3 ), said second layer having an optical film thickness of λ/4; a third layer selected from the group consisting of zirconium oxide (ZrO 2 ) titanium trioxide (Ti 2 O 3 ), titanium dioxide (TiO 2 ) and cerium dioxide (CeO 2 ), said third layer having an optical film thickness of λ/4; and a fourth layer selected from the group consisting of silicon dioxide (SiO 2 ) and magnesium fluoride (MgF 2 ), said fourth layer having an optical film thickness of λ/4; said first, second, third and fourth layers satisfying the following relations: n.sub.1 <n.sub.2 <n.sub.3 and ##EQU2## where n 1 , n 2 , n 3 and n 4 represent the refractive indices of said first, second, third and fourth layers, respectively, and Ro represents the reflection factor of said anti-reflection film for a desired wavelength λ.
Claim 13
Dependent Claim 158 words
Anti-reflection film on a synthetic resin base comprising: a first layer selected from the group consisting of silicon dioxide (SiO 2 ) and a mixture of silicon dioxide (SiO 2 ) and alumina (Al 2 O 3 ) deposited on said synthetic resin base by evaporation, said first layer having a geometrical film thickness of 1 to 5μ; a second layer formed of alumina (Al 2 O 3 ) deposited on said first layer by evaporation, said second layer having an optical film thickness of λ/4; a third layer and a fourth layer each selected from the group consisting of zirconium oxide (ZrO 2 ) and titanium oxide (TiO 2 ) and each having an optical film thickness of λ/4; and a fifth layer selected from the group consisting of silicon dioxide (SiO 2 ) and magnesium fluoride (MgF 2 ) deposited on said fourth layer by evaporation, said fifth layer having an optical film thickness of λ/4.
Claim 14
Dependent Claim 158 words
Anti-reflection film on a synthetic resin base comprising: a first layer selected from the group consisting of silicon dioxide (SiO 2 ) and a mixture of silicon dioxide (SiO 2 ) and alumina (Al 2 O 3 ) deposited on said synthetic resin base by evaporation, said first layer having a geometrical film thickness of 1 to 5μ; a second layer formed of alumina (Al 2 O 3 ) deposited on said first layer by evaporation, said second layer having an optical film thickness of λ/4; a third layer and a fourth layer each selected from the group consisting of zirconium oxide (ZrO 2 ) and titanium oxide (TiO 2 ) and each having an optical film thickness of λ/4; and a fifth layer selected from the group consisting of silicon dioxide (SiO 2 ) and magnesium fluoride (MgF 2 ) deposited on said fourth layer by evaporation, said fifth layer having an optical film thickness of λ/4.
Claim 15
Dependent Claim 37 words
Anti-reflection film according to claim 11, wherein the film thickness of said first layer is 1μ, and the refractive indices of said first, second, third, fourth and fifth layers are 1.47, 1.60, 1.94, 1.98 and 1.46, respectively.
Claim 16
Dependent Claim 37 words
Anti-reflection film according to claim 11, wherein the film thickness of said first layer is 2μ, and the refractive indices of said first, second, third, fourth and fifth layers are 1.47, 1.60, 1.94, 1.98 and 1.46, respectively.
Claim 17
Dependent Claim 37 words
Anti-reflection film according to claim 11, wherein the film thickness of said first layer is 3μ, and the refractive indices of said first, second, third, fourth and fifth layers are 1.47, 1.60, 1.94, 1.98 and 1.46, respectively.
Claim 18
Dependent Claim 37 words
Anti-reflection film according to claim 11, wherein the film thickness of said first layer is 4μ, and the refractive indices of said first, second, third, fourth and fifth layers are 1.47, 1.60, 1.94, 1.98 and 1.46, respectively.
Claim 19
Dependent Claim 37 words
Anti-reflection film according to claim 11, wherein the film thickness of said first layer is 5μ, and the refractive indices of said first, second, third, fourth and fifth layers are 1.47, 1.60, 1.94, 1.98 and 1.46, respectively.

References Cited (Backward Citations)

US3799653A Cited
US3854796A Cited
US3781090A Cited
US3914023A Cited
US3984581A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-04-01 1983-10-01 1984-04-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-04-01 1987-10-01 1988-04-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-04-01 1991-10-01 1992-04-01 $7700.00 Window Closed / Lapsed

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