Patent US4186045A successfully refreshed from Google Patents.
US4186045A
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Method of epitaxial growth employing electromigration
Assignee: Massachusetts Institute of Technology
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Filing: 1977-10-28
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Granted: 1980-01-29
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Expires: 1997-10-28
Abstract
Abstract A method of liquid phase epitaxial (LPE) growth of, for example, a semiconductor material or an oxide material whereby growth upon a seed in a seed-solution system is affected by passing electric current in an appropriate direction to effect migration of the materials to the growth interface or away from the interface and then cause deposition of desired materials upon said growth interface.
Inventors
- 👤 Harry C. Gatos
- 👤 Lubomir L. Jastrzebski
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:57
CPC Classifications
C; C30; C30B; C30B19/00; C30B19/10; C30B19/103
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
234 words
A method of epitaxial growth of a material predominantly by electromigration, that comprises subjecting the substances from which said material is formed to a high temperature to create a liquid solution that includes the constituents of the material; bringing a substrate in contact with the solution, there being a solute boundary layer in the solution immediately adjacent the substrate; creating an electric field in the solution in an appropriate direction to cause electromigration of at least one of the solute and the solvent that constitute said solution to establish in the solution adjacent the interface between the solution and the substrate a supersaturated solution of said constituents which precipitate on the substrate at said interface by virtue of the condition of supersaturation and effect epitaxial growth thereon; establishing and maintaining the parameters of the system at values at which growth is achieved mostly by virtue of said electromigration, said parameters comprising the temperature of the solution, the solute boundary layer thickness in the solution which is kept relatively large by minimizing convection in the solution, the thickness of the substrate and carrier concentration in the substrate, the thickness of the substrate being kept at a value which for the given system, and together with the other parameters of the system, renders the effect of the electromigration dominant and renders the effect of Peltier cooling insignificant; and thereby epitaxially growing a layer on said substrate.
Claim 2
Independent Claim
234 words
A method of epitaxial growth of a material predominantly by electromigration, that comprises subjecting the substances from which said material is formed to a high temperature to create a liquid solution that includes the constituents of the material; bringing a substrate in contact with the solution, there being a solute boundary layer in the solution immediately adjacent the substrate; creating an electric field in the solution in an appropriate direction to cause electromigration of at least one of the solute and the solvent that constitute said solution to establish in the solution adjacent the interface between the solution and the substrate a supersaturated solution of said constituents which precipitate on the substrate at said interface by virtue of the condition of supersaturation and effect epitaxial growth thereon; establishing and maintaining the parameters of the system at values at which growth is achieved mostly by virtue of said electromigration, said parameters comprising the temperature of the solution, the solute boundary layer thickness in the solution which is kept relatively large by minimizing convection in the solution, the thickness of the substrate and carrier concentration in the substrate, the thickness of the substrate being kept at a value which for the given system, and together with the other parameters of the system, renders the effect of the electromigration dominant and renders the effect of Peltier cooling insignificant; and thereby epitaxially growing a layer on said substrate.
Claim 3
Dependent Claim
78 words
A method of epitaxial growth of a material as claimed in claim 1 wherein said high temperature is about the saturation temperature of the solution prior to said electromigration, wherein said electromigration creates within the solute boundary layer adjacent to the interface a concentration of solute greater than the concentration of solute in the remainder of the solution and hence effects supersaturation at said interface, and wherein said substrate has a thickness of less than about 300 micrometers.
Claim 4
Dependent Claim
118 words
A method of epitaxial growth of a material as claimed in claim 1 wherein said substances are solids at room temperature, wherein said high temperature creates a liquid melt solution therefrom and wherein mixing occurs by virtue of thermal gradients in the liquid-melt solution caused by temperature differences therein, creating said solute boundary layer in the region of the solution near the interface, said solute boundary layer having a concentration of solute different from the concentration of solute in the bulk of the solution, said electromigration occurring between the bulk of the solution and the solute boundary layer to produce said condition of supersaturation that is, an excess of solute, in the solute boundary immediately adjacent the interface.
Claim 5
Dependent Claim
41 words
A method as claimed in claim 1 that further includes adjusting the magnitude of electric field to change the amount or rate of electrical migration to control the growth velocity an composition profile and the impurity profile of the grown material.
Claim 6
Dependent Claim
17 words
A method as claimed in claim 1 wherein said constituents comprise group III-V compounds and mixtures thereof.
Claim 7
Dependent Claim
25 words
A method as claimed in claim 5 wherein said compounds are taken from the group consisting essentially of GaAs, InSb, InAs, GaP and mixtures thereof.
Claim 8
Dependent Claim
23 words
A method as claimed in claim 1 wherein said constituents are electrically insulating at room temperature and wherein said material is an oxide.
Claim 9
Dependent Claim
146 words
A method of epitaxial growth as defined by claim 1 of an oxide material, that comprises subjecting the substances from which said material is formed to a high temperature to create a solution in which at least one of the solute and the solvent includes constituents of said material, said substances being electrically insulating solids at room temperature; bringing a substrate in contact with the solution; and creating an electric field in the solution in an appropriate direction to cause electromigration of at least one of said solute and said solvent toward the interface region between the solution and the substrate or away from said region, said constituents at said region by virtue of said electromigration being present in sufficient quantity to establish a supersaturated solution of said constituents at said region, which constituents precipitate on the substrate at said interface and effect epitaxial growth thereon.
Claim 10
Dependent Claim
47 words
A method of epitaxial growth of a material as claimed in claim 8 wherein said high temperature is sufficiently high to melt the solid substances and to create a liquid solution therefrom, said high temperature being about the saturation temperature of the solution prior to said electromigration.
Claim 11
Dependent Claim
32 words
A method of epitaxial growth of a material as claimed in claim 9 which includes changing the level of the electric field to effect changes in the composition of the grown material.
Claim 12
Dependent Claim
80 words
A method of epitaxial growth of a material as claimed in claim 9 in which the substrate is chosen to have a resistivity that is high with respect to the resistivity of the solution, said method further including applying to selected areas on the obverse side of said substrate electrical contacts, and applying an electric potential to said selected areas to cause growth at selected regions of said interface which correspond in positional coordinates to the areas of said contacts.
Claim 13
Dependent Claim
13 words
A method as claimed in claim 8 wherein said oxide is a garnet.
Claim 14
Dependent Claim
18 words
A method as claimed in claim 12 wherein said garnet is Y 3 Fe 5 O 12 .
Claim 15
Dependent Claim
67 words
A method as claimed in claim 8 wherein said oxide is taken from the group consisting of garnets, orthoferrites, spinels, and magnetoplumbites of the forms X 3 Fe 5- β Ga.sub.δ Al y O 12 , where β=δ+y and XFe 1- β Ga.sub.δ Al y O 3 , where β=δ+y and where X is taken from the group consisting of rare earths and mixtures of rare earths.
Claim 16
Dependent Claim
108 words
A method as claimed in claim 8 wherein said oxide is one of the group consisting essentially of: PbMoO 4 and Pb 2 MoO 5 from PbO flux; Gd 3 Ga 5-x-y Mg x Zr y O 12 from PbO flux; lead germinates; teta alumine (NaO 6-gAl 2 O 3 ) Na 2 O-Ga 2 O 5 flux; Nd 1-x Y x P 5 O 15 from phosphoric acid flux; type β-LiAlSiO 4 crystals from flux; beryllia type (BeO crystals) from flux; corundum type crystals from cryolite (Na 3 AlF 6 ) flux; and LiFe 5 O 8 from PbO, PbF 2 and B 2 O 3 flux.
Claim 17
Dependent Claim
28 words
A method as claimed in claim 1 wherein the material is a semiconductor of the form Ga x In y Al z As.sub.α P.sub.β Sb.sub.γ, where x+y+z=1 α+β+γ=1.
Claim 18
Dependent Claim
29 words
A method as claimed in claim 1 wherein the material grown is a semiconductor of the form: Hg x Cd y Zn z Te.sub.α Se.sub.β S.sub.γ, where z+x+y=1 α+β+γ=1.
Claim 19
Dependent Claim
29 words
A method as claimed in claim 1 where the material grown is a semiconductor of the form: Cd z Sn x Pb y Te.sub.α Se.sub.β S.sub.γ, where z+x+y=1 α+β+γ=1.
Claim 20
Dependent Claim
31 words
A method as claimed in claim 1 in which the material grown is a semiconductor of the form: Al.sub.γ In.sub.α Ga.sub.β S x Se y Te z , where γ+α+β=1 x+y+z=1.
Claim 21
Dependent Claim
29 words
A method as claimed in claim 1 wherein the material grown is the compound NiP 2 , CuP 2 , RhP 3 , CuP 2 from Sn solution flux.
Claim 22
Dependent Claim
38 words
A method as claimed in claim 1 wherein the material grown is a metal transition phosphide of the type M 2 P from Sn flux, where M is taken from the group consisting of Fe, Co and Ni.
Claim 23
Dependent Claim
14 words
A method as claimed in claim 1 wherein the material grown is neodynian chlorapitite.
Claim 24
Dependent Claim
75 words
A method as claimed in claim 1 in which the substrate is chosen to have a resistivity that is high with respect to the resistivity of the solution and in which selected areas on the obverse side of said substrate have applied thereto electrical contacts, said method further including applying an electric potential to said selected areas to cause growth at selected regions of said interface which correspond in positional coordinates to said selected areas.
Claim 25
Dependent Claim
37 words
A method as claimed in claim 1 wherein said growth is at a growth velocity chosen in accordance with the curves of FIG. 6 to provide a growth region in which electromigration dominates in the growth process.
References Cited (Backward Citations)
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US3411946A
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US3600294A
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US3879235A
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US4012242A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-01-28 | 1983-07-30 | 1984-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-01-28 | 1987-07-30 | 1988-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-01-28 | 1991-07-30 | 1992-01-29 | $7700.00 | Window Closed / Lapsed |