US4166574A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for marking identification symbols on wafer
Assignee: Toshiba Corp
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Filing: 1978-05-31
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Granted: 1979-09-04
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Expires: 1998-05-31
Abstract
Abstract An apparatus for marking identification symbols on a wafer including: a marking means for marking identification symbols on the wafer; a reading means for reading the marked identification symbols; a comparing means for comparing data of the identification symbols which are read by the reading means with basic data on which the identification symbols are marked on the wafer, and a judging means for inspecting and judging from a result of the comparison whether the desired identification symbols are marked on the wafer or not.
Inventors
- 👤 Masanori Yokoyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 07:54
CPC Classifications
G; G06; G06K; G06K1/00; G06K1/12; B; B28; B28D; B28D5/00; B28D5/04; B28D5/047; H; H10; H10W; H10W46/00; H10W46/201; Y; Y10; Y10S; Y10S235/00; Y10S235/901
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
98 words
An apparatus for marking identification symbols on a wafer surface comprising: a marking means for marking the identification symbols on the wafer surface; a reading means for reading the marked identification symbols on the wafer surface; a comparing means for making comparison of data of the marked symbols which are read by the reading means with basic data on which said identification symbols are marked on the wafer surface; and a judging means for inspecting and judging from the result of the comparison of the both data whether the identification symbols are correctly marked on said wafer surface.
Claim 2
Independent Claim
98 words
An apparatus for marking identification symbols on a wafer surface comprising: a marking means for marking the identification symbols on the wafer surface; a reading means for reading the marked identification symbols on the wafer surface; a comparing means for making comparison of data of the marked symbols which are read by the reading means with basic data on which said identification symbols are marked on the wafer surface; and a judging means for inspecting and judging from the result of the comparison of the both data whether the identification symbols are correctly marked on said wafer surface.
Claim 3
Dependent Claim
25 words
The apparatus according to claim 1, wherein said marking means marks bar-shape codes which are radially arranged in the marginal portion of the wafer surface.
Claim 4
Dependent Claim
56 words
The apparatus according to claim 2, wherein said apparatus further comprises a rotating plate which fixes said wafer, and said reading means is a photoelectric reading means which reads the identification symbols marked on the wafer while turning round the rotating plate, after the identification symbols are marked on the wafer fixed on said rotating plate.
Claim 5
Independent Claim
25 words
The apparatus according to any one of claims 1 to 3, wherein the marking means is a diamond cut device or a laser cut device.
Claim 6
Dependent Claim
16 words
The apparatus according to claim 4, wherein a diamond cutter is finely vibrated by ultrasonic wave.
Claim 7
Dependent Claim
31 words
The apparatus according to claim 4, wherein said marking means is disposed in the under side of the wafer to mark the identification symbols on the under surface of the wafer.
Claim 8
Dependent Claim
37 words
The apparatus according to claim 6, wherein said marking means is provided with a sawdust collecting vessel disposed in such a manner as to surround the portion of the wafer surface where the identification symbols are marked.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-09-03 | 1983-03-05 | 1983-09-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-09-03 | 1987-03-05 | 1987-09-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-09-03 | 1991-03-05 | 1991-09-04 | $7700.00 | Window Closed / Lapsed |