Patent US3554340A successfully refreshed from Google Patents.
Patent US4190786A successfully refreshed from Google Patents.
US4190786A
Expired / Lapsed
US
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Discharge lamp
Assignee: Ushio Denki KK
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Filing: 1978-03-29
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Granted: 1980-02-26
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Expires: 1998-03-29
Abstract
Abstract A discharge lamp of the type which seals mercury and a rare gas in a bulb having sealed therein a pair of electrodes and in which both the mercury and the rare gas contribute to discharge radiation. Letting the value of the quantity of mercury (mg/cc.) sealed per 1 cc. of the volume of the bulb and the value of the (atmospheric) pressure of the rare gas be represented by X and Y, respectively, the values X and Y are selected to be in the ranges of 1≦X≦13 and 2≦Y≦10, respectively, whereby to abundantly emit ultraviolet rays of the wavelengths between 2000 to 2500 A. The discharge lamp is employed as a light source for photolithography in the manufacture of semiconductor devices to achieve the formation of a fine pattern in a short time.
Inventors
- 👤 Takehiro Kira
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 03:37
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70008; G03F7/70016; H; H01; H01J; H01J61/00; H01J61/02; H01J61/12; H01J61/18; H01J61/20
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
71 words
A source of ultraviolet radiation comprising: a sealed bulb, at least a portion of said bulb being transmitting to wavelengths below 3000 angstroms, a pair of electrodes sealed in said bulb, mercury sealed within said bulb in amount from 1 to 13 mg. per cc. of volume of said bulb, and at least one rare gas sealed within said bulb at a pressure from 2 to 10 atm. at 25° C.
Claim 2
Dependent Claim
71 words
A source of ultraviolet radiation comprising: a sealed bulb, at least a portion of said bulb being transmitting to wavelengths below 3000 angstroms, a pair of electrodes sealed in said bulb, mercury sealed within said bulb in amount from 1 to 13 mg. per cc. of volume of said bulb, and at least one rare gas sealed within said bulb at a pressure from 2 to 10 atm. at 25° C.
Claim 3
Dependent Claim
16 words
The source of claim 1, said portion of said bulb transmitting between 2000 and 2500 angstroms.
Claim 4
Dependent Claim
20 words
The source of claim 1, said electrodes comprising an anode and a cathode for operating said source with DC voltage.
Claim 5
Dependent Claim
44 words
The source of claim 3, said bulb having length L in a vertical direction, said anode and cathode being aligned vertically from above and below, respectively, and said anode being located between the center of said bulb and a distance L/6 below said center.
Claim 6
Dependent Claim
30 words
The source of claim 1 or 4, wherein said amounts of mercury and rare gas are adjusted to maximize the emission of said ultraviolet radiation between 2000 and 2500 angstroms.
Claim 7
Dependent Claim
15 words
The source of claim 1 or 4, said at least one rare gas comprising xenon.
Claim 8
Dependent Claim
29 words
The source of claim 4, said anode comprising a volume in the range from 0.5×10 -3 to 1.5×10 -3 cc. per watt of rated power dissipation of said source.
Claim 9
Dependent Claim
47 words
The source of claim 7 comprising means for operating said bulb for exposing photoresist in practical exposure periods of considerably less than 100 sec., said at least one rare gas comprising xenon, and said at least one portion of said bulb transmitting between 2000 and 2500 angstroms.
Claim 10
Dependent Claim
32 words
The source of claim 4 comprising a reflective coating on the inside of said bulb from the bottom of said bulb to a distance L/6 from said bottom in said vertical direction.
Claim 11
Dependent Claim
27 words
The source of claim 3, said anode and cathode being selectively spaced to comprise a lamp chosen from the group consisting of short and long arc lamps.
Claim 12
Independent Claim
81 words
A method for producing ultraviolet radiation below 3000 angstroms comprising: providing a lamp having a bulb that transmits said ultraviolet radiation, a pair of electrodes sealed in said bulb, and mercury in amount from 1 to 13 mg. per cc. of bulb volume and at least one rare gas at a pressure from 2 to 10 atm. at 25° C. sealed in said bulb, and operating said lamp by applying a voltage across said electrodes sufficient to produce said ultraviolet radiation.
Claim 13
Independent Claim
81 words
A method for producing ultraviolet radiation below 3000 angstroms comprising: providing a lamp having a bulb that transmits said ultraviolet radiation, a pair of electrodes sealed in said bulb, and mercury in amount from 1 to 13 mg. per cc. of bulb volume and at least one rare gas at a pressure from 2 to 10 atm. at 25° C. sealed in said bulb, and operating said lamp by applying a voltage across said electrodes sufficient to produce said ultraviolet radiation.
Claim 14
Dependent Claim
16 words
The method of claim 11, said bulb transmitting said ultraviolet radiation between 2000 and 2500 angstroms.
Claim 15
Dependent Claim
22 words
The method of claim 11, said pair of electrodes comprising an anode and a cathode for operating said lamp with DC voltage.
Claim 16
Dependent Claim
44 words
The method of claim 13, said bulb having length L in a vertical direction, said anode and cathode being aligned vertically from above and below, respectively, and said anode being located between the center of said bulb and a distance L/6 below said center.
Claim 17
Dependent Claim
27 words
The method of claim 11, comprising adjusting said amounts of mercury and rare gas to maximize the emission of said ultraviolet radiation between 2000 and 2500 angstroms.
Claim 18
Dependent Claim
15 words
The method of claim 11 or 14, said at lease one rare gas comprising xenon.
Claim 19
Dependent Claim
29 words
The method of claim 13, said anode comprising a volume in the range from 0.5×10 -3 to 1.5×10 -3 cc. per watt of rated power dissipation of said lamp.
Claim 20
Dependent Claim
35 words
The method of claim 14, said lamp comprising a reflective coating on the inside of said bulb from the bottom of said bulb to a distance in said vertical direction of L/6 from said bottom.
Claim 21
Dependent Claim
27 words
The method of claim 13, said anode and cathode being selectively spaced to comprise a lamp chosen from the group consisting of short and long arc lamps.
Claim 22
Dependent Claim
70 words
An improved source of ultraviolet radiation, said source comprising a sealed bulb transmitting wavelengths as low as 2000 angstroms and a pair of electrodes sealed in said bulb, said improvement comprising mercury sealed in said bulb in amount from 1 to 13 mg. per cc. of said bulb volume, and at least one rare gas sealed within said bulb at a pressure from 2 to 10 atm. at 25° C.
Claim 23
Dependent Claim
70 words
An improved source of ultraviolet radiation, said source comprising a sealed bulb transmitting wavelengths as low as 2000 angstroms and a pair of electrodes sealed in said bulb, said improvement comprising mercury sealed in said bulb in amount from 1 to 13 mg. per cc. of said bulb volume, and at least one rare gas sealed within said bulb at a pressure from 2 to 10 atm. at 25° C.
Claim 24
Dependent Claim
14 words
The improved source of claim 20, said bulb transmitting between 2000 and 3000 angstroms.
Claim 25
Dependent Claim
24 words
The improved source of claim 21, said pair of electrodes comprising an anode and a cathode, and said lamp being operated with DC voltage.
Claim 26
Dependent Claim
48 words
The improved source of claim 22, said improvement comprising said bulb having length L in a vertical direction, said anode and cathode being aligned vertically from above and below, respectively, and said anode being located between the center of said bulb and a distance L/6 below said center.
Claim 27
Dependent Claim
25 words
The improved source of claim 21, said improvement comprising adjusting said mercury and rare gas(es) to maximize said ultraviolet radiation between 2000 and 2500 angstroms.
Claim 28
Dependent Claim
17 words
The improved source of claim 20, said improvement comprising said at least one rare gas comprising xenon.
Claim 29
Dependent Claim
30 words
The improved source of claim 22, said improvement comprising a volume in the range from 0.5×10 -3 to 1.5×10 -3 cc. per watt of rated power dissipation of said source.
Claim 30
Dependent Claim
35 words
The improved source of claim 23, said improvement comprising a reflective coating on the inside of said bulb from the bottom of said bulb to a distance L/6 from said bottom in said vertical direction.
Claim 31
Dependent Claim
28 words
The improved source of claim 22, said anode and cathode being selectively spaced to comprise a lamp chosen from the group consisting of short and long arc lamps.
Claim 32
Dependent Claim
39 words
The improved source of claim 20 or 26, said sealed bulb, electrodes, mercury and at least one rare gas providing said transmitted wavelengths with sufficient intensity for exposing photoresist in practical exposure times of considerably less than 100 sec.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-02-25 | 1983-08-27 | 1984-02-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-02-25 | 1987-08-27 | 1988-02-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-02-25 | 1991-08-27 | 1992-02-26 | $7700.00 | Window Closed / Lapsed |