Patent US4173470A successfully refreshed from Google Patents.
US4173470A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Novolak photoresist composition and preparation thereof
Assignee: AT&T Inc
•
Filing: 1977-11-09
•
Granted: 1979-11-06
•
Expires: 1997-11-09
Abstract
Abstract A novolak resin suitable for use as a light-sensitive photoresist or maskant is prepared by reaction of at least one cresol with an aldehyde or reactive ketone and an aromatic hydroxyl compound having an alkyl side chain of from 3-15 carbon atoms. The addition of a conventional photosensitive agent yields a composition evidencing superior characteristics as compared with prior art novolak photoresists and which requires less sensitizer than such prior art resists.
Inventors
- 👤 Susan Fahrenholtz
- 👤 David T. Long
- 👤 Raymond C. Pitetti
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 17:04
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; G03F7/0236
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
127 words
Method for the preparation of a positive photoresist which comprises the steps of (a) reacting at least one cresol with a condensation agent selected from the group consisting of aldehydes and reactive ketones, said condensation agent having less than 10 carbon atoms and at least one carbonyl group per molecule, and a hydroxylated aromatic of the general formula ##STR2## wherein R is an alkyl group having from 3-15 carbon atoms, said reaction being effected in the presence of a condensation catalyst, (b) heating the reaction mixture to reflux over a time period ranging from 12 to 24 hours, (c) subjecting the resultant mixture to vacuum distillation at a temperature ranging from 200-300 degrees C., and (d) adding a photosensitizing agent and a solvent to the resultant product.
Claim 2
Dependent Claim
127 words
Method for the preparation of a positive photoresist which comprises the steps of (a) reacting at least one cresol with a condensation agent selected from the group consisting of aldehydes and reactive ketones, said condensation agent having less than 10 carbon atoms and at least one carbonyl group per molecule, and a hydroxylated aromatic of the general formula ##STR2## wherein R is an alkyl group having from 3-15 carbon atoms, said reaction being effected in the presence of a condensation catalyst, (b) heating the reaction mixture to reflux over a time period ranging from 12 to 24 hours, (c) subjecting the resultant mixture to vacuum distillation at a temperature ranging from 200-300 degrees C., and (d) adding a photosensitizing agent and a solvent to the resultant product.
Claim 3
Dependent Claim
49 words
Method in accordance with claim 1 wherein the cresol is employed in an amount ranging from 50-95 percent, by weight, based on the total hydroxylated aromatics present and said hydroxylated aromatic is employed in an amount ranging from 5-50 percent, by weight, based on the total hydroxylated aromatics present.
Claim 4
Dependent Claim
24 words
Method in accordance with claim 1 wherein the condensation agent is employed in an amount ranging from 0.95 to 1.35 of the stoichiometric amount.
Claim 5
Dependent Claim
20 words
Method in accordance with claim 3 wherein said hydroxylated aromatic is 2-tertiary butyl phenol and said condensation agent is formalehyde.
Claim 6
Dependent Claim
13 words
Method in accordance with claim 4 wherein the photosensitizing agent is 2,3-dibromopropyl naphthoquinone-1,2-diazide-(2)-5-sulfonate.
Claim 7
Dependent Claim
64 words
Method for forming a patterned resist on the surface of a substrate which comprises exposing a portion of the composition of claim 1 on said substrate to ultraviolet radiation having a wavelength with the range of 2000 to 5000 Angstroms for a time period sufficient to react the photosensitizer so as to solubilize the resist and selectively removing the exposed pattern from said substrate.
Claim 8
Dependent Claim
54 words
In a method for the preparation of a thin film device comprising the steps of anodizing portions of a layer of film forming metal deposited on an insulating substrate with other portions of the layer coated to prevent anodization thereof, the invention characterized in that the coating is the composition produced by claim 1.
Claim 9
Dependent Claim
8 words
The product of the method of claim 1.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-11-05 | 1983-05-07 | 1983-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-11-05 | 1987-05-07 | 1987-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-11-05 | 1991-05-07 | 1991-11-06 | $7700.00 | Window Closed / Lapsed |