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US4190015A Expired / Lapsed US ⏱️ 0.0 years remaining

Apparatus for dispensing liquid to spinning workpieces

Assignee: Solitec Wafer Processing Inc
•
Filing: 1977-12-08
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Granted: 1980-02-26
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Expires: 1997-12-08
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Abstract

Abstract A liquid dispenser is disclosed which is arranged to dispense a fixed amount of liquid on a workpiece and is then moved away from the workpiece so that no further drops of the liquid fall on the workpiece.

Inventors

  • 👤 Gary Hillman

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 06:23
CPC Classifications
B; B05; B05B; B05B15/00; B05B15/50; B05B15/52; B05B15/60; B05B15/68

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 231 words
In a machine for dispensing liquid to workpieces which are to be coated by spinning said workpieces to disperse said liquid, liquid dispensing apparatus, comprising: a dispensing nozzle for dispensing said liquid over a central area of a workpiece which is spun to disperse said liquid outwardly from said central area over the surface of said workpiece; liquid supply means connected to said nozzle for supplying liquid thereto, said liquid supply means including valve means for selectively controlling the flow of liquid to said nozzle; and means for preventing the undesired dispensing of liquid onto said workpiece including moving means for moving said nozzle between a first position situated above said central area of said workpiece to which said liquid is to be dispensed and a second position beyond the periphery of said workpiece, and control means for controlling said moving means and said valve means so that said moving means moves said nozzle from said second position to said first position and said valve means allows liquid to be dispensed, and so that said valve means interrupts the flow of liquid and said moving means moves said nozzle from said first position to said second position substantially simultaneously so that while said nozzle is being moved from above the central area of said workpiece to beyond the periphery of said workpiece, undesired dispensing of liquid on said workpiece is prevented.
Claim 2
Dependent Claim 231 words
In a machine for dispensing liquid to workpieces which are to be coated by spinning said workpieces to disperse said liquid, liquid dispensing apparatus, comprising: a dispensing nozzle for dispensing said liquid over a central area of a workpiece which is spun to disperse said liquid outwardly from said central area over the surface of said workpiece; liquid supply means connected to said nozzle for supplying liquid thereto, said liquid supply means including valve means for selectively controlling the flow of liquid to said nozzle; and means for preventing the undesired dispensing of liquid onto said workpiece including moving means for moving said nozzle between a first position situated above said central area of said workpiece to which said liquid is to be dispensed and a second position beyond the periphery of said workpiece, and control means for controlling said moving means and said valve means so that said moving means moves said nozzle from said second position to said first position and said valve means allows liquid to be dispensed, and so that said valve means interrupts the flow of liquid and said moving means moves said nozzle from said first position to said second position substantially simultaneously so that while said nozzle is being moved from above the central area of said workpiece to beyond the periphery of said workpiece, undesired dispensing of liquid on said workpiece is prevented.
Claim 3
Dependent Claim 30 words
The machine according to claim 1 wherein said control means operates said valve means to interrupt the flow of liquid just prior to moving said nozzle from said first position.
Claim 4
Dependent Claim 22 words
The machine according to claim 1 further including a reservoir below said second position to receive any undesired liquid which is dispensed.
Claim 5
Dependent Claim 43 words
The machine according to claim 1 wherein said moving means includes: a double acting air cylinder having an internal piston; a rod connected to said piston and extending through one end of said cylinder; and means for mounting said nozzle on said rod.
Claim 6
Dependent Claim 23 words
The machine according to claim 1 further including means for wiping said nozzle as it is moved between said first and second positions.

References Cited (Backward Citations)

US174612A Cited
US2899929A Cited
US2960060A Cited
US3391671A Cited
US3339522A Cited
US3359938A Cited
US3403658A Cited
US3494326A Cited
US3521599A Cited
US3645581A Cited
US4056075A Cited
US4062463A Cited
US4068019A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-02-25 1983-08-27 1984-02-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-02-25 1987-08-27 1988-02-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-02-25 1991-08-27 1992-02-26 $7700.00 Window Closed / Lapsed

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